Methods and apparatuses for depositing film on both sides of a pane
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United States of America Patent
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Feb 17, 2009
Grant Date -
Jan 27, 2005
app pub date -
Aug 20, 2004
filing date -
Dec 21, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
A method and apparatus for coating two sides of a single pane of glass or other substrate in a single pass through a coating apparatus. A sputtering line is provided, this line comprising a series of sputtering chambers. At least one of the chambers comprises a downward sputtering chamber having an upper target. At least one of the chambers comprises an upward sputtering chamber having a lower target. In some embodiments, the upper and lower targets are rotary targets. The coating apparatus advantageously has a plurality of transport rollers for conveying the substrate along the sputtering line. In certain embodiments, a majority of the chambers of the sputtering line are downward sputtering chambers each having only an upper target with no lower target.
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