Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus
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United States of America Patent
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Jan 13, 2009
Grant Date -
Aug 24, 2006
app pub date -
Apr 17, 2006
filing date -
Mar 5, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A semiconductor manufacturing apparatus having a plurality of portions according to this invention includes a storage device which stores, for each portion, information representing the lapsed time of use or the product processing count till occurrence of a failure after installation of the portion, and a calculation device which receives the information stored in the storage device and outputs function information representing a failure probability and/or failure rate as a function of the lapsed time of use or the product processing count for each portion.
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