US Patent No: 7,492,502

Number of patents in Portfolio can not be more than 2000

Method of fabricating a free-standing microstructure

ALSO PUBLISHED AS: 20060077529

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Abstract

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Provided is a MEMS device comprising an integrated post and deformable layer. In some embodiments, the transition between the post and deformable layer comprises substantially a single arcuate or convex surface, thereby providing a mechanically robust structure. Some embodiments provide a method for fabricating a MEMS device comprising the use of a self-planarizing sacrificial material, which provides a surface conducive to the formation of a relatively uniform deformable layer thereon.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA667

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 319 5409
Sampsell, Jeffrey B San Jose, CA 245 13210

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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4,482,213 Perimeter seal reinforcement holes for plastic LCDs 221 1982
4,571,603 Deformable mirror electrostatic printer 362 1984
4,566,935 Spatial light modulator and method 508 1984
4,710,732 Spatial light modulator and method 487 1984
4,596,992 Linear spatial light modulator and printer 391 1984
4,615,595 Frame addressed spatial light modulator 393 1984
4,662,746 Spatial light modulator and method 492 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 281 1988
4,956,619 Spatial light modulator 578 1988
5,079,544 Standard independent digitized video system 345 1989
5,028,939 Spatial light modulator system 390 1989
4,954,789 Spatial light modulator 563 1989
5,037,173 Optical interconnection network 317 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 299 1990
5,142,405 Bistable DMD addressing circuit and method 337 1990
5,061,049 Spatial light modulator and method 731 1990
5,192,395 Method of making a digital flexure beam accelerometer 203 1990
5,096,279 Spatial light modulator and method 506 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 314 1991
5,226,099 Digital micromirror shutter device 365 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 248 1991
5,170,156 Multi-frequency two dimensional display system 253 1991
5,192,946 Digitized color video display system 323 1991
5,214,419 Planarized true three dimensional display 256 1991
5,214,420 Spatial light modulator projection system with random polarity light 297 1991
5,206,629 Spatial light modulator and memory for digitized video display 249 1991
5,179,274 Method for controlling operation of optical systems and devices 230 1991
5,168,406 Color deformable mirror device and method for manufacture 281 1991
5,254,980 DMD display system controller 240 1991
5,563,398 Spatial light modulator scanning system 202 1991
5,233,385 White light enhanced color field sequential projection 373 1991
5,233,456 Resonant mirror and method of manufacture 302 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 378 1992
5,331,454 Low reset voltage process for DMD 346 1992
5,296,950 Optical signal free-space conversion board 228 1992
5,231,532 Switchable resonant filter for optical radiation 244 1992
5,212,582 Electrostatically controlled beam steering device and method 344 1992
5,312,513 Methods of forming multiple phase light modulators 275 1992
5,172,262 Spatial light modulator and method 386 1992
5,305,640 Digital flexure beam accelerometer 189 1992
5,446,479 Multi-dimensional array video processor system 251 1992
5,818,095 High-yield spatial light modulator with light blocking layer 308 1992
5,272,473 Reduced-speckle display system 286 1992
5,327,286 Real time optical correlation system 273 1992
5,287,096 Variable luminosity display system 270 1992
5,325,116 Device for writing to and reading from optical storage media 254 1992
5,280,277 Field updated deformable mirror device 331 1992
5,506,597 Apparatus and method for image projection 283 1992
5,457,566 DMD scanner 241 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 349 1993
5,461,411 Process and architecture for digital micromirror printer 298 1993
5,323,002 Spatial light modulator based optical calibration system 276 1993
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5,581,272 Signal generator for controlling a spatial light modulator 196 1993
5,457,493 Digital micro-mirror based image simulation system 324 1993
5,411,769 Method of producing micromechanical devices 261 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 288 1993
5,526,051 Digital television system 263 1993
5,459,602 Micro-mechanical optical shutter 217 1993
5,452,024 DMD display system 420 1993
5,497,197 System and method for packaging data into video processor 232 1993
5,517,347 Direct view deformable mirror device 303 1993
5,583,688 Multi-level digital micromirror device 465 1993
5,448,314 Method and apparatus for sequential color imaging 410 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 275 1994
5,606,441 Multiple phase light modulation using binary addressing 222 1994
5,444,566 Optimized electronic operation of digital micromirror devices 358 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 300 1994
5,526,688 Digital flexure beam accelerometer and method 209 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 281 1994
6,061,075 Non-systolic time delay and integration printing 182 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 310 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 281 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 261 1994
5,548,301 Pixel control circuitry for spatial light modulator 250 1994
5,650,881 Support post architecture for micromechanical devices 261 1994
5,552,924 Micromechanical device having an improved beam 246 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 202 1994
5,659,374 Method of repairing defective pixels 206 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 241 1995
