Probe station with low inductance path

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7498828
APP PUB NO 20070247178A1
SERIAL NO

11820518

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A probe assembly suitable for high-current measurements of an electrical device.

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First Claim

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Family

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CASCADE MICROTECH, INC.BEAVERTON, OR139

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cowan, Clarence E Newberg, US 28 519
Dunklee, John Tigard, US 36 478

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (32)
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Data Probe Corporation (1)
4588950 Test system for VLSI digital circuit and method of testing 97 1983
 
MOLECULAR DEVICES, INC. (1)
5164319 Multiple chemically modulated capacitance determination 324 1989
 
MITEL CORPORATION (1)
5508631 Semiconductor test chip with on wafer switching matrix 55 1994
 
Honeywell Inc. (1)
6232790 Method and apparatus for amplifying electrical test signals from a micromechanical device 67 1999
 
MILLER DESIGN AND EQUIPMENT INC. (1)
5303938 Kelvin chuck apparatus and method of manufacture 60 1993
 
Honeywell Information Systems Inc. (1)
4342958 Automatic test equipment test probe contact isolation detection method 72 1980
 
MicroCraft (1)
7188037 Method and apparatus for testing circuit boards 86 2004
 
BECHTEL BWXT IDAHO, LLC (1)
6147502 Method and apparatus for measuring butterfat and protein content using microwave absorption techniques 80 1998
 
KAI TECHNOLOGIES, INC. (1)
6275738 Microwave devices for medical hyperthermia, thermotherapy and diagnosis 145 1999
 
Charmilles Technologies S.A. (1)
4918279 EDM cutting machine including device for preventing transmission of sealing plate movement to guide head arm 60 1988
 
UNIVERSITY OF SOUTH FLORIDA (1)
5835997 Wafer shielding chamber for probe station 60 1995
 
FLUKE CORPORATION (1)
6384614 Single tip Kelvin probe 103 2000
 
Junkosha Co., Ltd. (1)
4567321 Flexible flat cable 102 1984
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (3)
5594358 Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line 98 1994
5794133 Microwave mixing circuit 84 1996
6806836 Helical antenna apparatus provided with two helical antenna elements, and radio communication apparatus provided with same helical antenna apparatus 75 2003
 
INTEGRATED TECHNOLOGY CORPORATION (2)
5657394 Integrated circuit probe card inspection system 93 1993
6118894 Integrated circuit probe card inspection system 119 1997
 
WALES ABERYSTWYTH, UNIVERSITY OF (1)
5569591 Analytical or monitoring apparatus and method 156 1994
 
SOLID STATE MEASUREMENTS, INC. (2)
6900652 Flexible membrane probe and method of use thereof 106 2003
7023231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof 94 2004
 
Solid State Farms, Inc. (1)
5792668 Radio frequency spectral analysis for in-vitro or in-vivo environments 212 1996
 
New Wave Research (4)
5611946 Multi-wavelength laser system, probe station and laser cutter system using the same 94 1994
5811751 Multi-wavelength laser system, probe station and laser cutter system using the same 141 1997
6573702 Method and apparatus for cleaning electronic test contacts 103 1997
5963364 Multi-wavelength variable attenuator and half wave plate 120 1997
 
SONY CORPORATION (3)
5669316 Turntable for rotating a wafer carrier 101 1993
6362792 Antenna apparatus and portable radio set 79 2000
6366247 Antenna device and portable radio set 83 2000
 
Spectroscopy Imaging Systems Corporation (1)
4916398 Efficient remote transmission line probe tuning for NMR apparatus 95 1988
 
WENTWORTH LABORATORIES, INC. (3)
5959461 Probe station adapter for backside emission inspection 123 1997
* 6031383 Probe station for low current, low voltage parametric measurements using multiple probes 107 1998
6124723 Probe holder for low voltage, low current measurements in a water probe station 83 1998
 
FormFactor, Inc. (3)
5974662 Method of planarizing tips of probe elements of a probe card assembly 371 1995
6064213 Wafer-level burn-in and test 264 1997
7002363 Method and system for compensating thermally induced motion of probe cards 121 2001
 
SAMSUNG ELECTRONICS CO., LTD. (2)
6970001 Variable impedance test probe 74 2003
6900653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof 106 2003
 
SONY ELECTRONICS INC. (4)
6043668 Planarity verification system for integrated circuit test probes 54 1997
6137303 Integrated testing method and apparatus for semiconductor test operations processing 125 1998
6259261 Method and apparatus for electrically testing semiconductor devices fabricated on a wafer 68 1999
2007/0024,506 Systems and methods for high frequency parallel transmissions 79 2006
 
