Optical microelectromechantical structure
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United States of America Patent
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Feb 10, 2009
Grant Date -
Oct 12, 2006
app pub date -
Jun 6, 2003
filing date -
Jun 6, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to an optical microelectromechanical structure (MEMS) comprising—an (at least one) optically transmissive layer (UTL)—an (at least one) intermediate layer structure (IL)—a (at least one) device layer (DL) said intermediate layer structure (IL) defining one or more optical paths (OP) between said substantially optically transmissive layer (UTL) and said device layer (DL), said intermediate structure layer (IL) defining the distance (d) between said optically transmissive layer (UTL) and said device layer (DL).
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