6,049,317 System for imaging of light-sensitive media 253 1995
5,610,438 Micro-mechanical device with non-evaporable getter 295 1995
5,515,076 Multi-dimensional array video processor system 247 1995
6,232,936 DMD Architecture to improve horizontal resolution 212 1995
5,535,047 Active yoke hidden hinge digital micromirror device 464 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 236 1995
5,619,366 Controllable surface filter 231 1995
5,551,293 Micro-machined accelerometer array with shield plane 221 1995
5,570,135 Method and device for multi-format television 227 1995
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5,597,736 High-yield spatial light modulator with light blocking layer 248 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 405 1995
5,608,468 Method and device for multi-format television 248 1995
5,610,625 Monolithic spatial light modulator and memory package 185 1995
5,646,768 Support posts for micro-mechanical devices 304 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 221 1995
6,099,132 Manufacture method for micromechanical devices 208 1995
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5,657,099 Color phase control for projection display using spatial light modulator 208 1995
5,654,741 Spatial light modulator display pointing device 193 1995
5,784,212 Method of making a support post for a micromechanical device 235 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 286 1996
5,842,088 Method of calibrating a spatial light modulator printing system 258 1997
6,624,944 Fluorinated coating for an optical element 93 1997
5,808,780 Non-contacting micromechanical optical switch 230 1997
5,912,758 Bipolar reset for spatial light modulators 205 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 193 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 290 1998
6,282,010 Anti-reflective coatings for spatial light modulators 290 1999
6,323,982 Yield superstructure for digital micromirror device 263 1999
6,295,154 Optical switching apparatus 298 1999
6,147,790 Spring-ring micromechanical device 240 1999
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6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 193 2000
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 118 2000
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6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 213 2000
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6,625,047 Micromechanical memory element 256 2001
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6,959,990 Prism for high contrast projection 49 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (47)
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6,912,022 Optical interference color display and optical interference modulator 243 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 105 2003
6,982,820 Color changeable pixel 158 2003
7,012,726 MEMS devices with unreleased thin film components 75 2003
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2004/0209,195 Method for fabricating an interference display unit 222 2003
6,995,890 Interference display unit 130 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 199 2003
6,882,458 Structure of an optical interference display cell 243 2003
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7,119,945 Altering temporal response of microelectromechanical elements 136 2004
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6,999,225 Optical interference display panel 123 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 207 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 233 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 228 2004
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6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 143 2004
2005/0195,462 Interference display plate and manufacturing method thereof 241 2004
7,142,346 System and method for addressing a MEMS display 32 2005
2006/0066,932 Method of selective etching using etch stop layer 70 2005
2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 118 2005
2006/0256,420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 29 2006
2006/0257,070 Optical interference display cell and method of making the same 20 2006
2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
2007/0269,748 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATORS 31 2007
2008/0068,699 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATROS 27 2007
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
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6,747,785 MEMS-actuated color light modulator and methods 215 2002
6,666,561 Continuously variable analog micro-mirror device 229 2002
2004/0147,056 Micro-fabricated device and method of making 191 2003
6,829,132 Charge control of micro-electromechanical device 211 2003
6,811,267 Display system with nonvisible data projection 226 2003
2005/0057,442 Adjacent display of sequential sub-images 205 2003
2005/0068,583 Organizing a digital image 178 2003
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MAGNACHIP SEMICONDUCTOR, LTD. (1)
6,246,398 Application specific integrated circuit (ASIC) for driving an external display device 58 1998
 
MAPLE VISION TECHNOLOGIES INC. (1)
6,204,080 Method for manufacturing thin film actuated mirror array in an optical projection system 85 1998
 
MEMTRONICS, A DIVISION OF COGENT SOLUTIONS, INC. (1)
6,608,268 Proximity micro-electro-mechanical system 181 2002
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
5,650,834 Active-matrix device having silicide thin film resistor disposed between an input terminal and a short-circuit ring 103 1994
 
MITSUBISHI JIDOSHA KOGYO K.K. (A.K.A. MITSUBISHI MOTORS CORPORATION) (1)
5,647,819 Speed change control method for an automatic transmission 50 1995
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 219 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 230 1994
 