WISCONSIN ALUMNI RESEARCH FOUNDATION (1)
2003/0088,180 Space-time microwave imaging for cancer detection 115 2002
 
Semitest, Inc. (2)
4891584 Apparatus for making surface photovoltage measurements of a semiconductor 138 1988
5091691 Apparatus for making surface photovoltage measurements of a semiconductor 81 1988
 
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM (1)
2003/0119,057 Forming and modifying dielectrically-engineered microparticles 135 2001
 
OXFORD INSTRUMENTS AMERICA, INC. (1)
5448172 Triboelectric instrument with DC drift compensation 41 1993
 
NXP B.V. (1)
5491426 Adaptable wafer probe assembly for testing ICs with different power/ground bond pad configurations 79 1994
 
CONTRAVES AG (1)
4567908 Discharge system and method of operating same 50 1984
 
RENESAS ELECTRONICS CORPORATION (4)
6028435 Semiconductor device evaluation system using optical fiber 108 1997
6160407 Inspection method and wiring current observation method for semiconductor device and apparatus of the same 98 1998
6686753 Prober and apparatus for semiconductor chip analysis 54 2000
6900646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof 97 2002
 
KABUSHIKI KAISHA NIHON MICRONICS (2)
5888075 Auxiliary apparatus for testing device 78 1997
6019612 Electrical connecting apparatus for electrically connecting a device to be tested 87 1998
 
SAMSUNG AEROSPACE INDUSTRIES, LTD. (1)
5857667 Vacuum chuck 69 1996
 
DIT-MCO INTERNATIONAL CORPORATION (1)
4357575 Apparatus for use in testing printed circuit process boards having means for positioning such boards in proper juxtaposition with electrical contacting assemblies 116 1980
 
MCC GESELLSCHAFT FUR DIAGNOSESYSTEME IN MEDIZIN UND TECHNIK MBH & CO. KG (1)
2005/0168,722 Device and method for measuring constituents in blood 44 2003
 
OPTOMETRIX, INC. (1)
6181416 Schlieren method for imaging semiconductor device properties 84 1999
 
SEMICONDUCTOR PHYSICS LABORATORY, INC. (1)
6052653 Spreading resistance profiling system 100 1997
 
TERADYNE, INC. (1)
6784679 Differential coaxial contact array for high-density, high-speed signals 93 2002
 
GLOBALFOUNDRIES INC. (10)
6091255 System and method for tasking processing modules based upon temperature 135 1998
6608494 Single point high resolution time resolved photoemission microscopy system and method 111 1998
6483327 Quadrant avalanche photodiode time-resolved detection 109 1999
6724928 Real-time photoemission detection system 97 2000
6488405 Flip chip defect analysis using liquid crystal 102 2000
6617862 Laser intrusive technique for locating specific integrated circuit current paths 98 2002
6788093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies 108 2002
7022976 Dynamically adjustable probe tips 98 2003
7011531 Membrane probe with anchored elements 93 2005
7005879 Device for probe card power bus noise reduction 93 2005
 
ENDWAVE CORPORATION (1)
6023209 Coplanar microwave circuit having suppression of undesired modes 78 1996
 
Microwave Imaging Systems Technologies, Inc. (2)
5841288 Two-dimensional microwave imaging apparatus and methods 125 1997
6448788 Fixed array microwave imaging apparatus and method 111 2000
 
DH TECHNOLOGIES DEVELOPMENT PTE. LTD. (1)
6627461 Method and apparatus for detection of molecular events using temperature control of detection environment 97 2001
 
NXP USA, INC. (2)
5982166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control 108 1997
6313567 Lithography chuck having piezoelectric elements, and method 38 2000
 
