Method of fabricating a free-standing microstructure

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7492502
APP PUB NO 20060077529A1
SERIAL NO

11198127

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is a MEMS device comprising an integrated post and deformable layer. In some embodiments, the transition between the post and deformable layer comprises substantially a single arcuate or convex surface, thereby providing a mechanically robust structure. Some embodiments provide a method for fabricating a MEMS device comprising the use of a self-planarizing sacrificial material, which provides a surface conducive to the formation of a relatively uniform deformable layer thereon.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SNAPTRACK, INC.SAN JOSE, CA1469

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Mateo, US 185 7455
Sampsell, Jeffrey B San Jose, US 165 15208

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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2006/0066,932 Method of selective etching using etch stop layer 70 2005
2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 135 2005
2006/0256,420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 29 2006
2006/0257,070 Optical interference display cell and method of making the same 20 2006
2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
2007/0269,748 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATORS 31 2007
2008/0068,699 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATROS 30 2007
 
MAPLE VISION TECHNOLOGIES INC. (1)
6204080 Method for manufacturing thin film actuated mirror array in an optical projection system 92 1998
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (3)
5311360 Method and apparatus for modulating a light beam 598 1992
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6219015 Method and apparatus for using an array of grating light valves to produce multicolor optical images 92 1996
 
BOURNS, INC. (1)
6249039 Integrated inductive components and method of fabricating such components 147 1998
 
HONEYWELL INTERNATIONAL INC. (2)
6215221 Electrostatic/pneumatic actuators for active surfaces 167 1998
6288472 Electrostatic/pneumatic actuators for active surfaces 112 2000
 
CP CLARE (1)
6297072 Method of fabrication of a microstructure having an internal cavity 239 1999
 
Honeywell Inc. (3)
4377324 Graded index Fabry-Perot optical filter device 252 1980
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5822170 Hydrophobic coating for reducing humidity effect in electrostatic actuators 155 1997
 
FSI INTERNATIONAL, INC. (1)
4900395 HF gas etching of wafers in an acid processor 184 1989
 
CITIZEN HOLDINGS CO., LTD. (1)
6713235 Method for fabricating thin-film substrate and thin-film substrate fabricated by the method 53 2001
 
CHROMISYS (1)
2002/0071,169 Micro-electro-mechanical-system (MEMS) mirror device 109 2000
 
North American Philips Corporation (1)
4900136 Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel 155 1988
 
EASTMAN KODAK COMPANY (5)
5075796 Optical article for multicolor imaging 220 1990
5347377 Planar waveguide liquid crystal variable retarder 88 1992
6284560 Method for producing co-planar surface structures 66 1998
6335831 Multilevel mechanical grating device 101 1998
2002/0171,610 Organic electroluminescent display with integrated touch-screen 54 2001
 
TURNSTONE SYSTEMS, INC. (1)
6671149 Systems and methods for protecting vulnerable micro electro-mechanical system (MEMS) and electronic relay devices 17 2000
 
FAHRENHEIT THERMOSCOPE LLC (2)
5330617 Method for etching integrated-circuit layers to a fixed depth and corresponding integrated circuit 45 1991
5299041 Active matrix, high definition, liquid crystal display structure 81 1992
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (4)
4389096 Image display apparatus of liquid crystal valve projection type 293 1981
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6952304 Variable mirror and information apparatus comprising variable mirror 53 2002
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AT&T CORP. (1)
5500761 Micromechanical modulator 354 1994
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
SNAPTRACK, INC. (21)
7795061 Method of creating MEMS device cavities by a non-etching process 6 2005
* 2007/0155,051 Method of creating MEMS device cavities by a non-etching process 17 2005
* 2009/0059,345 MEMS DEVICES WITH PROTECTIVE COATINGS 9 2008
7864403 Post-release adjustment of interferometric modulator reflectivity 4 2009
7835093 Methods for forming layers within a MEMS device using liftoff processes 12 2010
* 2010/0200,938 METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES 3 2010
8218229 Support structure for MEMS device and methods therefor 6 2010
8149497 Support structure for MEMS device and methods therefor 7 2010
* 2010/0149,627 SUPPORT STRUCTURE FOR MEMS DEVICE AND METHODS THEREFOR 14 2010
7952789 MEMS devices with multi-component sacrificial layers 5 2010
* 2010/0165,442 MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS 4 2010
8284475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
* 2010/0182,675 METHODS OF FABRICATING MEMS WITH SPACERS BETWEEN PLATES AND DEVICES FORMED BY SAME 7 2010
8298847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 6 2010
* 2010/0202,039 MEMS DEVICES HAVING SUPPORT STRUCTURES WITH SUBSTANTIALLY VERTICAL SIDEWALLS AND METHODS FOR FABRICATING THE SAME 9 2010
8164815 MEMS cavity-coating layers and methods 4 2010
* 2010/0245,979 MEMS CAVITY-COATING LAYERS AND METHODS 1 2010
8394656 Method of creating MEMS device cavities by a non-etching process 0 2010
8358458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
* 2011/0051,224 LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED ADHESION IN MEMS DEVICES 0 2010
8830557 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2012
 
FLEX LIGHTING II, LLC (1)
9110200 Illumination device comprising a film-based lightguide 2 2011
* Cited By Examiner

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