Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
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United States of America Patent
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Feb 10, 2009
Grant Date -
Jun 1, 2006
app pub date -
Nov 30, 2004
filing date -
Nov 30, 2004
priority date (Note) -
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Abstract
A micro-machined ultrasonic transducer substrate for immersion operation is formed by a particular arrangement of a plurality of micro-machined membranes that are supported on a silicon substrate. The membranes, together with the substrate, form surface microcavities that are vacuum sealed to provide electrostatic cells. The cells can operate at high frequency and can cover a broader bandwidth in comparison with conventional piezoelectric bulk transducers.
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