CASCADE MICROTECH, INC. (62)
4697143 Wafer probe 201 1984
4827211 Wafer probe 127 1987
4858160 System for setting reference reactance for vector corrected measurements 99 1988
4849689 Microwave wafer probe having replaceable probe tip 128 1988
4994737 System for facilitating planar probe measurements of high-speed interconnect structures 57 1990
5045781 High-frequency active probe having replaceable contact needles 110 1991
5101453 Fiber optic wafer probe 102 1991
5237267 Wafer probe station having auxiliary chucks 52 1992
5266889 Wafer probe station with integrated environment control enclosure 135 1992
5345170 Wafer probe station having integrated guarding, Kelvin connection and shielding systems 116 1992
5457398 Wafer probe station having full guarding 123 1993
5434512 Wafer probe station having integrated guarding, Kelvin connection and shielding systems 59 1994
5506515 High-frequency probe tip assembly 160 1994
5532609 Wafer probe station having environment control enclosure 70 1995
5561377 System for evaluating probing networks 65 1995
5610529 Probe station having conductive coating added to thermal chuck insulator 138 1995
5565788 Coaxial wafer probe with tip shielding 148 1995
5663653 Wafer probe station for low-current measurements 73 1995
5729150 Low-current probe card with reduced triboelectric current generating cables 137 1995
5604444 Wafer probe station having environment control enclosure 62 1996
5659255 Method of evaluating signal conditions in a probe measurement network having a plurality of separate measurement channels 58 1996
6313649 Wafer probe station having environment control enclosure 57 1997
6232788 Wafer probe station for low-current measurements 88 1997
6232789 Probe holder for low current measurements 87 1997
5869975 System for evaluating probing networks that have multiple probing ends 56 1997
5963027 Probe station having environment control chambers with orthogonally flexible lateral wall assembly 71 1997
6002263 Probe station having inner and outer shielding 60 1997
6034533 Low-current pogo probe card 111 1997
6137302 Low-current probe card with reduced triboelectric current generating cables 112 1997
5973505 System for evaluating probing networks 54 1998
6445202 Probe station thermal chuck with shielding for capacitive current 50 1999
6252392 Probe station having environment control chamber with bendably extensible and retractable lateral wall assembly 51 1999
6130544 System for evaluating probing networks 51 1999
6288557 Probe station having inner and outer shielding 51 1999
6578264 Method for constructing a membrane probe using a depression 80 2000
6483336 Indexing rotatable chuck for a probe station 53 2000
6608496 Reference transmission line junction for probing device 56 2000
6335628 Wafer probe station for low-current measurements 54 2001
6380751 Wafer probe station having environment control enclosure 49 2001
6362636 Probe station having multiple enclosures 53 2001
6549106 Waveguide with adjustable backshort 130 2001
6492822 Wafer probe station for low-current measurements 50 2001
6489789 Probe station having multiple enclosures 50 2001
6486687 Wafer probe station having environment control enclosure 51 2002
6771090 Indexing rotatable chuck for a probe station 57 2002
6836135 Optical testing device 52 2002
6636059 Wafer probe station having environment control enclosure 49 2002
6639415 Probe station having multiple enclosures 49 2002
6720782 Wafer probe station for low-current measurements 47 2002
6777964 Probe station 52 2002
6724205 Probe for combined signals 98 2002
6642732 Probe station thermal chuck with shielding for capacitive current 48 2002
6861856 Guarded tub enclosure 50 2002
6801047 Wafer probe station having environment control enclosure 47 2003
6842024 Probe station having multiple enclosures 47 2003
6847219 Probe station with low noise characteristics 62 2003
* 7250779 Probe station with low inductance path 24 2003
6806724 Probe for combined signals 95 2003
* 7221172 Switched suspended conductor and connection 23 2004
6885197 Indexing rotatable chuck for a probe station 47 2004
7009383 Wafer probe station having environment control enclosure 93 2004
7187188 Chuck with integrated wafer support 79 2004
 
HYPRES, INC. (1)
4894612 Soft probe for providing high speed on-wafer connections to a circuit 158 1988
 
NATIONAL SEMICONDUCTOR CORPORATION (4)
4757255 Environmental box for automated wafer probing 194 1986
5101149 Modifiable IC board 72 1989
5883522 Apparatus and method for retaining a semiconductor wafer during testing 107 1996
7096133 Method of establishing benchmark for figure of merit indicative of amplifier flicker noise 73 2005
 
ELECTRIC POWER RESEARCH INSTITUTE, INC. (1)
4487996 Shielded electrical cable 106 1982
 
DELPHI TECHNOLOGIES, INC. (1)
7015709 Ultra-broadband differential voltage probes 102 2004
 
MERCK & CO., INC. (1)
7013221 Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays 96 2000
 
SARANTEL LIMITED (3)
6184845 Dielectric-loaded antenna 140 1997
6369776 Antenna 92 1999
6914580 Dielectrically-loaded antenna 83 2003
 
XCERRA CORPORATION (1)
7015711 Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method 107 2004
 
MARTEK, INC. (3)
5656942 Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane 111 1995
6096567 Method and apparatus for direct probe sensing 146 1997
6320372 Apparatus and method for testing a substrate having a plurality of terminals 102 1999
 
INTEGRATED PROCESS EQUIPMENT CORP. (1)
5515167 Transparent optical chuck incorporating optical monitoring 147 1994
 
NORTEL NETWORKS LIMITED (1)
4853624 Tunable microwave wafer probe 93 1988
 
Active Precision, Inc. (2)
6756751 Multiple degree of freedom substrate manipulator 36 2002
2003/0156,270 Multiple degree of freedom substrate manipulator 35 2002
 
ABBOTT DIABETES CARE INC. (1)
2005/0165,316 Method for detecting artifacts in data 77 2004
 
