Micromirror device and method for making the same

United States of America Patent

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Jan 27, 2009
Grant Date
Jul 21, 2005
app pub date
Feb 11, 2005
filing date
Feb 12, 2003

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Abstract

Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

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Patent Owner(s)

Patent Owner	Address
TEXAS INSTRUMENTS INCORPORATED	12500 TI BOULEVARD M/S 3999 DALLAS TX 75243

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G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Doan, Jonathan	Mountain View, US	17	243
Dunphy, James	San Jose, US	47	508
Huibers, Andrew	Palo Alto, US	69	2174
Patel, Satyadev	Sunnyvale , US	43	670
Shi, Hongqin	San Jose, US	33	475
Simonian, Dmitri	Sunnyvale , US	29	428
Zhang, Jianglong	Sunnyvale, US	16	223

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Micromirror device and method for making the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11056752

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PATENT NO	7483198
APP PUB NO	20050157375A1
SERIAL NO	11056752
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 27, 2009	US,7483198,B2 US7483198B2	GRANTED PATENT AS SECOND PUBLICATION
July 21, 2005	US,20050157375,A1 US20050157375A1	FIRST PUBLISHED PATENT APPLICATION

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11056752

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