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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address	Total Patents
CASCADE MICROTECH, INC.	BEAVERTON, OR	139

International Classification(s)

• G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Cowan, Clarence E	Newberg, US	28	521
Dunklee, John	Tigard, US	36	481

Cited Art Landscape

Patent Info	(Count)	# Cites	Year
Other [Check patent profile for assignment information] (32)
4284682 Heat sealable, flame and abrasion resistant coated fabric		126	1980
4383217 Collinear four-point probe head and mount for resistivity measurements		88	1981
4480223 Unitary probe assembly		136	1981
4641659 Medical diagnostic microwave scanning apparatus		113	1982
4515133 Fuel economizing device		77	1984
4812754 Circuit board interfacing apparatus		118	1987
4711563 Portable collapsible darkroom		90	1987
4731577 Coaxial probe card		120	1987
4791363 Ceramic microstrip probe blade		137	1987
5363050 Quantitative dielectric imaging system		113	1990
5371457 Method and apparatus to test for current in an integrated circuit		99	1991
5209088 Changeable code lock		66	1991
5414565 Tilting kinematic mount		85	1991
5187443 Microwave test fixtures for determining the dielectric properties of a material		80	1992
5220277 Arrangement for testing semiconductor wafers or the like		103	1992
5584608 Anchored cable sling system		86	1994
5670322 Multi site molecule detection method		179	1995
5670888 Method for transporting and testing wafers		128	1995
5744971 Device and apparatus for measuring dielectric properties of materials		97	1995
5831442 Handling device		96	1996
5675932 Plant growing system		93	1996
5949579 Flexible darkness adapting viewer		89	1997
6147851 Method for guarding electrical regions having potential gradients		92	1999
6327034 Apparatus for aligning two objects		93	1999
6548311 Device and method for detecting analytes		141	2000
2001/0002,794 Split resistor probe and method		79	2001
2002/0066,551 Workpiece chuck		26	2001
6587327 Integrated broadband ceramic capacitor array		117	2002
2003/0139,662 Method and apparatus for detecting, identifying and performing operations on microstructures including, anthrax spores, brain cells, cancer cells, living tissue cells, and macro-objects including stereotactic neurosurgery instruments, weapons and explosives		85	2002
7015707 Micro probe		120	2003
2004/0193,382 Method and apparatus for calibrating a multiport test system for measurement of a DUT		100	2004
2006/0114,012 Method and apparatus for testing semiconductor wafers by means of a probe card		47	2005
AUTOCYTE NORTH CAROLINA, L.L.C. (1)
5659421 Slide positioning and holding device		110	1995
GENERAL ELECTRIC MEDICAL SYSTEMS ISRAEL LTD., AN ISRAEL CORPORATION AFFILIATED WITH GENERAL ELECTRIC COMPANY (1)
4691163 Dual frequency surface probes		116	1985
John H. Blanz Company, Inc. (4)
5097207 Temperature stable cryogenic probe station		107	1989
5077523 Cryogenic probe station having movable chuck accomodating variable thickness probe cards		103	1990
5160883 Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support		96	1990
5166606 High efficiency cryogenic test station		95	1990
DAINIPPON SCREEN MFG. CO., LTD. (3)
4531474 Rotary board treating apparatus		89	1984
4746857 Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer		96	1986
5233291 Method of and apparatus for measuring electric characteristics of semiconductor wafer		40	1991
SCIENCE & TECHNOLOGY CORPORATION @ UNM (1)
6549022 Apparatus and method for analyzing functional failures in integrated circuits		130	2000
XILINX, INC. (1)
6512482 Method and apparatus using a semiconductor die integrated antenna structure		93	2001
KDC TECHNOLOGY CORP. (1)
5227730 Microwave needle dielectric sensors		105	1992
Kraftwerk Union Aktiengesellschaft (1)
4642417 Concentric three-conductor cable		115	1985
SIERRA MONOLITHICS, INC. (1)
6639461 Ultra-wideband power amplifier module apparatus and method for optical and electronic communications		82	2001
MAILLET, WILLIAM (50%) (1)
5198756 Test fixture wiring integrity verification device		163	1991
HUGHES ELECTRONICS CORPORATION (2)
4772846 Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy		140	1986
5583445 Opto-electronic membrane probe		103	1994
Sandia Corporation (1)
6078183 Thermally-induced voltage alteration for integrated circuit analysis		132	1998
ROSENBERGER HOCHFREQUENZTECHNIK GMBH & CO. KG (1)
2004/0066,181 High-frequency probe tip		82	2003
NORTHROP GRUMMAN CORPORATION (1)
2005/0026,276 Remote detection and analysis of chemical and biological aerosols		80	2003
BROADCOM CORPORATION (1)
7088981 Apparatus for reducing flicker noise in a mixer circuit		112	2001
LOCKHEED MARTIN CORPORATION (1)
4853613 Calibration method for apparatus evaluating microwave/millimeter wave circuits		66	1987
MAX-PLANCK-INSTITUT FUER EISENFORSCHUNG GMBH (1)
5369370 Method and apparatus for the measurement of the corrosion potential between a coated metal surface and a reference electrode		70	1992
PROFILE TECHNOLOGIES, INC. (1)
2001/0044,152 Dual beam, pulse propagation analyzer, medical profiler interferometer		73	2001
BARKER REVOCABLE TRUST U/A/D (1)
5202558 Flexible fiber optic probe for high-pressure shock experiments		103	1992
BRUKER NANO, INC. (2)
5376790 Scanning probe microscope		116	1992
5672816 Large stage system for scanning probe microscopes and other instruments		119	1995
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
5479109 Testing device for integrated circuits on wafer		118	1994
NIKON CORPORATION (2)
4856904 Wafer inspecting apparatus		115	1988
6628503 Gas cooled electrostatic pin chuck for vacuum applications		110	2001
ADVANTEST (SINGAPORE) PTE. LTD. (1)
6812718 Massively parallel interface for electronic circuits		112	2001
HEWLETT-PACKARD COMPANY (1)
4795962 Floating driver circuit and a device for measuring impedances of electrical components		95	1987
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (3)
4839587 Test fixture for tab circuits and devices		153	1988
5198753 Integrated circuit test fixture and method		129	1990
5198758 Method and apparatus for complete functional testing of a complex signal path of a semiconductor chip		72	1991
EMIMAGING LTD (2)
5715819 Microwave tomographic spectroscopy system and method		156	1994
6490471 Electromagnetical imaging and therapeutic (EMIT) systems		93	2001