GCB INDUSTRIES, INC. (1)
6229327 Broadband impedance matching probe 127 1997
 
VEGA GRIESHABER KG (1)
7030827 Planar antenna and antenna system 74 2004
 
PURDUE RESEARCH FOUNDATION (1)
2004/0147,034 Method and apparatus for measuring a substance in a biological sample 138 2003
 
INTEST CORPORATION (1)
5900737 Method and apparatus for automated docking of a test head to a device handler 116 1996
 
GTE Valeron Corporation (1)
4401945 Apparatus for detecting the position of a probe relative to a workpiece 97 1981
 
INTEST IP CORPORATION (1)
4705447 Electronic test head positioner for test systems 138 1985
 
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY (1)
6528993 Magneto-optical microscope magnetometer 80 2000
 
AMAZON TECHNOLOGIES, INC. (1)
6029141 Internet-based customer referral system 1190 1997
 
GILLESPIE, ROBB S. (1)
6481939 Tool tip conductivity contact sensor and method 91 2001
 
NATIONAL METAL REFINING COMPANY (1)
4566184 Process for making a probe for high speed integrated circuits 100 1984
 
AMAZON.COM, INC. (1)
5960411 Method and system for placing a purchase order via a communications network 1589 1997
 
MARTIN MARIETTA CORPORATION (1)
5867073 Waveguide to transmission line transition 85 1994
 
SOCIONEXT INC. (1)
6466046 Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor 27 1999
 
ELECTRONICS RESEARCH, INC. (1)
2004/0100,276 Method and apparatus for calibration of a vector network analyzer 101 2002
 
INTELLECTUAL VENTURES I LLC (1)
5633780 Electrostatic discharge protection device 133 1996
 
ERS ELECTRONIC GMBH (1)
2005/0227,503 Method and device for conditioning semiconductor wafers and/or hybrids 47 2005
 
BANK OF AMERICA, N.A. (1)
2004/0267,691 System and method to monitor performance of different domains associated with a computer system or network 50 2003
 
GE CAPITAL EQUITY INVESTMENTS, INC. (1)
6628980 Apparatus, systems, and methods for in vivo magnetic resonance imaging 191 2001
 
CIRREX SYSTEMS LLC (1)
6222970 Methods and apparatus for filtering an optical fiber 153 1999
 
SCHLUMBERGER TECHNOLOGY CORPORATION (1)
4766384 Well logging apparatus for determining dip, azimuth, and invaded zone conductivity 101 1986
 
The United States of America as represented by the Secretary of the Army (1)
6731804 Thermal luminescence liquid monitoring system and method 81 2000
 
SYNOPSYS, INC. (1)
5682337 High speed three-state sampling 54 1995
 
The United States of America as represented by the Secretary of the Air Force (7)
4365109 Coaxial cable design 61 1981
4507602 Measurement of permittivity and permeability of microwave materials 74 1982
4712370 Sliding duct seal 59 1986
4754239 Waveguide to stripline transition assembly 91 1986
5631571 Infrared receiver wafer level probe testing 146 1996
6215295 Photonic field probe and calibration means thereof 115 1998
2003/0170,898 Method for intracellular modifications within living cells using pulsed electric fields 126 2002
 
STORAGE TECHNOLOGY CORPORATION (1)
5469324 Integrated decoupling capacitive core for a printed circuit board and method of making same 122 1994
 
LITEL INSTRUMENTS (1)
5094536 Deformable wafer chuck 55 1990
 
INIZIATIVE MARITTIME 1991, S.R.L. (1)
5245292 Method and apparatus for sensing a fluid handling 75 1992
 
HITACHI HIGH-TECH SCIENCE CORPORATION (1)
6621082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function 100 2002
 
Trio-Tech International (2)
6104203 Test apparatus for electronic components 54 1996
6605955 Temperature controlled wafer chuck system with low thermal resistance 104 2000
 
Signatone Corporation (1)
4845426 Temperature conditioner for tests of unpackaged semiconductors 108 1987
 
TRUSTEES OF DARTMOUTH COLLEGE (1)
5833601 Methodology for determining oxygen in biological systems 85 1997
 
ANALOG DEVICES, INC. (1)
5712571 Apparatus and method for detecting defects arising as a result of integrated circuit processing 56 1995
 
NANOMETRICS INCORPORATED (1)
4818169 Automated wafer inspection system 139 1985
 
General Dielectric, Inc. (1)
2002/0050,828 Multi-feed microwave reflective resonant sensors 79 2001
 
DELTA DESIGN, INC. (1)
6549026 Apparatus and method for temperature control of IC device during test 71 2000
 
