Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate
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United States of America Patent
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Jan 20, 2009
Grant Date -
Mar 17, 2005
app pub date -
Aug 13, 2004
filing date -
Feb 14, 2002
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Abstract
, a water absorbency of about 0.02% or less, and an average grain size within the range of about 10 μm to about 25 μm. Also disclosed herein are methods for fabricating and cleaning the yttrium oxide-comprising gas distribution plate.
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