US Patent No: 7,492,502

Number of patents in Portfolio can not be more than 2000

Method of fabricating a free-standing microstructure

ALSO PUBLISHED AS: 20060077529
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Abstract

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Provided is a MEMS device comprising an integrated post and deformable layer. In some embodiments, the transition between the post and deformable layer comprises substantially a single arcuate or convex surface, thereby providing a mechanically robust structure. Some embodiments provide a method for fabricating a MEMS device comprising the use of a self-planarizing sacrificial material, which provides a surface conducive to the formation of a relatively uniform deformable layer thereon.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA660

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 318 5314
Sampsell, Jeffrey B San Jose, CA 245 13070

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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4,482,213 Perimeter seal reinforcement holes for plastic LCDs 220 1982
4,571,603 Deformable mirror electrostatic printer 359 1984
4,566,935 Spatial light modulator and method 505 1984
4,710,732 Spatial light modulator and method 486 1984
4,596,992 Linear spatial light modulator and printer 387 1984
4,615,595 Frame addressed spatial light modulator 392 1984
4,662,746 Spatial light modulator and method 490 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 280 1988
4,956,619 Spatial light modulator 576 1988
5,079,544 Standard independent digitized video system 344 1989
5,028,939 Spatial light modulator system 389 1989
4,954,789 Spatial light modulator 561 1989
5,037,173 Optical interconnection network 315 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 298 1990
5,142,405 Bistable DMD addressing circuit and method 336 1990
5,061,049 Spatial light modulator and method 728 1990
5,192,395 Method of making a digital flexure beam accelerometer 202 1990
5,096,279 Spatial light modulator and method 505 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 313 1991
5,226,099 Digital micromirror shutter device 363 1991
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5,170,156 Multi-frequency two dimensional display system 252 1991
5,192,946 Digitized color video display system 320 1991
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5,214,420 Spatial light modulator projection system with random polarity light 296 1991
5,206,629 Spatial light modulator and memory for digitized video display 248 1991
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5,168,406 Color deformable mirror device and method for manufacture 278 1991
5,254,980 DMD display system controller 239 1991
5,563,398 Spatial light modulator scanning system 200 1991
5,233,385 White light enhanced color field sequential projection 370 1991
5,233,456 Resonant mirror and method of manufacture 301 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 377 1992
5,331,454 Low reset voltage process for DMD 344 1992
5,296,950 Optical signal free-space conversion board 227 1992
5,231,532 Switchable resonant filter for optical radiation 242 1992
5,212,582 Electrostatically controlled beam steering device and method 344 1992
5,312,513 Methods of forming multiple phase light modulators 274 1992
5,172,262 Spatial light modulator and method 385 1992
5,305,640 Digital flexure beam accelerometer 188 1992
5,446,479 Multi-dimensional array video processor system 250 1992
5,818,095 High-yield spatial light modulator with light blocking layer 304 1992
5,272,473 Reduced-speckle display system 285 1992
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5,287,096 Variable luminosity display system 269 1992
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5,581,272 Signal generator for controlling a spatial light modulator 195 1993
5,457,493 Digital micro-mirror based image simulation system 320 1993
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5,452,024 DMD display system 418 1993
5,497,197 System and method for packaging data into video processor 231 1993
5,517,347 Direct view deformable mirror device 300 1993
5,583,688 Multi-level digital micromirror device 463 1993
5,448,314 Method and apparatus for sequential color imaging 407 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 274 1994
5,606,441 Multiple phase light modulation using binary addressing 219 1994
5,444,566 Optimized electronic operation of digital micromirror devices 357 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 299 1994