Aehr Test Systems (2)
6340895 Wafer-level burn-in and test cartridge 107 1999
6580283 Wafer level burn-in and test methods 88 1999
 
THE JOHNS HOPKINS UNIVERSITY (1)
6284971 Enhanced safety coaxial cables 153 1999
 
Ignite Sales, Inc. (1)
6236975 System and method for profiling customers for targeted marketing 526 1998
 
EUROPAEISCHES LABORATORIUM FUER MOLEKULARBIOLOGIE (EMBL) (1)
6798226 Multiple local probe measuring device and method 93 2002
 
APPLIED MATERIALS, INC. (7)
5486975 Corrosion resistant electrostatic chuck 68 1994
5916689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect 124 1996
5874361 Method of processing a wafer within a reaction chamber 108 1996
6257564 Vacuum chuck having vacuum-nipples wafer support 108 1998
6232787 Microstructure defect detection 161 1999
6310755 Electrostatic chuck having gas cavity and method 101 1999
6468816 Method for sensing conditions within a substrate processing system 46 2001
 
KAWASAKI MICROELECTRONICS, INC. (1)
6924656 Method and apparatus for testing BGA-type semiconductor devices 21 2003
 
EAST GIANT LIMITED (1)
5879289 Hand-held portable endoscopic camera 170 1996
 
Dimension Polyant Sailcloth, Inc. (1)
6013586 Tent material product and method of making tent material product 91 1997
 
GYRUS MEDICAL LIMITED (1)
6409724 Electrosurgical instrument 289 2000
 
TOKYO ELECTRON LIMITED (33)
4884026 Electrical characteristic measuring apparatus 73 1988
5084671 Electric probing-test machine having a cooling system 191 1990
5091692 Probing test device 116 1990
5198752 Electric probing-test machine having a cooling system 156 1991
5315237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit 113 1991
5278494 Wafer probing test machine 97 1992
5321352 Probe apparatus and method of alignment for the same 133 1992
5321453 Probe apparatus for probing an object held above the probe card 103 1992
5325052 Probe apparatus 146 1992
5410259 Probing device setting a probe card parallel 141 1993
5404111 Probe apparatus with a swinging holder for an object of examination 114 1993
5521522 Probe apparatus for testing multiple integrated circuit dies 144 1993
5539676 Method of identifying probe position and probing method in prober 94 1994
5550482 Probe device 103 1994
5777485 Probe method and apparatus with improved probe contact 119 1996
5640101 Probe system and probe method 69 1996
5828225 Semiconductor wafer probing apparatus 72 1996
5910727 Electrical inspecting apparatus with ventilation system 90 1996
5804983 Probe apparatus with tilt correction mechanisms 152 1997
5926028 Probe card having separated upper and lower probe needle groups 38 1997
5999268 Apparatus for aligning a semiconductor wafer with an inspection contactor 119 1997
6060892 Probe card attaching mechanism 98 1997
6037793 Inspecting method and apparatus for semiconductor integrated circuit 73 1998
6124725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer 137 1998
6501289 Inspection stage including a plurality of Z shafts, and inspection apparatus 84 2000
6414478 Transfer mechanism for use in exchange of probe card 80 2000
6739208 Method of delivering target object to be processed, table mechanism of target object and probe apparatus 27 2001
7005842 Probe cartridge assembly and multi-probe assembly 93 2001
7101797 Substrate processing device and processing method 46 2003
6794888 Probe device 76 2003
7026832 Probe mark reading device and probe mark reading method 96 2003
7009415 Probing method and probing apparatus 95 2004
7023226 Probe pins zero-point detecting method, and prober 93 2004
 
NGK INSULATORS, LTD. (2)
5280156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means 221 1991
6001760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck 117 1997
 
CARDIFF AND VALE NHS TRUST (1)
2004/0175,294 Apparatus and method for analysing a biological sample in response to microwave radiation 76 2004
 
J.A. WOOLLAM CO., INC. (1)
6937341 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation 86 2002
 
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (1)
6902941 Probing of device elements 100 2003
 
TRANSPACIFIC IP LTD. (1)
5942907 Method and apparatus for testing dies 51 1997
 
APEX MICROTECHNOLOGY, INC. (1)
4871965 Environmental testing facility for electronic components 66 1988
 
HITACHI, LTD. (2)
4383178 System for driving rotary member in vacuum 87 1981
2005/0186,696 Gas flowmeter and manufacturing method thereof 0 2005
 
DCG SYSTEMS, INC. (2)
5530372 Method of probing a net of an IC at an optimal probe-point 118 1994
5675499 Optimal probe point placement 111 1996
 
Sirotech Ltd. (1)
5824494 Method for enumerating bacterial populations 95 1995
 
GATAN, INC. (1)
6914244 Ion beam milling system and method for electron microscopy specimen preparation 89 2004
 