SILICONIX INCORPORATED (1)
6476442 Pseudo-Schottky diode		101	1998
BLACKBERRY LIMITED (1)
6794950 Waveguide to microstrip transition		87	2001
Hughes Aircraft Company (2)
5512835 Electrical probe and method for measuring gaps and other discontinuities in enclosures using electrical inductance for RF shielding assessment		75	1992
5412866 Method of making a cast elastomer/membrane test probe assembly		123	1993
ITT CORPORATION (1)
5105148 Replaceable tip test probe		58	1991
SANTRONICS, INC. (1)
7030599 Hand held voltage detection probe		101	2004
GENRAD, INC. (1)
5861743 Hybrid scanner for use in an improved MDA tester		49	1995
TSK AMERICA, INC. (1)
2001/0043,073 PROBER INTERFACE PLATE		74	1999
INTERSIL CORPORATION (1)
4528504 Pulsed linear integrated circuit tester		98	1982
INTERMEC IP CORP. (1)
6236223 Method and apparatus for wireless radio frequency testing of RFID integrated circuits		202	1999
TEXAS INSTRUMENTS INCORPORATED (8)
4888550 Intelligent multiprobe tip		92	1983
5103169 Relayless interconnections in high performance signal paths		55	1989
5070297 Full wafer integrated circuit testing device		295	1990
5159752 Scanning electron microscope based parametric testing method and apparatus		119	1990
5225037 Method for fabrication of probe card for testing of semiconductor devices		216	1991
5511010 Method and apparatus of eliminating interference in an undersettled electrical signal		93	1994
6292760 Method and apparatus to measure non-coherent signals		93	1998
7026833 Multiple-chip probe and universal tester contact assemblage		101	2005
The United States of America as represented by the Secretary of the Navy (2)
4479690 Underwater splice for submarine coaxial cable		61	1982
5091732 Lightweight deployable antenna system		89	1990
SENSOR DIAGNOSTICS, INC. (1)
4713347 Measurement of ligand/anti-ligand interactions using bulk conductance		214	1985
OMNIPROBE, INC. (1)
6420722 Method for sample separation and lift-out with one cut		127	2001
TEKTRONIX, INC. (11)
4739259 Telescoping pin probe		100	1986
4758785 Pressure control apparatus for use in an integrated circuit testing station		118	1986
4673839 Piezoelectric pressure sensing apparatus for integrated circuit testing stations		124	1986
4783625 Wideband high impedance card mountable probe		95	1988
4838802 Low inductance ground lead		49	1988
4923407 Adjustable low inductance probe		76	1989
5136237 Double insulated floating high voltage test probe		107	1991
5225796 Coplanar transmission structure having spurious mode suppression		61	1992
5412330 Optical module for an optically based measurement system		95	1993
6447339 Adapter for a multi-channel signal probe		87	2001
6701265 Calibration for vector network analyzer		94	2002
Yamaichi Denki Kogyo Kabushiki Kaisha (1)
4978914 Laminated board for testing electronic components		64	1990
MICRON TECHNOLOGY, INC. (10)
5461328 Fixture for burn-in testing of semiconductor wafers		94	1993
5838161 Semiconductor interconnect having test structures for evaluating electrical characteristics of the interconnect		92	1996
6060891 Probe card for semiconductor wafers and method and system for testing wafers		153	1997
6181144 Semiconductor probe card having resistance measuring circuitry and method fabrication		176	1998
6194720 Preparation of transmission electron microscope samples		110	1998
6229322 Electronic device workpiece processing apparatus and method of communicating signals within an electronic device workpiece processing apparatus		32	1998
6774651 Method for aligning and connecting semiconductor components to substrates		70	2000
6359456 Probe card and test system for semiconductor wafers		115	2001
7026835 Engagement probe having a grouping of projecting apexes for engaging a conductive pad		93	2002
7009188 Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same		97	2004
XEROX CORPORATION (1)
4780670 Active probe card for high resolution/low noise wafer level testing		135	1985
SEIKO INSTRUMENTS INC. (1)
7015455 Near-field optical probe		93	2005
HAMAMATSU PHOTONICS K.K. (2)
4922186 Voltage detector		82	1988
5552716 Method of positioning an electrooptic probe of an apparatus for the measurement of voltage		51	1994
ANDO ELECTRIC CO., LTD. (1)
2001/0054,906 Probe card and a method of manufacturing the same		78	2001
SILICON VALLEY BANK (5)
4893914 Test station		112	1988
5892539 Portable emission microscope workstation for failure analysis		127	1995
6198299 High Resolution analytical probe station		85	1998
6424141 Wafer probe station		62	2000
6744268 High resolution analytical probe station		124	2002
YOKOWO CO., LTD. (4)
7019701 Antenna device mounted on vehicle		85	2004
6900647 Contact probe and probe device		105	2004
6903563 Contact probe and probe device		100	2004
7015710 Contact probe and probe device		97	2004
DELAWARE CAPITAL FORMATION, INC. (3)
5408189 Test fixture alignment system for printed circuit boards		149	1992
6181149 Grid array package test contactor		104	1996
6064218 Peripherally leaded package test contactor		105	1997
THOMAS JEFFERSON UNIVERSITY (1)
5478748 Protein assay using microwave energy		89	1994
TRW INC. (1)
4468629 NPN Operational amplifier		80	1982
HEIDELBERGER DRUCKMASCHINEN AG (1)
4856426 Sheet-fed rotary printing machine with printing units arranged in tandem		55	1985
AMP Incorporated (1)
4777434 Microelectronic burn-in system		90	1987
MDS INC. (5)
6376258 Resonant bio-assay device and test system for detecting molecular binding events		137	2000
6340568 Method for detecting and classifying nucleic acid hybridization		84	2001
6566079 Methods for analyzing protein binding events		104	2001
2003/0032,000 Method for analyzing cellular events		95	2001
2002/0168,659 System and method for characterizing the permittivity of molecular events		75	2002
GOOGLE INC. (1)
5793213 Method and apparatus for calibrating a network analyzer		94	1996
CREDENCE SYSTEMS CORPORATION (1)
5883523 Coherent switching power for an analog circuit tester		105	1997
MITSUBISHI GAS CHEMICAL COMPANY, INC. (1)
6222031 Process for preparing water-soluble tricarboxypolysaccharide		83	1998
SHARP KABUSHIKI KAISHA (2)
5089774 Apparatus and a method for checking a semiconductor		129	1990
5374938 Waveguide to microstrip conversion means in a satellite broadcasting adaptor		95	1993
SYMBOL TECHNOLOGIES, LLC (1)
6002236 Lockable storage cradle for battery-operated electronic device		55	1998