NEW VISUAL MEDIA GROUP, L.L.C. (1)
5,638,084 Lighting-independent color video display 219 1996
 
Nippondenso Co., Ltd. (1)
5,824,608 Semiconductor physical-quantity sensor and method for manufacturing same 64 1996
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 202 2001
 
North American Philips Corporation (1)
4,900,136 Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel 144 1988
 
Northrop Corporation (1)
5,153,771 Coherent light modulation and detector 179 1990
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
5,793,504 Hybrid angular/spatial holographic multiplexer 147 1996
 
NORTHWESTERN UNIVERSITY (1)
5,638,946 Micromechanical switch with insulated switch contact 388 1996
 
OCEAN POWER TECHNOLOGIES, INC. (1)
4,748,366 Novel uses of piezoelectric materials for creating optical effects 282 1986
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 192 2002
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 219 1987
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 74 2004
 
Quantum Diagnostics Ltd. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 291 1986
 
RAYTHEON COMPANY (1)
6,391,675 Method and apparatus for switching high frequency signals 76 1999
 
RENESAS ELECTRONICS CORPORATION (1)
6,275,220 Flat panel type display apparatuses having driver ICs formed on plate for holding display glasses 55 1998
 
RESEARCH TRIANGLE INSTITUTE (1)
6,456,420 Microelectromechanical elevating structures 101 2000
 
ROCKSTAR CONSORTIUM US LP (1)
5,629,790 Micromachined torsional scanner 574 1993
 
ROUND ROCK RESEARCH, LLC (1)
6,531,945 Integrated circuit inductor with a magnetic core 62 2000
 
ROYAL BANK CAPITAL PARTNERS (1)
5,673,139 Microelectromechanical television scanning device and method for making the same 316 1993
 
SAMSUNG DISPLAY CO., LTD. (1)
5,674,757 Process of fabricating a self-aligned thin-film transistor for a liquid crystal display 65 1995
 
SANWA BANK CALIFORNIA (1)
5,293,272 High finesse holographic fabry-perot etalon and method of fabricating 183 1992
 
SARNOFF CORPORATION (1)
6,392,233 Optomechanical radiant energy detector 67 2000
 
SEIKO EPSON CORPORATION (1)
6,438,282 Optical switching device and image display device 140 2001
 
SEMATECH, INC. (1)
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Societe d'Etude du Radant (1)
4,531,126 Method and device for analyzing a very high frequency radiation beam of electromagnetic waves 184 1982
 
SONY CORPORATION (1)
5,355,357 Disc player and disc loading device 172 1992
 
Sperry Marine Inc. (1)
5,136,669 Variable ratio fiber optic coupler optical signal processing element 133 1991
 
SUMITOMO CHEMICAL COMPANY, LIMITED (1)
5,503,952 Method for manufacture of color filter and liquid crystal display 58 1995
 
Techbank Corporation (1)
6,736,987 Silicon etching apparatus using XeF2 49 2000
 
TELEDYNE DALSA SEMICONDUCTOR INC. (1)
6,602,791 Manufacture of integrated fluidic devices 68 2001
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 233 1991
 
The United States of America as represented by the Secretary of the Navy (1)
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TOPPOLY OPTOELECTRONICS CORP. (1)
5,976,902 Method of fabricating a fully self-aligned TFT-LCD 77 1998
 
TURNSTONE SYSTEMS, INC. (1)
6,671,149 Systems and methods for protecting vulnerable micro electro-mechanical system (MEMS) and electronic relay devices 17 2000
 
UNITED TEST AND ASSEMBLY CENTER LTD. (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 83 2003
 
Other [Check patent profile for assignment information] (14)
4,445,050 Device for conversion of light power to electric power 192 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 179 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 270 1991
5,315,370 Interferometric modulator for optical signal processing 131 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 136 1992
5,526,327 Spatial displacement time display 139 1994
5,500,635 Products incorporating piezoelectric material 291 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 148 1995
5,822,110 Reflective light valve modulator 79 1997
5,896,796 Device for punching holes in a bicycle rim 32 1997
6,288,824 Display device based on grating electromechanical shutter 163 1999
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 244 2003
2005/0001,828 Charge control of micro-electromechanical device 179 2004
2005/0014,374 Gap tuning for surface micromachined structures in an epitaxial reactor 61 2004

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (12)
7,795,061 Method of creating MEMS device cavities by a non-etching process 4 2005
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 6 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 5 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012

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