US Patent No: 7,492,502

Number of patents in Portfolio can not be more than 2000

Method of fabricating a free-standing microstructure

Stats

ALSO PUBLISHED AS: 20060077529
See full text
ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Provided is a MEMS device comprising an integrated post and deformable layer. In some embodiments, the transition between the post and deformable layer comprises substantially a single arcuate or convex surface, thereby providing a mechanically robust structure. Some embodiments provide a method for fabricating a MEMS device comprising the use of a self-planarizing sacrificial material, which provides a surface conducive to the formation of a relatively uniform deformable layer thereon.

Loading the Abstract Image... loading....

First Claim

See full text

all claims..

Related Publications

Loading Related Publications... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA623

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 311 4919
Sampsell, Jeffrey B San Jose, CA 243 12542

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (130)
4,500,171 Process for plastic LCD fill hole sealing 201 1982
4,441,791 Deformable mirror light modulator 603 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 215 1982
4,571,603 Deformable mirror electrostatic printer 352 1984
4,566,935 Spatial light modulator and method 493 1984
4,710,732 Spatial light modulator and method 477 1984
4,596,992 Linear spatial light modulator and printer 373 1984
4,615,595 Frame addressed spatial light modulator 385 1984
4,662,746 Spatial light modulator and method 481 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 275 1988
4,956,619 Spatial light modulator 564 1988
5,079,544 Standard independent digitized video system 337 1989
5,028,939 Spatial light modulator system 377 1989
4,954,789 Spatial light modulator 545 1989
5,037,173 Optical interconnection network 307 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 293 1990
5,142,405 Bistable DMD addressing circuit and method 330 1990
5,061,049 Spatial light modulator and method 722 1990
5,192,395 Method of making a digital flexure beam accelerometer 197 1990
5,096,279 Spatial light modulator and method 494 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 308 1991
5,226,099 Digital micromirror shutter device 354 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 242 1991
5,170,156 Multi-frequency two dimensional display system 246 1991
5,192,946 Digitized color video display system 312 1991
5,214,419 Planarized true three dimensional display 250 1991
5,214,420 Spatial light modulator projection system with random polarity light 289 1991
5,206,629 Spatial light modulator and memory for digitized video display 243 1991
5,179,274 Method for controlling operation of optical systems and devices 224 1991
5,168,406 Color deformable mirror device and method for manufacture 272 1991
5,254,980 DMD display system controller 234 1991
5,563,398 Spatial light modulator scanning system 193 1991
5,233,385 White light enhanced color field sequential projection 361 1991
5,233,456 Resonant mirror and method of manufacture 296 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 370 1992
5,331,454 Low reset voltage process for DMD 339 1992
5,296,950 Optical signal free-space conversion board 222 1992
5,231,532 Switchable resonant filter for optical radiation 236 1992
5,212,582 Electrostatically controlled beam steering device and method 339 1992
5,312,513 Methods of forming multiple phase light modulators 268 1992
5,172,262 Spatial light modulator and method 380 1992
5,305,640 Digital flexure beam accelerometer 182 1992
5,446,479 Multi-dimensional array video processor system 245 1992
5,818,095 High-yield spatial light modulator with light blocking layer 294 1992
5,272,473 Reduced-speckle display system 276 1992
5,327,286 Real time optical correlation system 266 1992
5,287,096 Variable luminosity display system 262 1992
5,325,116 Device for writing to and reading from optical storage media 248 1992
5,280,277 Field updated deformable mirror device 322 1992
5,506,597 Apparatus and method for image projection 277 1992
5,457,566 DMD scanner 235 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 342 1993
5,461,411 Process and architecture for digital micromirror printer 291 1993
5,323,002 Spatial light modulator based optical calibration system 268 1993
5,489,952 Method and device for multi-format television 321 1993
5,365,283 Color phase control for projection display using spatial light modulator 275 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 390 1993
5,581,272 Signal generator for controlling a spatial light modulator 189 1993
5,457,493 Digital micro-mirror based image simulation system 312 1993
5,411,769 Method of producing micromechanical devices 254 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 280 1993
5,526,051 Digital television system 255 1993
5,459,602 Micro-mechanical optical shutter 211 1993
5,452,024 DMD display system 411 1993
5,497,197 System and method for packaging data into video processor 226 1993
5,517,347 Direct view deformable mirror device 292 1993
5,583,688 Multi-level digital micromirror device 454 1993
5,448,314 Method and apparatus for sequential color imaging 400 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 268 1994
5,606,441 Multiple phase light modulation using binary addressing 213 1994
5,444,566 Optimized electronic operation of digital micromirror devices 352 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 290 1994
5,526,688 Digital flexure beam accelerometer and method 202 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 274 1994
6,061,075 Non-systolic time delay and integration printing 176 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 300 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 275 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 253 1994
5,548,301 Pixel control circuitry for spatial light modulator 243 1994
5,650,881 Support post architecture for micromechanical devices 255 1994
5,552,924 Micromechanical device having an improved beam 240 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 196 1994
5,659,374 Method of repairing defective pixels 199 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 234 1995
6,049,317 System for imaging of light-sensitive media 244 1995
5,610,438 Micro-mechanical device with non-evaporable getter 288 1995
5,515,076 Multi-dimensional array video processor system 241 1995
6,232,936 DMD Architecture to improve horizontal resolution 206 1995