IBIDEN CO., LTD. (3)
2004/0021,475 Wafer prober		82	2003
2004/0134,899 Ceramic substrate for a semiconductor-production/inspection device		80	2003
2004/0207,072 Ceramic substrate for a semiconductor producing/examining device		85	2004
MEDISPECTRA, INC. (1)
2004/0186,382 Spectral volume microprobe arrays		83	2003
TELEFONAKTIEBOLAGET L M ERICSSON (PUBL) (1)
5996102 Assembly and method for testing integrated circuit devices		91	1997
SILICON GRAPHICS, INC. (1)
4982153 Method and apparatus for cooling an integrated circuit chip during testing		63	1989
SANTA BARBARA RESEARCH CENTER (2)
4695794 Voltage calibration in E-beam probe using optical flooding		62	1985
4730158 Electron-beam probing of photodiodes		86	1986
CERPROBE CORPORATION (1)
6002426 Inverted alignment station and method for calibrating needles of probe card for probe testing of integrated circuits		114	1997
NEWPORT FAB, LLC (1)
6727716 Probe card and probe needle for high frequency testing		96	2002
DRANETZ TECHNOLOGIES, INC., (1)
4414638 Sampling network analyzer with stored correction of gain errors		74	1981
GLUCOSET AS (1)
7003184 Fiber optic probes		109	2001
EADS DEUTSCHLAND GMBH (1)
6636182 Structural antenna for flight aggregates or aircraft		74	2001
UNIVERSITY OF MASSACHUSETTS (1)
5233197 High speed digital imaging microscope		113	1991
RPX CLEARINGHOUSE LLC (1)
6753679 Test point monitor using embedded passive resistance		84	2002
UNIVERSITY OF MARYLAND, BALTIMORE (1)
6809533 Quantitative imaging of dielectric permittivity and tunability		79	2002
The Boeing Company (1)
4727637 Computer aided connector assembly method and apparatus		114	1987
Fujikura Rubber Works, Ltd. (1)
4425395 Base fabrics for polyurethane-coated fabrics, polyurethane-coated fabrics and processes for their production		105	1982
FUJIKURA LTD. (1)
4626618 DC electric power cable		99	1985
RELIABILITY INCORPORATED (1)
2002/0070,745 Cooling system for burn-in unit		85	2000
FILOTEX (1)
5397855 Low noise cable		95	1993
AVAGO TECHNOLOGIES ECBU IP (SINGAPORE) PTE. LTD. (1)
5066357 Method for making flexible circuit card with laser-contoured vias and machined capacitors		108	1990
AGILENT TECHNOLOGIES, INC. (30)
4588970 Three section termination for an R.F. triaxial directional bridge		51	1984
4703433 Vector network analyzer with integral processor		111	1984
4816767 Vector network analyzer with integral processor		106	1986
4771234 Vacuum actuated test fixture		105	1986
4918383 Membrane probe with automatic contact scrub action		158	1988
4906920 Self-leveling membrane probe		206	1988
5172051 Wide bandwidth passive probe		110	1991
5298972 Method and apparatus for measuring polarization sensitivity of optical devices		111	1991
5274336 Capacitively-coupled test probe		140	1992
5680039 Probe apparatus for use in both high and low frequency measurements		48	1995
5578932 Method and apparatus for providing and calibrating a multiport network analyzer		148	1995
5945836 Loaded-board, guided-probe test fixture		131	1996
5923177 Portable wedge probe for perusing signals on the pins of an IC		49	1997
5903143 Probe apparatus with RC circuit connected between ground and a guard		94	1997
6060888 Error correction method for reflection measurements of reciprocal devices in vector network analyzers		113	1998
6251595 Methods and devices for carrying out chemical reactions		123	1998
6175228 Electronic probe for measuring high impedance tri-state logic circuits		84	1998
6271673 Probe for measuring signals		105	1999
6407562 Probe tip terminating device providing an easily changeable feed-through termination		95	1999
2001/0024,116 Electronic probe for measuring high impedance tri-state logic circuits		79	2001
6643597 Calibrating a test system using unknown standards		118	2001
6717426 Blade-like connecting needle		79	2002
6768328 Single point probe structure and method		76	2002
6873167 Connection box, system, and method for evaluating a DUT board		52	2002
6864694 Voltage probe		91	2002
2005/0030,047 Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration		86	2003
7025628 Electronic probe extender		114	2003
2004/0162,689 Multiport network analyzer calibration employing reciprocity of a device		95	2004
7005868 Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe		94	2004
7026834 Multiple two axis floating probe block assembly using split probe block		93	2005
ROSEMOUNT TANK RADAR AB (1)
6278411 Horn antenna		80	1999
The Aerospace Corporation (2)
6211663 Baseband time-domain waveform measurement method		118	1999
6396298 Active feedback pulsed measurement method		95	2000
Acome, Societies Anonyme (1)
4621169 Electric cable construction and uses therefor		95	1985
DESIGNTECH INTERNATIONAL, INC. (1)
5041782 Microstrip probe		96	1989
Gebr. Marzhauser Wetzlar oHG (1)
4552033 Drive system for a microscope stage or the like		110	1984
L&P PROPERTY MANAGEMENT COMPANY (1)
5505150 Method and apparatus for facilitating loop take time adjustment in multi-needle quilting machine		87	1994
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
6653903 Supply voltage decoupling device for HF amplifier circuits		73	2001
Bendix Electronics S.A. (1)
4884206 Process and processing circuit for the analog output signal of a sensor		55	1988
PRECISION DIVERSIFIED INDUSTRIES, INC. (1)
4694245 Vacuum-actuated top access test probe fixture		75	1984
MEASUREMENT SYSTEMS, INC. (1)
5646538 Method and apparatus for fastener hole inspection with a capacitive probe		53	1995
NORTH STAR INNOVATIONS INC. (1)
6127831 Method of testing a semiconductor device by automatically measuring probe tip parameters		106	1997
KLA-TENCOR CORPORATION (2)
6633174 Stepper type test structures and methods for inspection of semiconductor integrated circuits		105	2000
6771806 Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices		148	2000
Takeda Riken Co., Ltd. (1)
4691831 IC test equipment		53	1985
COMMISSARIAT A L'ENERGIE ATOMIQUE (1)
4933634 Device and method to measure a short radiation pulse or an electric pulse		66	1989
SV PROBE PTE LTD. (2)
5422574 Large scale protrusion membrane for semiconductor devices under test with very high pin counts		183	1993
6037785 Probe card apparatus		109	1996
MATTSON TECHNOLOGY, INC. (1)
6172337 System and method for thermal processing of a semiconductor substrate		105	1999
EJ Systems, Inc. (1)
5164661 Thermal control system for a semi-conductor burn-in		95	1991