TRUSTEES OF THE THOMAS A.O. GROSS 1988 REVOCABLE TRUST, C/O JUDITH C.F. GROSS (1)
5218185 Elimination of potentially harmful electrical and magnetic fields from electric blankets and other electrical appliances 81 1989
 
SKYWORKS SOLUTIONS, INC. (2)
6582979 Structure and method for fabrication of a leadless chip carrier with embedded antenna 93 2001
6770955 Shielded antenna in a semiconductor package 104 2001
 
APPLE INC. (1)
5617035 Method for testing integrated devices 110 1995
 
The United States of America as represented by the United States Department of Energy (4)
4896109 Photoconductive circuit element reflectometer 65 1987
5523694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration 122 1994
6307672 Microscope collision protection apparatus 82 1996
6407560 Thermally-induced voltage alteration for analysis of microelectromechanical devices 89 2000
 
BOARD OF REGENTS OF THE UNIVERSITY OF WISCONSIN SYSTEM, THE, AN INSTITUTE OF WI (1)
5233306 Method and apparatus for measuring the permittivity of materials 130 1991
 
KABUSHIKI KAISHA TOSHIBA (1)
7032307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus 93 2004
 
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4684883 Method of manufacturing high-quality semiconductor light-emitting devices 97 1985
 
AT&T Information Systems Inc. (1)
4978907 Apparatus and method for expanding the frequency range over which electrical signal amplitudes can be accurately measured 53 1989
 
TENCOR INSTRUMENTS (2)
4755746 Apparatus and methods for semiconductor wafer testing 156 1985
5852232 Acoustic sensor as proximity detector 142 1997
 
RAYTHEON COMPANY (4)
4346355 Radio frequency energy launcher 95 1980
5600256 Cast elastomer/membrane test probe assembly 78 1995
5731708 Unpackaged semiconductor testing using an improved probe and precision X-Y table 58 1995
6211837 Dual-window high-power conical horn antenna 95 1999
 
THK CO., LTD. (1)
4899998 Rotational positioning device 107 1988
 
EATON CORPORATION (2)
4665360 Docking apparatus 68 1985
4904935 Electrical circuit board text fixture having movable platens 114 1988
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (16)
4744041 Method for testing DC motors 118 1985
4831494 Multilayer capacitor 156 1988
4922128 Boost clock circuit for driving redundant wordlines and sample wordlines 80 1989
5001423 Dry interface thermal chuck temperature control system for semiconductor wafer testing 135 1990
5144228 Probe interface assembly 86 1991
5210485 Probe for wafer burn-in test system 101 1991
5334931 Molded test probe assembly 92 1991
5221905 Test system with reduced test contact interface resistance 59 1992
5546012 Probe card assembly having a ceramic probe card 64 1994
5530371 Probe card assembly 69 1995
5629631 Interface card for a probe card assembly 86 1995
5804982 Miniature probe positioning actuator 106 1995
5561585 Electrostatic chuck with reference electrode 64 1995
6043667 Substrate tester location clamping, sensing, and contacting method and apparatus 79 1997
6791344 System for and method of testing a microelectronic device using a dual probe technique 63 2000
7007380 TFI probe I/O wrap test method 93 2004
 
ADVANCED MICRO DEVICES, INC. (1)
6396296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station 103 2000
 
GENETRONICS, INC. (1)
5869326 Electroporation employing user-configured pulsing scheme 120 1996
 
TIOGA TECHNOLOGIES, INC. (1)
6459739 Method and apparatus for RF common-mode noise rejection in a DSL receiver 112 1999
 
SIEMENS AKTIENGESELLSCHAFT (2)
4805627 Method and apparatus for identifying the distribution of the dielectric constants in an object 107 1986
5095891 Connecting cable for use with a pulse generator and a shock wave generator 98 1987
 
KEYSIGHT TECHNOLOGIES, INC. (4)
5493070 Measuring cable and measuring system 97 1994
6300775 Scattering parameter calibration system and method 130 1999
2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement 97 2002
2004/0199,350 System and method for determining measurement errors of a testing device 94 2003
 
FUJITSU LIMITED (1)
7023229 Dynamic burn-in equipment 53 2004
 
DRNC HOLDINGS, INC. (1)
6987483 Effectively balanced dipole microstrip antenna 80 2003
 
Vatell Corporation (1)
6278051 Differential thermopile heat flux transducer 100 2000
 
HP HOLDINGS THREE, INC. (2)
5336989 AC mains test apparatus and method 48 1991
5995914 Method and apparatus for asynchronously measuring frequency shifted signals 103 1996
 