5,535,047 Active yoke hidden hinge digital micromirror device 451 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 227 1995
5,619,366 Controllable surface filter 222 1995
5,551,293 Micro-machined accelerometer array with shield plane 212 1995
5,570,135 Method and device for multi-format television 219 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 268 1995
5,597,736 High-yield spatial light modulator with light blocking layer 238 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 390 1995
5,608,468 Method and device for multi-format television 241 1995
5,610,625 Monolithic spatial light modulator and memory package 179 1995
5,646,768 Support posts for micro-mechanical devices 294 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 214 1995
6,099,132 Manufacture method for micromechanical devices 202 1995
6,447,126 Support post architecture for micromechanical devices 321 1995
5,657,099 Color phase control for projection display using spatial light modulator 202 1995
5,654,741 Spatial light modulator display pointing device 186 1995
5,784,212 Method of making a support post for a micromechanical device 229 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 275 1996
5,842,088 Method of calibrating a spatial light modulator printing system 250 1997
6,624,944 Fluorinated coating for an optical element 88 1997
5,808,780 Non-contacting micromechanical optical switch 226 1997
5,912,758 Bipolar reset for spatial light modulators 199 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 187 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 281 1998
6,282,010 Anti-reflective coatings for spatial light modulators 278 1999
6,323,982 Yield superstructure for digital micromirror device 257 1999
6,295,154 Optical switching apparatus 290 1999
6,147,790 Spring-ring micromechanical device 233 1999
6,038,056 Spatial light modulator having improved contrast ratio 257 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 186 2000
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 116 2000
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 150 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 204 2000
6,552,840 Electrostatic efficiency of micromechanical devices 230 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 206 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 179 2001
6,778,155 Display operation with inserted block clears 175 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 213 2001
6,775,174 Memory architecture for micromirror cell 175 2001
6,625,047 Micromechanical memory element 246 2001
6,741,503 SLM display data address mapping for four bank frame buffer 174 2002
6,959,990 Prism for high contrast projection 47 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (47)
5,835,255 Visible spectrum modulator arrays 491 1994
6,040,937 Interferometric modulation 606 1996
5,986,796 Visible spectrum modulator arrays 472 1996
6,674,562 Interferometric modulation of radiation 641 1998
6,055,090 Interferometric modulation 439 1999
7,123,216 Photonic MEMS and structures 516 1999
6,589,625 Hermetic seal and method to create the same 277 2001
6,867,896 Interferometric modulation of radiation 382 2001
6,680,792 Interferometric modulation of radiation 492 2001
6,650,455 Photonic mems and structures 487 2001
2002/0075,555 Interferometric modulation of radiation 404 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 373 2002
6,710,908 Controlling micro-electro-mechanical cavities 331 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 433 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 270 2002
7,110,158 Photonic MEMS and structures 170 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 282 2002
6,747,800 Optical interference type panel and the manufacturing method thereof 145 2003
6,912,022 Optical interference color display and optical interference modulator 234 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 99 2003
6,982,820 Color changeable pixel 149 2003
7,012,726 MEMS devices with unreleased thin film components 73 2003
7,198,973 Method for fabricating an interference display unit 95 2003
2004/0209,195 Method for fabricating an interference display unit 215 2003
6,995,890 Interference display unit 125 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 193 2003
6,882,458 Structure of an optical interference display cell 234 2003
2004/0240,032 Interferometric modulation of radiation 299 2004
6,999,236 Optical-interference type reflective panel and method for making the same 88 2004
7,119,945 Altering temporal response of microelectromechanical elements 126 2004
7,078,293 Method for fabricating optical interference display cell 58 2004
6,958,847 Structure of an optical interference display unit 203 2004
6,999,225 Optical interference display panel 116 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 196 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 224 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 220 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 192 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 137 2004
2005/0195,462 Interference display plate and manufacturing method thereof 232 2004
7,142,346 System and method for addressing a MEMS display 28 2005
2006/0066,932 Method of selective etching using etch stop layer 69 2005
2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 114 2005
2006/0256,420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 29 2006
2006/0257,070 Optical interference display cell and method of making the same 20 2006
2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
2007/0269,748 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATORS 31 2007
2008/0068,699 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATROS 26 2007
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 189 1999
6,859,218 Electronic display devices and methods 176 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 202 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 263 2001
2003/0202,264 Micro-mirror device 196 2002
6,747,785 MEMS-actuated color light modulator and methods 208 2002
6,666,561 Continuously variable analog micro-mirror device 221 2002
2004/0147,056 Micro-fabricated device and method of making 185 2003
6,829,132 Charge control of micro-electromechanical device 203 2003
6,811,267 Display system with nonvisible data projection 213 2003
2005/0057,442 Adjacent display of sequential sub-images 196 2003
2005/0068,583 Organizing a digital image 172 2003
2004/0212,026 MEMS device having time-varying control 173 2004
 