ELECTRO SCIENTIFIC INDUSTRIES, INC. (1)
6100815 Compound switching matrix for probing and interconnecting devices under test to measurement equipment		119	1997
Infrared Laboratories, Inc. (1)
6515494 Silicon wafer probe station using back-side imaging		43	2000
EUROPEAN ELECTRONIC TEST CENTRE (1)
5006796 Temperature control instrument for electronic components under test		87	1988
HYNIX SEMICONDUCTOR INC. (1)
7002364 Semiconductor device for reducing the number of probing pad used during wafer test and method for testing the same		96	2003
TRANSAT CORPORATION (1)
5451884 Electronic component temperature test system with flat ring revolving carriage		102	1993
RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION (1)
6194907 Prober and electric evaluation method of semiconductor device		61	1999
CANON KABUSHIKI KAISHA (8)
4503335 Semiconductor printing apparatus with multiple independent temperature control		114	1982
4755747 Wafer prober and a probe card to be used therewith		109	1985
4786867 Wafer prober		107	1987
4864227 Wafer prober		132	1988
4929893 Wafer prober		160	1988
5304924 Edge detector		99	1992
5731920 Converting adapter for interchangeable lens assembly		95	1995
5685232 Positioning stage device exposure apparatus and device manufacturing method utilizing the same		116	1996
SYM-TEK INCORPORATED OF MINNESOTA (1)
4926118 Test station		120	1988
CHENG, DAVID (1)
5479108 Method and apparatus for handling wafers		158	1992
ENDEVCO CORPORATION (1)
5214243 High-temperature, low-noise coaxial cable assembly with high strength reinforcement braid		129	1991
Tovex Tech, Inc. (1)
5065089 Circuit handler with sectioned rail		56	1990
LUCENT TECHNOLOGIES INC. (2)
5970429 Method and apparatus for measuring electrical noise in devices		132	1997
6245692 Method to selectively heat semiconductor wafers		91	1999
VEECO METROLOGY INC. (1)
7001785 Capacitance probe for thin dielectric film characterization		100	2004
ALPS ELECTRIC CO., LTD. (1)
4725793 Waveguide-microstrip line converter		88	1986
Nebraska Electronics, Inc. (1)
5481196 Process and apparatus for microwave diagnostics and therapy		85	1994
CORNELL RESEARCH FOUNDATION, INC. (1)
4680538 Millimeter wave vector network analyzer		73	1985
Yugen Kaisha Sozoan (1)
5481936 Rotary drive positioning system for an indexing table		115	1994
TELEDYNE LECROY, INC. (2)
6822463 Active differential test probe with a transmission line input structure		77	2002
7019544 Transmission line input structure test probe		96	2004
DYNEX SEMICONDUCTOR LIMITED (1)
6265950 Transition from a waveguide to a strip transmission line		93	1999
H+W Test Products, Inc. (1)
6054869 Bi-level test fixture for testing printed circuit boards		97	1998
MURATA MANUFACTURING CO., LTD. (1)
6838885 Method of correcting measurement error and electronic component characteristic measurement apparatus		101	2003
MOTOROLA, INC. (3)
4453142 Microstrip to waveguide transition		113	1981
4646005 Signal probe		100	1984
5748506 Calibration technique for a network analyzer		95	1996
GEO INTERNATIONAL CORPORATION (1)
4675600 Testing apparatus for plated through-holes on printed circuit boards, and probe therefor		65	1984
M/A-COM TECHNOLOGY SOLUTIONS HOLDINGS, INC. (1)
5142224 Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals		105	1991
M/A-COM, INC. (1)
4376920 Shielded radio frequency transmission cable		142	1981
INTEL CORPORATION (4)
5944093 Pickup chuck with an integral heat pipe		104	1997
7020363 Optical probe for wafer testing		99	2001
6856129 Current probe device having an integrated amplifier		92	2002
2006/0052,075 Testing integrated circuits using high bandwidth wireless technology		78	2004
MITSUBISHI DENKI KABUSHIKI KAISHA (7)
4431967 Method of mounting a semiconductor element for analyzing failures thereon		29	1980
5010296 Wafer prober		62	1990
5408188 High frequency wafer probe including open end waveguide		77	1992
5493236 Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis		191	1994
6144212 Vertical needle type probe card, method of manufacturing thereof, method of replacing defective probe needle and test method of wafer using the probe card		111	1998
6242929 Probe needle for vertical needle type probe card and fabrication thereof		90	1998
6404213 Probe stylus		85	1999
STMICROELECTRONICS S.A. (1)
6480013 Method for the calibration of an RF integrated circuit probe		101	2000
SIGNATURE BIOSCIENCESM INC. (1)
6395480 Computer program and database structure for detecting molecular binding events		109	1999
ST. CLAIR INTELLECTUAL PROPERTY CONSULTANTS, INC. (1)
4904933 Integrated circuit probe station		114	1986
GGB INDUSTRIES, INC. (3)
5373231 Integrated circuit probing apparatus including a capacitor bypass structure		127	1993
6603322 Probe card for high speed testing		102	1996
6118287 Probe tip structure		104	1997
TDK RF SOLUTIONS, INC. (1)
6657601 Metrology antenna system utilizing two-port, sleeve dipole and non-radiating balancing network		78	2001
WI-LAN INC. (2)
5565881 Balun apparatus including impedance transformer having transformation length		84	1994
5628057 Multi-port radio frequency signal transformation network		100	1996
ARRAY BIOSCIENCE CORPORATION (1)
6707548 Systems and methods for filter based spectrographic analysis		113	2001
HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP (2)
6233613 High impedance probe for monitoring fast ethernet LAN links		97	1997
7002133 Detecting one or more photons from their interactions with probe photons in a matter system		93	2003
XANDEX, INC. (3)
5528158 Probe card changer system and method		105	1994
5506498 Probe card system and method		98	1995
6166553 Prober-tester electrical interface for semiconductor test		100	1998
BENHOV GMBH, LLC (1)
6418009 Broadband multi-layer capacitor		88	2000
TDK CORPORATION (2)
5510792 Anechoic chamber and wave absorber		95	1994
7012425 Eddy-current probe		95	2005
THOMSON-CSF (1)
4742571 Coupling device between a metal wave guide, a dielectric wave guide and a semiconductor component and a mixer using this coupling device		88	1986
ETS Gourdon (1)
5034688 Temperature conditioning support for small objects such as semi-conductor components and thermal regulation process using said support		144	1989
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
6049216 Contact type prober automatic alignment		94	1997