ROBERT BOSCH GMBH (1)
6066911 Ultrasonic driving element 125 1998
 
Triple S Engineering, Inc. (1)
5065092 System for locating probe tips on an integrated circuit probe card and method therefor 95 1990
 
SARNOFF CORPORATION (1)
5993611 Capacitive denaturation of nucleic acid 140 1997
 
EVERETT CHARLES TECHNOLOGIES, INC. (1)
5214374 Dual level test fixture 105 1991
 
HARRIS CORPORATION (3)
5854608 Helical antenna having a solid dielectric core 154 1994
6181297 Antenna 104 1998
6424316 Helical antenna 90 2000
 
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA (1)
5267088 Code plate mounting device 84 1990
 
Integral Technologies, Inc. (1)
7006046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials 95 2004
 
W. L. GORE & ASSOCIATES, INC. (9)
4871883 Electro-magnetic shielding 121 1987
4859989 Security system and signal carrying member thereof 129 1987
5061823 Crush-resistant coaxial transmission line 136 1990
5107076 Easy strip composite dielectric coaxial signal cable 125 1991
5210377 Coaxial electric signal cable having a composite porous insulation 68 1992
5477011 Low noise signal transmission cable 112 1994
5554236 Method for making low noise signal transmission cable 41 1995
6032714 Repeatably positionable nozzle assembly 79 1999
7015708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts 95 2003
 
ADE CORPORATION (1)
5642298 Wafer testing and self-calibration system 116 1996
 
SEMICOA CORPORATION (1)
5798652 Method of batch testing surface mount devices using a substrate edge connector 77 1996
 
Biotronic Systems Corporation (1)
5082627 Three dimensional binding site array for interfering with an electrical field 86 1987
 
CROWN PRODUCTS, INC. (1)
7019541 Electric conductivity water probe 97 2004
 
SEMICONDUCTOR DIAGNOSTICS, INC. (1)
6114865 Device for electrically contacting a floating semiconductor wafer having an insulating film 112 1999
 
HOUSTON ADVANCED RESEARCH CENTER, A CORP. OF TX (1)
5846708 Optical and electrical methods and apparatus for molecule detection 406 1992
 
LAM RESEARCH CORPORATION (1)
7015703 Radio frequency Langmuir probe 103 2004
 
ADVANTEST (SINGAPORE) PTE. LTD. (1)
6812718 Massively parallel interface for electronic circuits 110 2001
 
FREESCALE SEMICONDUCTOR, INC. (6)
4968931 Apparatus and method for burning in integrated circuit wafers 168 1989
5467024 Integrated circuit test with programmable source for both AC and DC modes of operation 86 1993
5550480 Method and means for controlling movement of a chuck in a test apparatus 78 1994
5666063 Method and apparatus for testing an integrated circuit 107 1996
6111419 Method of processing a substrate including measuring for planarity and probing the substrate 56 1998
6650135 Measurement chuck having piezoelectric elements and method 28 2000
 
BERTHOLD TECHNOLOGIES GMBH & CO. KG (1)
5369368 Device for determining material parameters by means of microwave measurements 81 1993
 
EDO CORPORATION, BARNES DIVISION (1)
4755874 Emission microscopy system 165 1987
 
TRIQUINT SEMICONDUCTOR, INC. (1)
4853627 Wafer probes 104 1988
 
FAIRCHILD SEMICONDUCTOR CORPORATION (1)
5357211 Pin driver amplifier 84 1993
 
CEPROBE CORPORATION, A DE CORP. (1)
5382898 High density probe card for testing electrical circuits 102 1992
 
Digital Test Corporation (1)
5773951 Wafer prober having sub-micron alignment accuracy 62 1996
 
JPK INSTRUMENTS AG (1)
7022985 Apparatus and method for a scanning probe microscope 99 2002
 
TOYODA GOSEI CO., LTD. (1)
6843024 Weather strip including core-removal slot 49 2002
 
MEDICAL COLLEGE OF GEORGIA RESEARCH INSTITUTE, INC. (1)
5488954 Ultrasonic transducer and method for using same 145 1994
 
D-LINK CORPORATION (1)
6778140 Atch horn antenna of dual frequency 73 2003
 
MAGMA DESIGN AUTOMATION, INC. (1)
5030907 CAD driven microprobe integrated circuit tester 113 1989
 
WINBOND ELECTRONICS CORP. (1)
6611417 Wafer chuck system 82 2001
 
RCA Corporation (1)
4651115 Waveguide-to-microstrip transition 82 1985
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
7035738 Probe designing apparatus and probe designing method 94 2002
 
FTS SYSTEMS, INC. (1)
4787752 Live component temperature conditioning device providing fast temperature variations 82 1986
 