LUCENT TECHNOLOGIES INC. (9)
5,636,052 Direct view display based on a micromechanical modulation 296 1994
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 312 1995
5,710,656 Micromechanical optical modulator having a reduced-mass composite membrane 268 1996
5,838,484 Micromechanical optical modulator with linear operating characteristic 186 1996
5,943,158 Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method 211 1998
6,351,577 Surface-micromachined out-of-plane tunable optical filters 15 1998
6,351,329 Optical attenuator 106 1999
6,522,801 Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor 71 2000
2003/0138,213 Optical systems comprising curved MEMs mirrors and methods for making same 56 2002
 
CANON KABUSHIKI KAISHA (8)
5,633,652 Method for driving optical modulation device 133 1995
6,100,872 Display control method and apparatus 174 1997
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1 1998
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1 1998
6,513,911 Micro-electromechanical device, liquid discharge head, and method of manufacture therefor 84 2000
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 183 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 184 2001
6,853,129 Protected substrate structure for a field emission display device 179 2003
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 198 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 180 1998
6,201,633 Micro-electromechanical based bistable color display sheets 261 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 187 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 176 1999
6,674,090 Structure and method for planar lateral oxidation in active 161 1999
 
EASTMAN KODAK COMPANY (5)
5,075,796 Optical article for multicolor imaging 198 1990
5,347,377 Planar waveguide liquid crystal variable retarder 83 1992
6,284,560 Method for producing co-planar surface structures 65 1998
6,335,831 Multilevel mechanical grating device 88 1998
2002/0171,610 Organic electroluminescent display with integrated touch-screen 46 2001
 
SANDIA CORPORATION (5)
5,345,328 Tandem resonator reflectance modulator 145 1992
5,867,302 Bistable microelectromechanical actuator 360 1997
6,335,224 Protection of microelectronic devices during packaging 113 2000
6,577,785 Compound semiconductor optical waveguide switch 59 2001
6,812,482 Method to fabricate layered material compositions 67 2001
 
U.S. Philips Corporation (5)
4,403,248 Display device with deformable reflective medium 331 1981
4,519,676 Passive display device 235 1983
4,459,182 Method of manufacturing a display device 236 1983
4,681,403 Display device with micromechanical leaf spring switches 216 1986
4,965,562 Electroscopic display device 128 1988
 