7012441 High conducting thin-film nanoprobe card and its fabrication method		106	2003
GENERAL SIGNAL CORPORATION (1)
4557599 Calibration and alignment target plate		85	1984
KEITHLEY INSTRUMENTS, INC. (2)
6121783 Method and apparatus for establishing electrical contact between a wafer and a chuck		94	1997
6104206 Product wafer junction leakage measurement using corona and a kelvin probe		128	1997
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5653939 Optical and electrical methods and apparatus for molecule detection		477	1995
5998768 Active thermal control of surfaces by steering heating beam in response to sensed thermal radiation		108	1998
NEC CORPORATION (3)
6310483 Longitudinal type high frequency probe for narrow pitched electrodes		103	1998
6281691 Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable		103	1999
6400168 Method for fabricating probe tip portion composed by coaxial cable		104	2001
CSI TECHNOLOGY, INC. (1)
6091236 System and method for measuring and analyzing electrical signals on the shaft of a machine		97	1997
ADVANCED RESEARCH AND APPLICATIONS CORPORATION (1)
4575676 Method and apparatus for radiation testing of electron devices		75	1983
ELK FINANCIAL, INC. (2)
6064217 Fine pitch contact device employing a compliant conductive polymer bump		134	1996
2002/0011,859 METHOD FOR FORMING CONDUCTIVE BUMPS FOR THE PURPOSE OF CONTRRUCTING A FINE PITCH TEST DEVICE		113	1998
NOTTERMAN, DANIEL A. (1)
2003/0072,549 Method and apparatus for dielectric spectroscopy of biological solutions		118	2002
TOKYO OHKA KOGYO CO., LTD. (1)
5571324 Rotary-cup coating apparatus		104	1994
SMSC ANALOG TECHNOLOGY, INC. (1)
6753699 Integrated circuit and method of controlling output impedance		81	2002
MTU MOTOREN- UND TURBINEN-UNION MUENCHEN GMBH (1)
5232789 Structural component with a protective coating having a nickel or cobalt basis and method for making such a coating		92	1992
Hypervision, Inc. (1)
5475316 Transportable image emission microscope		140	1993
ADVANTEST CORPORATION (8)
5172049 IC test equipment		133	1991
5644248 Test head cooling system		84	1995
5767690 Test head cooling system		92	1997
5952842 Test head cooling system		59	1997
6191596 Method for detecting a contact position between an object to be measured and measuring pins		81	1998
6257319 IC testing apparatus		65	1999
2002/0011,863 IC chip tester with heating element for preventing condensation		89	2001
7020360 Wavelength dispersion probing system		94	2002
PHASE METRICS (2)
5517111 Automatic testing system for magnetoresistive heads		65	1995
5668470 Automatic testing system for magnetoresistive heads		56	1996
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (3)
6927079 Method for probing a semiconductor wafer		105	2000
6605951 Interconnector and method of connecting probes to a die for functional analysis		108	2000
7023225 Wafer-mounted micro-probing platform		94	2003
NEC ELECTRONICS CORPORATION (1)
6320396 Parasitic MIM structural spot analysis method for semiconductor device and parasitic MIM structure spot analysis method for silicon semiconductor device		100	1997
FM INDUSTRIES, INC. (1)
5572398 Tri-polar electrostatic chuck		80	1994
PINNACLE PRODUCTS, INC. (1)
5807107 Dental infection control system		94	1996
TECHNOPROBE S.R.L. (1)
2002/0070,743 Testing head having vertical probes		96	2001
Tokyo Shibaura Denki Kabushiki Kaisha (1)
4532423 IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested		106	1983
ANRITSU COMPANY (3)
5905421 Apparatus for measuring and/or injecting high frequency signals in integrated systems		80	1997
6169410 Wafer probe with built in RF frequency conversion module		85	1998
6529844 Vector network measurement system		117	1999
THERMOCARBON, INC. (1)
5676360 Machine tool rotary table locking apparatus		117	1995
Data Probe Corporation (1)
4588950 Test system for VLSI digital circuit and method of testing		97	1983
MOLECULAR DEVICES, INC. (1)
5164319 Multiple chemically modulated capacitance determination		325	1989
MITEL CORPORATION (1)
5508631 Semiconductor test chip with on wafer switching matrix		56	1994
Honeywell Inc. (1)
6232790 Method and apparatus for amplifying electrical test signals from a micromechanical device		67	1999
MILLER DESIGN AND EQUIPMENT INC. (1)
5303938 Kelvin chuck apparatus and method of manufacture		60	1993
Honeywell Information Systems Inc. (1)
4342958 Automatic test equipment test probe contact isolation detection method		72	1980
MicroCraft (1)
7188037 Method and apparatus for testing circuit boards		89	2004
BECHTEL BWXT IDAHO, LLC (1)
6147502 Method and apparatus for measuring butterfat and protein content using microwave absorption techniques		80	1998
KAI TECHNOLOGIES, INC. (1)
6275738 Microwave devices for medical hyperthermia, thermotherapy and diagnosis		146	1999
Charmilles Technologies SA (1)
4918279 EDM cutting machine including device for preventing transmission of sealing plate movement to guide head arm		60	1988
UNIVERSITY OF SOUTH FLORIDA (1)
5835997 Wafer shielding chamber for probe station		60	1995
FLUKE CORPORATION (1)
6384614 Single tip Kelvin probe		103	2000
Junkosha Co., Ltd. (1)
4567321 Flexible flat cable		102	1984
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (3)
5594358 Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line		98	1994
5794133 Microwave mixing circuit		84	1996
6806836 Helical antenna apparatus provided with two helical antenna elements, and radio communication apparatus provided with same helical antenna apparatus		75	2003
INTEGRATED TECHNOLOGY CORPORATION (2)
5657394 Integrated circuit probe card inspection system		93	1993
6118894 Integrated circuit probe card inspection system		119	1997
WALES ABERYSTWYTH, UNIVERSITY OF (1)
5569591 Analytical or monitoring apparatus and method		157	1994
SOLID STATE MEASUREMENTS, INC. (2)
6900652 Flexible membrane probe and method of use thereof		106	2003
7023231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof		94	2004
Solid State Farms, Inc. (1)
5792668 Radio frequency spectral analysis for in-vitro or in-vivo environments		214	1996
New Wave Research (4)
5611946 Multi-wavelength laser system, probe station and laser cutter system using the same		94	1994
5811751 Multi-wavelength laser system, probe station and laser cutter system using the same		141	1997
6573702 Method and apparatus for cleaning electronic test contacts		103	1997
