Method of manufacturing a voltage controlled oscillator
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United States of America Patent
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Feb 17, 2009
Grant Date -
Sep 13, 2007
app pub date -
Apr 27, 2007
filing date -
Sep 19, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A manufacturing method is provided for a voltage controlled oscillator comprising an thin film BAW resonator and a variable capacitor element. The thin film BAW resonator includes an anchor section formed on a Si substrate, a lower electrode supported on the anchor section and positioned to face the Si substrate, a first piezoelectric film formed on the lower electrode, and an upper electrode formed on the first piezoelectric film. The variable capacitor element includes a stationary electrode formed on a Si substrate, an anchor section formed on the Si substrate, a first electrode supported on the anchor section and positioned to face the Si substrate, a second piezoelectric film formed on the first electrode, and a second electrode formed on the second piezoelectric film.
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