FUJI PHOTO FILM CO., LTD. (4)
6,356,254 Array-type light modulating device and method of operating flat display unit 129 1999
6,327,071 Drive methods of array-type light modulation element and flat-panel display 248 1999
6,195,196 Array-type exposing device and flat type display incorporating light modulator and driving method thereof 316 1999
6,642,913 Light modulation element, exposure unit, and flat-panel display unit 130 2000
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (4)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 340 1989
5,233,459 Electric display device 345 1991
5,959,763 Spatial light modulator 229 1998
6,243,149 Method of imaging using a liquid crystal display device 173 1999
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (4)
4,389,096 Image display apparatus of liquid crystal valve projection type 272 1981
5,622,814 Method for fabricating active substrate 100 1994
6,952,304 Variable mirror and information apparatus comprising variable mirror 49 2002
7,064,880 Projector and projection method 21 2004
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (3)
5,745,281 Electrostatically-driven light modulator and display 282 1996
6,806,110 Monolithic multi-wavelength vertical-cavity surface emitting laser array and method of manufacture therefor 32 2002
6,953,702 Fixed wavelength vertical cavity optical devices and method of manufacture therefor 30 2002
 
Honeywell Inc. (3)
4,377,324 Graded index Fabry-Perot optical filter device 230 1980
5,559,358 Opto-electro-mechanical device or filter, process for making, and sensors made therefrom 359 1994
5,822,170 Hydrophobic coating for reducing humidity effect in electrostatic actuators 139 1997
 
NEOPHOTONICS CORPORATION (3)
6,756,317 Method for making a microstructure by surface micromachining 64 2001
6,674,563 Method and apparatus for device linearization 45 2001
6,778,306 Surface micromachined optical system with reinforced mirror microstructure 70 2003
 
SHARP KABUSHIKI KAISHA (3)
4,859,060 Variable interferometric device and a process for the production of the same 366 1986
5,499,037 Liquid crystal display device for display with gray levels 140 1994
6,113,239 Projection display system for reflective light valves 243 1998
 
SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 301 1998
6,606,175 Multi-segment light-emitting diode 176 1999
6,870,581 Single panel color video projection display using reflective banded color falling-raster illumination 197 2001
 
SILICON LIGHT MACHINES CORPORATION (3)
6,466,354 Method and apparatus for interferometric modulation of light 260 2000
7,049,164 Microelectronic mechanical system and methods 53 2002
7,027,202 Silicon substrate as a light modulator sacrificial layer 53 2003
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (3)
6,905,621 Method for preventing the etch transfer of sidelobes in contact hole patterns 32 2002
6,741,384 Control of MEMS and light modulator arrays 213 2003
6,861,277 Method of forming MEMS device 209 2003
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (3)
5,311,360 Method and apparatus for modulating a light beam 565 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 296 1993
6,219,015 Method and apparatus for using an array of grating light valves to produce multicolor optical images 80 1996
 
VENTURE LENDING & LEASING IV, INC. (3)
2001/0040,675 Method for forming a micromechanical device 84 2001
7,041,224 Method for vapor phase etching of silicon 43 2002
6,947,200 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 152 2004
 
BAKER, JOHN M. (2)
5,552,925 Electro-micro-mechanical shutters on transparent substrates 226 1993
5,784,190 Electro-micro-mechanical shutters on transparent substrates 249 1995
 
Bell Telephone Laboratories, Incorporated (2)
4,196,396 Interferometer apparatus using electro-optic material with feedback 117 1978
4,617,608 Variable gap device and method of manufacture 61 1985
 
CHEETAH OMNI, LLC (2)
6,407,851 Micromechanical optical switch 172 2000
6,859,301 Micromechanical optical switch 51 2004
 
COLIBRYS SA (2)
5,078,479 Light modulation device with matrix addressing 276 1991
5,579,149 Miniature network of light obturators 221 1994
 
FAHRENHEIT THERMOSCOPE LLC (2)
5,330,617 Method for etching integrated-circuit layers to a fixed depth and corresponding integrated circuit 44 1991
5,299,041 Active matrix, high definition, liquid crystal display structure 65 1992
 