5963364 Multi-wavelength variable attenuator and half wave plate		120	1997
SONY CORPORATION (3)
5669316 Turntable for rotating a wafer carrier		101	1993
6362792 Antenna apparatus and portable radio set		79	2000
6366247 Antenna device and portable radio set		83	2000
Spectroscopy Imaging Systems Corporation (1)
4916398 Efficient remote transmission line probe tuning for NMR apparatus		95	1988
WENTWORTH LABORATORIES, INC. (3)
5959461 Probe station adapter for backside emission inspection		123	1997
* 6031383 Probe station for low current, low voltage parametric measurements using multiple probes		109	1998
6124723 Probe holder for low voltage, low current measurements in a water probe station		85	1998
FormFactor, Inc. (3)
5974662 Method of planarizing tips of probe elements of a probe card assembly		373	1995
6064213 Wafer-level burn-in and test		264	1997
7002363 Method and system for compensating thermally induced motion of probe cards		122	2001
SAMSUNG ELECTRONICS CO., LTD. (2)
6970001 Variable impedance test probe		74	2003
6900653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof		106	2003
SONY ELECTRONICS INC. (4)
6043668 Planarity verification system for integrated circuit test probes		54	1997
6137303 Integrated testing method and apparatus for semiconductor test operations processing		128	1998
6259261 Method and apparatus for electrically testing semiconductor devices fabricated on a wafer		68	1999
2007/0024,506 Systems and methods for high frequency parallel transmissions		79	2006
WISCONSIN ALUMNI RESEARCH FOUNDATION (1)
2003/0088,180 Space-time microwave imaging for cancer detection		115	2002
Semitest, Inc. (2)
4891584 Apparatus for making surface photovoltage measurements of a semiconductor		138	1988
5091691 Apparatus for making surface photovoltage measurements of a semiconductor		81	1988
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM (1)
2003/0119,057 Forming and modifying dielectrically-engineered microparticles		136	2001
OXFORD INSTRUMENTS AMERICA, INC. (1)
5448172 Triboelectric instrument with DC drift compensation		41	1993
NXP B.V. (1)
5491426 Adaptable wafer probe assembly for testing ICs with different power/ground bond pad configurations		79	1994
Contraves AG (1)
4567908 Discharge system and method of operating same		50	1984
RENESAS ELECTRONICS CORPORATION (4)
6028435 Semiconductor device evaluation system using optical fiber		108	1997
6160407 Inspection method and wiring current observation method for semiconductor device and apparatus of the same		98	1998
6686753 Prober and apparatus for semiconductor chip analysis		55	2000
6900646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof		97	2002
KABUSHIKI KAISHA NIHON MICRONICS (2)
5888075 Auxiliary apparatus for testing device		78	1997
6019612 Electrical connecting apparatus for electrically connecting a device to be tested		87	1998
SAMSUNG AEROSPACE INDUSTRIES, LTD. (1)
5857667 Vacuum chuck		70	1996
DIT-MCO INTERNATIONAL CORPORATION (1)
4357575 Apparatus for use in testing printed circuit process boards having means for positioning such boards in proper juxtaposition with electrical contacting assemblies		116	1980
MCC GESELLSCHAFT FUR DIAGNOSESYSTEME IN MEDIZIN UND TECHNIK MBH & CO. KG (1)
2005/0168,722 Device and method for measuring constituents in blood		46	2003
OPTOMETRIX, INC. (1)
6181416 Schlieren method for imaging semiconductor device properties		84	1999
SEMICONDUCTOR PHYSICS LABORATORY, INC. (1)
6052653 Spreading resistance profiling system		100	1997
TERADYNE, INC. (1)
6784679 Differential coaxial contact array for high-density, high-speed signals		93	2002
GLOBALFOUNDRIES INC. (10)
6091255 System and method for tasking processing modules based upon temperature		138	1998
6608494 Single point high resolution time resolved photoemission microscopy system and method		111	1998
6483327 Quadrant avalanche photodiode time-resolved detection		109	1999
6724928 Real-time photoemission detection system		97	2000
6488405 Flip chip defect analysis using liquid crystal		103	2000
6617862 Laser intrusive technique for locating specific integrated circuit current paths		98	2002
6788093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies		108	2002
7022976 Dynamically adjustable probe tips		98	2003
7011531 Membrane probe with anchored elements		93	2005
7005879 Device for probe card power bus noise reduction		93	2005
ENDWAVE CORPORATION (1)
6023209 Coplanar microwave circuit having suppression of undesired modes		79	1996
Microwave Imaging Systems Technologies, Inc. (2)
5841288 Two-dimensional microwave imaging apparatus and methods		125	1997
6448788 Fixed array microwave imaging apparatus and method		111	2000
DH TECHNOLOGIES DEVELOPMENT PTE. LTD. (1)
6627461 Method and apparatus for detection of molecular events using temperature control of detection environment		99	2001
NXP USA, INC. (2)
5982166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control		108	1997
6313567 Lithography chuck having piezoelectric elements, and method		38	2000
CASCADE MICROTECH, INC. (62)
4697143 Wafer probe		201	1984
4827211 Wafer probe		127	1987
4858160 System for setting reference reactance for vector corrected measurements		99	1988
4849689 Microwave wafer probe having replaceable probe tip		128	1988
4994737 System for facilitating planar probe measurements of high-speed interconnect structures		57	1990
5045781 High-frequency active probe having replaceable contact needles		110	1991
5101453 Fiber optic wafer probe		102	1991
5237267 Wafer probe station having auxiliary chucks		52	1992
5266889 Wafer probe station with integrated environment control enclosure		135	1992
5345170 Wafer probe station having integrated guarding, Kelvin connection and shielding systems		117	1992
5457398 Wafer probe station having full guarding		123	1993
5434512 Wafer probe station having integrated guarding, Kelvin connection and shielding systems		59	1994
5506515 High-frequency probe tip assembly		160	1994
5532609 Wafer probe station having environment control enclosure		70	1995
5561377 System for evaluating probing networks		66	1995
5610529 Probe station having conductive coating added to thermal chuck insulator		138	1995
5565788 Coaxial wafer probe with tip shielding		148	1995
5663653 Wafer probe station for low-current measurements		73	1995
5729150 Low-current probe card with reduced triboelectric current generating cables		137	1995
