Light modulating mirror device and array
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United States of America Patent
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Feb 3, 2009
Grant Date -
Jun 1, 2006
app pub date -
Nov 30, 2004
filing date -
Nov 30, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A deformable reflector includes a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon, a flat surface, and a pulldown electrode formed in the flat substrate. The electrode membrane has substantially a same flatness of the flat substrate when the electrode membrane comes into contact with the flat substrate across a majority of its surface area in response to a voltage being applied to the pulldown electrode. The electrode membrane has a two-dimensional curvature when no voltage is applied to the pulldown electrode.
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