Methods and apparatus for enhancing electronic device manufacturing throughput
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United States of America Patent
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Jan 13, 2009
Grant Date -
Feb 9, 2006
app pub date -
Jul 12, 2005
filing date -
Jul 12, 2004
priority date (Note) -
Expired
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Abstract
In some aspects, a method is provided for enhancing electronic device manufacturing throughput within an electronic device manufacturing tool. The method includes the steps of (1) for the electronic device manufacturing tool, creating an electronic device manufacturing schedule based on process factors and mechanical factors associated with the manufacturing tool; and (2) employing the electronic device manufacturing schedule during electronic device manufacturing within the electronic device manufacturing tool. Numerous other aspects are provided.
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