5604444 Wafer probe station having environment control enclosure		62	1996
5659255 Method of evaluating signal conditions in a probe measurement network having a plurality of separate measurement channels		58	1996
6313649 Wafer probe station having environment control enclosure		57	1997
6232788 Wafer probe station for low-current measurements		88	1997
6232789 Probe holder for low current measurements		87	1997
5869975 System for evaluating probing networks that have multiple probing ends		56	1997
5963027 Probe station having environment control chambers with orthogonally flexible lateral wall assembly		71	1997
6002263 Probe station having inner and outer shielding		60	1997
6034533 Low-current pogo probe card		111	1997
6137302 Low-current probe card with reduced triboelectric current generating cables		112	1997
5973505 System for evaluating probing networks		54	1998
6445202 Probe station thermal chuck with shielding for capacitive current		50	1999
6252392 Probe station having environment control chamber with bendably extensible and retractable lateral wall assembly		51	1999
6130544 System for evaluating probing networks		51	1999
6288557 Probe station having inner and outer shielding		51	1999
6578264 Method for constructing a membrane probe using a depression		80	2000
6483336 Indexing rotatable chuck for a probe station		53	2000
6608496 Reference transmission line junction for probing device		56	2000
6335628 Wafer probe station for low-current measurements		54	2001
6380751 Wafer probe station having environment control enclosure		49	2001
6362636 Probe station having multiple enclosures		53	2001
6549106 Waveguide with adjustable backshort		140	2001
6492822 Wafer probe station for low-current measurements		51	2001
6489789 Probe station having multiple enclosures		50	2001
6486687 Wafer probe station having environment control enclosure		51	2002
6771090 Indexing rotatable chuck for a probe station		57	2002
6836135 Optical testing device		52	2002
6636059 Wafer probe station having environment control enclosure		49	2002
6639415 Probe station having multiple enclosures		49	2002
6720782 Wafer probe station for low-current measurements		47	2002
6777964 Probe station		52	2002
6724205 Probe for combined signals		98	2002
6642732 Probe station thermal chuck with shielding for capacitive current		48	2002
6861856 Guarded tub enclosure		50	2002
6801047 Wafer probe station having environment control enclosure		47	2003
6842024 Probe station having multiple enclosures		47	2003
6847219 Probe station with low noise characteristics		62	2003
* 7250779 Probe station with low inductance path		25	2003
6806724 Probe for combined signals		95	2003
* 7221172 Switched suspended conductor and connection		23	2004
6885197 Indexing rotatable chuck for a probe station		47	2004
7009383 Wafer probe station having environment control enclosure		93	2004
7187188 Chuck with integrated wafer support		79	2004
HYPRES, INC. (1)
4894612 Soft probe for providing high speed on-wafer connections to a circuit		158	1988
NATIONAL SEMICONDUCTOR CORPORATION (4)
4757255 Environmental box for automated wafer probing		194	1986
5101149 Modifiable IC board		72	1989
5883522 Apparatus and method for retaining a semiconductor wafer during testing		107	1996
7096133 Method of establishing benchmark for figure of merit indicative of amplifier flicker noise		73	2005
ELECTRIC POWER RESEARCH INSTITUTE, INC. (1)
4487996 Shielded electrical cable		106	1982
DELPHI TECHNOLOGIES, INC. (1)
7015709 Ultra-broadband differential voltage probes		102	2004
MERCK & CO., INC. (1)
7013221 Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays		96	2000
SARANTEL LIMITED (3)
6184845 Dielectric-loaded antenna		141	1997
6369776 Antenna		92	1999
6914580 Dielectrically-loaded antenna		83	2003
XCERRA CORPORATION (1)
7015711 Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method		107	2004
MARTEK, INC. (3)
5656942 Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane		111	1995
6096567 Method and apparatus for direct probe sensing		146	1997
6320372 Apparatus and method for testing a substrate having a plurality of terminals		102	1999
INTEGRATED PROCESS EQUIPMENT CORP. (1)
5515167 Transparent optical chuck incorporating optical monitoring		148	1994
NORTEL NETWORKS LIMITED (1)
4853624 Tunable microwave wafer probe		93	1988
Active Precision, Inc. (2)
6756751 Multiple degree of freedom substrate manipulator		36	2002
2003/0156,270 Multiple degree of freedom substrate manipulator		35	2002
ABBOTT DIABETES CARE INC. (1)
2005/0165,316 Method for detecting artifacts in data		77	2004
GCB INDUSTRIES, INC. (1)
6229327 Broadband impedance matching probe		137	1997
VEGA GRIESHABER KG (1)
7030827 Planar antenna and antenna system		75	2004
PURDUE RESEARCH FOUNDATION (1)
2004/0147,034 Method and apparatus for measuring a substance in a biological sample		139	2003
INTEST CORPORATION (1)
5900737 Method and apparatus for automated docking of a test head to a device handler		116	1996
GTE Valeron Corporation (1)
4401945 Apparatus for detecting the position of a probe relative to a workpiece		97	1981
INTEST IP CORPORATION (1)
4705447 Electronic test head positioner for test systems		138	1985
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY (1)
6528993 Magneto-optical microscope magnetometer		80	2000
AMAZON TECHNOLOGIES, INC. (1)
6029141 Internet-based customer referral system		1205	1997
GILLESPIE, ROBB S. (1)
6481939 Tool tip conductivity contact sensor and method		91	2001
NATIONAL METAL REFINING COMPANY (1)
4566184 Process for making a probe for high speed integrated circuits		100	1984
AMAZON.COM, INC. (1)
5960411 Method and system for placing a purchase order via a communications network		1608	1997
MARTIN MARIETTA CORPORATION (1)
5867073 Waveguide to transmission line transition		86	1994
SOCIONEXT INC. (1)
6466046 Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor		27	1999
ELECTRONICS RESEARCH, INC. (1)
2004/0100,276 Method and apparatus for calibration of a vector network analyzer		101	2002
INTELLECTUAL VENTURES I LLC (1)
5633780 Electrostatic discharge protection device		133	1996
ERS ELECTRONIC GMBH (1)
2005/0227,503 Method and device for conditioning semiconductor wafers and/or hybrids		47	2005
BANK OF AMERICA, N.A. (1)
2004/0267,691 System and method to monitor performance of different domains associated with a computer system or network		50	2003