5,526,688 Digital flexure beam accelerometer and method 208 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 280 1994
6,061,075 Non-systolic time delay and integration printing 181 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 308 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 280 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 260 1994
5,548,301 Pixel control circuitry for spatial light modulator 249 1994
5,650,881 Support post architecture for micromechanical devices 260 1994
5,552,924 Micromechanical device having an improved beam 245 1994
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5,610,438 Micro-mechanical device with non-evaporable getter 293 1995
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6,232,936 DMD Architecture to improve horizontal resolution 211 1995
5,535,047 Active yoke hidden hinge digital micromirror device 461 1995
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5,619,366 Controllable surface filter 228 1995
5,551,293 Micro-machined accelerometer array with shield plane 220 1995
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5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 403 1995
5,608,468 Method and device for multi-format television 247 1995
5,610,625 Monolithic spatial light modulator and memory package 184 1995
5,646,768 Support posts for micro-mechanical devices 303 1995
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6,099,132 Manufacture method for micromechanical devices 207 1995
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5,657,099 Color phase control for projection display using spatial light modulator 207 1995
5,654,741 Spatial light modulator display pointing device 191 1995
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5,771,116 Multiple bias level reset waveform for enhanced DMD control 285 1996
5,842,088 Method of calibrating a spatial light modulator printing system 256 1997
6,624,944 Fluorinated coating for an optical element 91 1997
5,808,780 Non-contacting micromechanical optical switch 230 1997
5,912,758 Bipolar reset for spatial light modulators 204 1998
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6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 287 1998
6,282,010 Anti-reflective coatings for spatial light modulators 286 1999
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6,295,154 Optical switching apparatus 297 1999
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6,625,047 Micromechanical memory element 253 2001
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6,959,990 Prism for high contrast projection 49 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (47)
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6,912,022 Optical interference color display and optical interference modulator 241 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 105 2003
6,982,820 Color changeable pixel 156 2003
7,012,726 MEMS devices with unreleased thin film components 75 2003
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2004/0209,195 Method for fabricating an interference display unit 221 2003
6,995,890 Interference display unit 128 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 199 2003
6,882,458 Structure of an optical interference display cell 241 2003
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6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 143 2004
2005/0195,462 Interference display plate and manufacturing method thereof 239 2004
7,142,346 System and method for addressing a MEMS display 31 2005
2006/0066,932 Method of selective etching using etch stop layer 70 2005
2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 117 2005
2006/0256,420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 29 2006
2006/0257,070 Optical interference display cell and method of making the same 20 2006
2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
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6,747,785 MEMS-actuated color light modulator and methods 213 2002
6,666,561 Continuously variable analog micro-mirror device 228 2002
2004/0147,056 Micro-fabricated device and method of making 190 2003
6,829,132 Charge control of micro-electromechanical device 210 2003
6,811,267 Display system with nonvisible data projection 221 2003
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2005/0068,583 Organizing a digital image 177 2003
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MAGNACHIP SEMICONDUCTOR, LTD. (1)
6,246,398 Application specific integrated circuit (ASIC) for driving an external display device 58 1998
 