FREESCALE SEMICONDUCTOR, INC. (2)
5,324,683 Method of forming a semiconductor structure having an air region 407 1993
6,706,548 Method of making a micromechanical device 13 2002
 
GEORGIA TECH RESEARCH CORPORATION (2)
5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices 254 1993
6,165,890 Fabrication of a semiconductor device with air gaps for ultra-low capacitance interconnections 153 1998
 
HONEYWELL INTERNATIONAL INC. (2)
6,215,221 Electrostatic/pneumatic actuators for active surfaces 143 1998
6,288,472 Electrostatic/pneumatic actuators for active surfaces 92 2000
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
5,972,193 Method of manufacturing a planar coil using a transparency substrate 94 1997
6,359,673 Sheet having a layer with different light modulating materials 61 1999
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (2)
5,326,430 Cooling microfan arrangements and process 135 1993
7,041,571 Air gap interconnect structure and method of manufacture 45 2004
 
LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 346 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 247 1989
 
MICRON TECHNOLOGY, INC. (2)
5,358,601 Process for isotropically etching semiconductor devices 152 1993
6,537,427 Deposition of smooth aluminum films 53 1999
 
MINOLTA CO., LTD. (2)
6,809,788 Liquid crystal display element with different ratios of polydomain and monodomain states 67 2001
2002/0027,636 Non-flat liquid crystal display element and method of producing the same 89 2001
 
POPKIN FAMILY ASSETS, L.L.C. (2)
5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 292 1996
2004/0136,076 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 82 2003
 
QUALCOMM INCORPORATED (2)
2004/0175,577 Structure of a light-incidence electrode of an optical interference display plate 200 2003
2005/0042,117 Optical interference display panel and manufacturing method thereof 155 2004
 
ROBERT BOSCH GMBH (2)
5,683,591 Process for producing surface micromechanical structures 191 1995
2002/0055,253 Method for producing a micromechanical structure and a micromechanical structure 76 2001
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (2)
5,726,480 Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same 264 1995
6,016,693 Microfabrication of cantilevers using sacrificial templates 57 1998
 
The United States of America as represented by the Secretary of the Air Force (2)
6,782,166 Optically transparent electrically conductive charge sheet poling electrodes to maximize performance of electro-optic devices 37 2002
7,145,213 MEMS RF switch integrated process 35 2004
 
UNITED MICROELECTRONICS CORP. (2)
2004/0058,531 Method for preventing metal extrusion in a semiconductor structure. 36 2002
6,720,267 Method for forming a cantilever beam model micro-electromechanical system 77 2003
 
ABBOTT LABORATORIES (1)
5,967,163 Actuator and method 67 1996
 
ADVANCED TECHNOLOGY MATERIALS, INC. (1)
2005/0118,832 Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations 34 2003
 
AGERE SYSTEMS INC. (1)
6,194,323 Deep sub-micron metal etch with in-situ hard mask etch 73 1998
 
AKZO N.V. (1)
5,381,232 Fabry-perot with device mirrors including a dielectric coating outside the resonant cavity 205 1993
 
APPLIED MATERIALS, INC. (1)
6,329,297 Dilute remote plasma clean 92 2000
 
AT&T CORP. (1)
5,500,761 Micromechanical modulator 330 1994
 
AU OPTRONICS CORP. (1)
6,057,903 Liquid crystal display device employing a guard plane between a layer for measuring touch position and common electrode layer 86 1998
 
Bipolar Technologies, Inc. (1)
6,610,440 Microscopic batteries for MEMS systems 79 2000
 
BOIT, INC. (1)
5,636,185 Dynamically changing liquid crystal display timekeeping apparatus 127 1995
 
BOOKHAM TECHNOLOGY PLC (1)
2002/0167,730 Wavelength selectable optical filter 85 2002
 
BOURNS, INC. (1)
6,249,039 Integrated inductive components and method of fabricating such components 137 1998
 
CALIFORNIA INSTITUTE OF TECHNOLOGY (1)
6,031,653 Low-cost thin-metal-film interference filters 172 1998
 
