Curved slit valve door with flexible coupling
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United States of America Patent
Stats
-
Mar 3, 2009
Grant Date -
Jul 13, 2006
app pub date -
Jan 6, 2006
filing date -
Jun 14, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a concave sealing face coupled to an actuator by a flexible coupling. The flexible coupling configured to allow movement of the door member relative to the lever arm in at least two planes.
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