MAPLE VISION TECHNOLOGIES INC. (1)
6,204,080 Method for manufacturing thin film actuated mirror array in an optical projection system 85 1998
 
MEMTRONICS, A DIVISION OF COGENT SOLUTIONS, INC. (1)
6,608,268 Proximity micro-electro-mechanical system 180 2002
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
5,650,834 Active-matrix device having silicide thin film resistor disposed between an input terminal and a short-circuit ring 103 1994
 
MITSUBISHI JIDOSHA KOGYO K.K. (A.K.A. MITSUBISHI MOTORS CORPORATION) (1)
5,647,819 Speed change control method for an automatic transmission 50 1995
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 216 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 226 1994
 
NEW VISUAL MEDIA GROUP, L.L.C. (1)
5,638,084 Lighting-independent color video display 216 1996
 
Nippondenso Co., Ltd. (1)
5,824,608 Semiconductor physical-quantity sensor and method for manufacturing same 64 1996
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 201 2001
 
North American Philips Corporation (1)
4,900,136 Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel 144 1988
 
Northrop Corporation (1)
5,153,771 Coherent light modulation and detector 177 1990
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
5,793,504 Hybrid angular/spatial holographic multiplexer 146 1996
 
NORTHWESTERN UNIVERSITY (1)
5,638,946 Micromechanical switch with insulated switch contact 387 1996
 
OCEAN POWER TECHNOLOGIES, INC. (1)
4,748,366 Novel uses of piezoelectric materials for creating optical effects 280 1986
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 191 2002
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 216 1987
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 73 2004
 
Quantum Diagnostics Ltd. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 289 1986
 
RAYTHEON COMPANY (1)
6,391,675 Method and apparatus for switching high frequency signals 76 1999
 
RENESAS ELECTRONICS CORPORATION (1)
6,275,220 Flat panel type display apparatuses having driver ICs formed on plate for holding display glasses 55 1998
 
RESEARCH TRIANGLE INSTITUTE (1)
6,456,420 Microelectromechanical elevating structures 100 2000
 
ROCKSTAR CONSORTIUM US LP (1)
5,629,790 Micromachined torsional scanner 574 1993
 
ROUND ROCK RESEARCH, LLC (1)
6,531,945 Integrated circuit inductor with a magnetic core 62 2000
 
ROYAL BANK CAPITAL PARTNERS (1)
5,673,139 Microelectromechanical television scanning device and method for making the same 316 1993
 
SAMSUNG DISPLAY CO., LTD. (1)
5,674,757 Process of fabricating a self-aligned thin-film transistor for a liquid crystal display 65 1995
 
SANWA BANK CALIFORNIA (1)
5,293,272 High finesse holographic fabry-perot etalon and method of fabricating 180 1992
 
SARNOFF CORPORATION (1)
6,392,233 Optomechanical radiant energy detector 67 2000
 
SEIKO EPSON CORPORATION (1)
6,438,282 Optical switching device and image display device 140 2001
 
SEMATECH, INC. (1)
5,474,865 Globally planarized binary optical mask using buried absorbers 128 1994
 
Societe d'Etude du Radant (1)
4,531,126 Method and device for analyzing a very high frequency radiation beam of electromagnetic waves 182 1982
 
SONY CORPORATION (1)
5,355,357 Disc player and disc loading device 172 1992
 
Sperry Marine Inc. (1)
5,136,669 Variable ratio fiber optic coupler optical signal processing element 132 1991
 
SUMITOMO CHEMICAL COMPANY, LIMITED (1)
5,503,952 Method for manufacture of color filter and liquid crystal display 58 1995
 
Techbank Corporation (1)
6,736,987 Silicon etching apparatus using XeF2 49 2000
 
TELEDYNE DALSA SEMICONDUCTOR INC. (1)
6,602,791 Manufacture of integrated fluidic devices 68 2001
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 231 1991
 
The United States of America as represented by the Secretary of the Navy (1)
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TOPPOLY OPTOELECTRONICS CORP. (1)
5,976,902 Method of fabricating a fully self-aligned TFT-LCD 77 1998
 
TURNSTONE SYSTEMS, INC. (1)
6,671,149 Systems and methods for protecting vulnerable micro electro-mechanical system (MEMS) and electronic relay devices 16 2000
 
UNITED TEST AND ASSEMBLY CENTER LTD. (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 83 2003
 
Other [Check patent profile for assignment information] (14)
4,445,050 Device for conversion of light power to electric power 188 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 177 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 267 1991
5,315,370 Interferometric modulator for optical signal processing 131 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 135 1992
5,526,327 Spatial displacement time display 139 1994
5,500,635 Products incorporating piezoelectric material 286 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 148 1995
5,822,110 Reflective light valve modulator 79 1997
5,896,796 Device for punching holes in a bicycle rim 32 1997
6,288,824 Display device based on grating electromechanical shutter 160 1999
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 241 2003
2005/0001,828 Charge control of micro-electromechanical device 178 2004
2005/0014,374 Gap tuning for surface micromachined structures in an epitaxial reactor 61 2004

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (12)
7,795,061 Method of creating MEMS device cavities by a non-etching process 4 2005
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 6 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 5 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012

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