CHROMISYS (1)
2002/0071,169 Micro-electro-mechanical-system (MEMS) mirror device 103 2000
 
CITIZEN HOLDINGS CO., LTD. (1)
6,713,235 Method for fabricating thin-film substrate and thin-film substrate fabricated by the method 50 2001
 
CORDIS CORPORATION (1)
2004/0148,009 Locking handle deployment mechanism for medical device and method 96 2004
 
CORNELL RESEARCH FOUNDATION, INC. (1)
6,743,570 Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices 53 2002
 
CORNING INCORPORATED (1)
2003/0210,851 MEMS OPTICAL SWITCH ACTUATOR 74 2000
 
CP CLARE (1)
6,297,072 Method of fabrication of a microstructure having an internal cavity 215 1999
 
CYMATICS LABORATORIES CORP. (1)
7,008,812 Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation 105 2000
 
ECOLE CENTRALE DE LYON (1)
6,768,097 Optoelectronic device with wavelength filtering by cavity coupling 46 2003
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 270 2002
 
FSI INTERNATIONAL, INC. (1)
4,900,395 HF gas etching of wafers in an acid processor 171 1989
 
FUJITSU LIMITED (1)
5,706,022 Optical display device having an optically transparent driver circuit 73 1995
 
GEMFIRE CORPORATION (1)
5,703,710 Method for manipulating optical energy using poled structure 189 1994
 
GSI LUMONICS CORPORATION (1)
2004/0080,832 Solid state etalons with low thermally-induced optical path length change employing crystalline materials having significantly negative temperature coefficients of optical path length 49 2003
 
HERAEUS NOBLELIGHT GMBH (1)
4,937,496 Xenon short arc discharge lamp 96 1989
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 219 2001
 
Hoechst Aktiengesellschaft (1)
4,392,711 Process and apparatus for rendering visible charge images 120 1981
 
INTEGRATED MEDICAL SYSTEMS, INC. (1)
6,115,326 Ultrasonic micro-machined selectable transducer array 48 1998
 
INTELLECTUAL DISCOVERY CO., LTD. (1)
6,392,781 High speed semiconductor optical modulator and fabricating method thereof 61 2000
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 282 1999
 
JDS UNIPHASE CORPORATION (1)
2003/0053,078 Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators 146 2001
 
JOHN MCGAVIGAN AUTOMOTIVE ELECTRONICS LIMITED (1)
6,158,156 Display panels 112 1998
 
KODAK I L, LTD. (1)
6,618,187 Blazed micro-mechanical light modulator and array thereof 53 2001
 
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (1)
2003/0015,936 Electrostatic actuator 65 2002
 
LENOVO (SINGAPORE) PTE LTD. (1)
6,377,233 Micromechanical display and fabrication method 103 2001
 
LSI LOGIC CORPORATION (1)
6,166,422 Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor 77 1998
 
M-Squared Filters, LLC (1)
6,452,465 High quality-factor tunable resonator 125 2000
 
MAGNACHIP SEMICONDUCTOR, LTD. (1)
6,246,398 Application specific integrated circuit (ASIC) for driving an external display device 55 1998
 
MAPLE VISION TECHNOLOGIES INC. (1)
6,204,080 Method for manufacturing thin film actuated mirror array in an optical projection system 84 1998
 
MEMTRONICS, A DIVISION OF COGENT SOLUTIONS, INC. (1)
6,608,268 Proximity micro-electro-mechanical system 174 2002
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
5,650,834 Active-matrix device having silicide thin film resistor disposed between an input terminal and a short-circuit ring 99 1994
 
MITSUBISHI JIDOSHA KOGYO K.K. (A.K.A. MITSUBISHI MOTORS CORPORATION) (1)
5,647,819 Speed change control method for an automatic transmission 48 1995
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 211 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 222 1994
 
NEW VISUAL MEDIA GROUP, L.L.C. (1)
5,638,084 Lighting-independent color video display 209 1996
 
Nippondenso Co., Ltd. (1)
5,824,608 Semiconductor physical-quantity sensor and method for manufacturing same 63 1996
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 196 2001
 
North American Philips Corporation (1)
4,900,136 Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel 142 1988
 
