Micromachined assembly with a multi-layer cap defining a cavity
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United States of America Patent
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Feb 17, 2009
Grant Date -
Sep 9, 2004
app pub date -
Mar 7, 2003
filing date -
Mar 7, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
This invention comprises a process for fabricating a micro mechanical structure in a sealed cavity having a multi-layer high stiffness cap. The high stiffness material used for the cap protects the underlying microstructure from destructive environmental forces inherent in the packaging process and from environmental damage.
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