GENERAL ELECTRIC COMPANY (1)
7015690 Omnidirectional eddy current probe and inspection system 100 2004
 
QUALCOMM INCORPORATED (1)
6737920 Variable gain amplifier 78 2002
 
SEMATECH, INC. (2)
5159264 Pneumatic energy fluxmeter 80 1991
5159267 Pneumatic energy fluxmeter 82 1992
 
COMPAQ COMPUTER CORPORATION (1)
5500606 Completely wireless dual-access test fixture 114 1993
 
HITACHI ULSI SYSTEMS CO., LTD. (1)
6734687 Apparatus for detecting defect in device and method of detecting defect 111 2001
 
INTERSTITIAL, LLC (2)
5829437 Microwave method and system to detect and locate cancers in heterogenous tissues 143 1996
6061589 Microwave antenna for cancer detection system 136 1997
 
RUDOLPH TECHNOLOGIES, INC. (2)
4918374 Method and apparatus for inspecting integrated circuit probe cards 103 1988
6710798 Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card 113 1999
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (4)
5847569 Electrical contact probe for sampling high frequency electrical signals 97 1996
5981268 Hybrid biosensors 153 1997
5802856 Multizone bake/chill thermal cycling module 265 1997
6051422 Hybrid biosensors 132 1998
 
SAE MAGNETICS (H.K.) LTD. (1)
7015689 Connection method for probe pins for measurement of characteristics of thin-film magnetic head and characteristic measurement method for thin-film magnetic head 95 2003
 
ERICSSON INC. (1)
5949383 Compact antenna structures including baluns 118 1997
 
BROOKS AUTOMATION, INC. (1)
5539323 Sensor for articles such as wafers on end effector 126 1993
 
Yulim Hitech, Inc. (1)
7014499 Probe card for testing semiconductor device 96 2005
 
HYDRO-QUEBEC (1)
5105181 Method and electrical measuring apparatus for analyzing the impedance of the source of an actual alternating voltage 56 1990
 
PICO TECHNOLOGY HOLDINGS, INC. (1)
6335625 Programmable active microwave ultrafine resonance spectrometer (PAMURS) method and systems 87 2000
 
RENISHAW PLC (1)
5270664 Probe for measuring surface roughness by sensing fringe field capacitance effects 126 1992
 
REAL LIVING, INC. (1)
6236977 Computer implemented marketing system 547 1999
 
EASTMAN KODAK COMPANY (3)
5019692 Thermostatic device for fuser 47 1990
5848500 Light-tight enclosure and joint connectors for enclosure framework 113 1997
6624891 Interferometric-based external measurement system and method 49 2001
 
HERSTEIN, DOV (1)
4810981 Assembly of microwave components 91 1987
 
GILBOE, DEREK (1)
7034553 Direct resistance measurement corrosion probe 96 2003
 
TEMPTRONIC CORPORATION (6)
4426619 Electrical testing system including plastic window test chamber and method of using same 69 1981
4491173 Rotatable inspection table 66 1982
4734872 Temperature control for device under test 102 1985
4784213 Mixing valve air source 80 1986
4759712 Device for applying controlled temperature stimuli to nerve sensitive tissue 52 1986
6415858 Temperature control system for a workpiece chuck 98 1997
 
DAYMARC CORPORATION (2)
4419626 Broad band contactor assembly for testing integrated circuit devices 78 1981
4473798 Interface assembly for testing integrated circuit devices 72 1981
 
MEDICAL DEVICE INNOVATIONS LIMITED (1)
2006/0155,270 Tissue ablation apparatus and method of ablating tissue 156 2003
 
Carl-Zeiss-Stiftung (1)
4515439 Attachment of microscope objectives 82 1982
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 2009/0302,234 Method and Apparatus for Observing Inside Structures, and Specimen Holder 4 2008
 
FormFactor, Inc. (2)
* 8130005 Electrical guard structures for protecting a signal trace from electrical interference 0 2006
* 2008/0143,358 ELECTRICAL GUARD STRUCTURES FOR PROTECTING A SIGNAL TRACE FROM ELECTRICAL INTERFERENCE 41 2006
 
MAUI IMAGING, INC. (1)
* 2010/0262,013 Universal Multiple Aperture Medical Ultrasound Probe 22 2010
 
SIGNATURE CONTROL SYSTEMS, INC. (1)
* 8104190 Wood kiln moisture measurement calibration and metering methods 2 2010
 
HITACHI, LTD. (1)
* 8134131 Method and apparatus for observing inside structures, and specimen holder 7 2008
 
CASCADE MICROTECH, INC. (2)
7969173 Chuck for holding a device under test 2 2007
8319503 Test apparatus for measuring a characteristic of a device under test 2 2009
* Cited By Examiner

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