Northrop Corporation (1)
5,153,771 Coherent light modulation and detector 173 1990
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
5,793,504 Hybrid angular/spatial holographic multiplexer 144 1996
 
NORTHWESTERN UNIVERSITY (1)
5,638,946 Micromechanical switch with insulated switch contact 371 1996
 
OCEAN POWER TECHNOLOGIES, INC. (1)
4,748,366 Novel uses of piezoelectric materials for creating optical effects 272 1986
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 186 2002
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 212 1987
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 70 2004
 
Quantum Diagnostics Ltd. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 281 1986
 
RAYTHEON COMPANY (1)
6,391,675 Method and apparatus for switching high frequency signals 75 1999
 
RENESAS ELECTRONICS CORPORATION (1)
6,275,220 Flat panel type display apparatuses having driver ICs formed on plate for holding display glasses 54 1998
 
RESEARCH TRIANGLE INSTITUTE (1)
6,456,420 Microelectromechanical elevating structures 98 2000
 
ROCKSTAR CONSORTIUM US LP (1)
5,629,790 Micromachined torsional scanner 567 1993
 
ROUND ROCK RESEARCH, LLC (1)
6,531,945 Integrated circuit inductor with a magnetic core 60 2000
 
ROYAL BANK CAPITAL PARTNERS (1)
5,673,139 Microelectromechanical television scanning device and method for making the same 313 1993
 
SAMSUNG DISPLAY CO., LTD. (1)
5,674,757 Process of fabricating a self-aligned thin-film transistor for a liquid crystal display 63 1995
 
SANWA BANK CALIFORNIA (1)
5,293,272 High finesse holographic fabry-perot etalon and method of fabricating 177 1992
 
SARNOFF CORPORATION (1)
6,392,233 Optomechanical radiant energy detector 65 2000
 
SEIKO EPSON CORPORATION (1)
6,438,282 Optical switching device and image display device 134 2001
 
SEMATECH, INC. (1)
5,474,865 Globally planarized binary optical mask using buried absorbers 125 1994
 
Societe d'Etude du Radant (1)
4,531,126 Method and device for analyzing a very high frequency radiation beam of electromagnetic waves 178 1982
 
SONY CORPORATION (1)
5,355,357 Disc player and disc loading device 170 1992
 
Sperry Marine Inc. (1)
5,136,669 Variable ratio fiber optic coupler optical signal processing element 130 1991
 
SUMITOMO CHEMICAL COMPANY, LIMITED (1)
5,503,952 Method for manufacture of color filter and liquid crystal display 57 1995
 
Techbank Corporation (1)
6,736,987 Silicon etching apparatus using XeF2 48 2000
 
TELEDYNE DALSA SEMICONDUCTOR INC. (1)
6,602,791 Manufacture of integrated fluidic devices 67 2001
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 227 1991
 
The United States of America as represented by the Secretary of the Navy (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 169 1979
 
TOPPOLY OPTOELECTRONICS CORP. (1)
5,976,902 Method of fabricating a fully self-aligned TFT-LCD 76 1998
 
TURNSTONE SYSTEMS, INC. (1)
6,671,149 Systems and methods for protecting vulnerable micro electro-mechanical system (MEMS) and electronic relay devices 15 2000
 
UNITED TEST AND ASSEMBLY CENTER LTD. (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 78 2003
 
Other [Check patent profile for assignment information] (14)
4,445,050 Device for conversion of light power to electric power 181 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 173 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 259 1991
5,315,370 Interferometric modulator for optical signal processing 125 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 133 1992
5,526,327 Spatial displacement time display 135 1994
5,500,635 Products incorporating piezoelectric material 275 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 144 1995
5,822,110 Reflective light valve modulator 78 1997
5,896,796 Device for punching holes in a bicycle rim 32 1997
6,288,824 Display device based on grating electromechanical shutter 155 1999
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 234 2003
2005/0001,828 Charge control of micro-electromechanical device 173 2004
2005/0014,374 Gap tuning for surface micromachined structures in an epitaxial reactor 59 2004

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (11)
7,795,061 Method of creating MEMS device cavities by a non-etching process 2 2005
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 5 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 17, 2016
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 17, 2020
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00