GE CAPITAL EQUITY INVESTMENTS, INC. (1)
6628980 Apparatus, systems, and methods for in vivo magnetic resonance imaging		192	2001
CIRREX SYSTEMS, LLC (1)
6222970 Methods and apparatus for filtering an optical fiber		153	1999
SCHLUMBERGER TECHNOLOGY CORPORATION (1)
4766384 Well logging apparatus for determining dip, azimuth, and invaded zone conductivity		101	1986
The United States of America as represented by the Secretary of the Army (1)
6731804 Thermal luminescence liquid monitoring system and method		81	2000
SYNOPSYS, INC. (1)
5682337 High speed three-state sampling		54	1995
The United States of America as represented by the Secretary of the Air Force (7)
4365109 Coaxial cable design		61	1981
4507602 Measurement of permittivity and permeability of microwave materials		74	1982
4712370 Sliding duct seal		59	1986
4754239 Waveguide to stripline transition assembly		91	1986
5631571 Infrared receiver wafer level probe testing		146	1996
6215295 Photonic field probe and calibration means thereof		115	1998
2003/0170,898 Method for intracellular modifications within living cells using pulsed electric fields		126	2002
STORAGE TECHNOLOGY CORPORATION (1)
5469324 Integrated decoupling capacitive core for a printed circuit board and method of making same		122	1994
LITEL INSTRUMENTS (1)
5094536 Deformable wafer chuck		55	1990
INIZIATIVE MARITTIME 1991, S.R.L. (1)
5245292 Method and apparatus for sensing a fluid handling		75	1992
HITACHI HIGH-TECH SCIENCE CORPORATION (1)
6621082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function		100	2002
Trio-Tech International (2)
6104203 Test apparatus for electronic components		54	1996
6605955 Temperature controlled wafer chuck system with low thermal resistance		106	2000
Signatone Corporation (1)
4845426 Temperature conditioner for tests of unpackaged semiconductors		108	1987
TRUSTEES OF DARTMOUTH COLLEGE (1)
5833601 Methodology for determining oxygen in biological systems		85	1997
ANALOG DEVICES, INC. (1)
5712571 Apparatus and method for detecting defects arising as a result of integrated circuit processing		56	1995
NANOMETRICS INCORPORATED (1)
4818169 Automated wafer inspection system		139	1985
General Dielectric, Inc. (1)
2002/0050,828 Multi-feed microwave reflective resonant sensors		79	2001
DELTA DESIGN, INC. (1)
6549026 Apparatus and method for temperature control of IC device during test		71	2000
Aehr Test Systems (2)
6340895 Wafer-level burn-in and test cartridge		107	1999
6580283 Wafer level burn-in and test methods		88	1999
THE JOHNS HOPKINS UNIVERSITY (1)
6284971 Enhanced safety coaxial cables		155	1999
Ignite Sales, Inc. (1)
6236975 System and method for profiling customers for targeted marketing		529	1998
EUROPAEISCHES LABORATORIUM FUER MOLEKULARBIOLOGIE (EMBL) (1)
6798226 Multiple local probe measuring device and method		93	2002
APPLIED MATERIALS, INC. (7)
5486975 Corrosion resistant electrostatic chuck		68	1994
5916689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect		125	1996
5874361 Method of processing a wafer within a reaction chamber		108	1996
6257564 Vacuum chuck having vacuum-nipples wafer support		108	1998
6232787 Microstructure defect detection		162	1999
6310755 Electrostatic chuck having gas cavity and method		101	1999
6468816 Method for sensing conditions within a substrate processing system		46	2001
KAWASAKI MICROELECTRONICS, INC. (1)
6924656 Method and apparatus for testing BGA-type semiconductor devices		22	2003
EAST GIANT LIMITED (1)
5879289 Hand-held portable endoscopic camera		174	1996
Dimension Polyant Sailcloth, Inc. (1)
6013586 Tent material product and method of making tent material product		91	1997
GYRUS MEDICAL LIMITED (1)
6409724 Electrosurgical instrument		300	2000
TOKYO ELECTRON LIMITED (33)
4884026 Electrical characteristic measuring apparatus		73	1988
5084671 Electric probing-test machine having a cooling system		193	1990
5091692 Probing test device		116	1990
5198752 Electric probing-test machine having a cooling system		156	1991
5315237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit		113	1991
5278494 Wafer probing test machine		103	1992
5321352 Probe apparatus and method of alignment for the same		133	1992
5321453 Probe apparatus for probing an object held above the probe card		103	1992
5325052 Probe apparatus		147	1992
5410259 Probing device setting a probe card parallel		141	1993
5404111 Probe apparatus with a swinging holder for an object of examination		114	1993
5521522 Probe apparatus for testing multiple integrated circuit dies		144	1993
5539676 Method of identifying probe position and probing method in prober		94	1994
5550482 Probe device		104	1994
5777485 Probe method and apparatus with improved probe contact		119	1996
5640101 Probe system and probe method		69	1996
5828225 Semiconductor wafer probing apparatus		73	1996
5910727 Electrical inspecting apparatus with ventilation system		90	1996
5804983 Probe apparatus with tilt correction mechanisms		152	1997
5926028 Probe card having separated upper and lower probe needle groups		38	1997
5999268 Apparatus for aligning a semiconductor wafer with an inspection contactor		119	1997
6060892 Probe card attaching mechanism		99	1997
6037793 Inspecting method and apparatus for semiconductor integrated circuit		73	1998
6124725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer		137	1998
6501289 Inspection stage including a plurality of Z shafts, and inspection apparatus		84	2000
6414478 Transfer mechanism for use in exchange of probe card		80	2000
6739208 Method of delivering target object to be processed, table mechanism of target object and probe apparatus		27	2001
7005842 Probe cartridge assembly and multi-probe assembly		93	2001
7101797 Substrate processing device and processing method		46	2003
6794888 Probe device		76	2003
7026832 Probe mark reading device and probe mark reading method		96	2003
7009415 Probing method and probing apparatus		95	2004
7023226 Probe pins zero-point detecting method, and prober		93	2004
NGK INSULATORS, LTD. (2)
5280156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means		221	1991
6001760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck		117	1997
CARDIFF AND VALE NHS TRUST (1)
2004/0175,294 Apparatus and method for analysing a biological sample in response to microwave radiation		76	2004
J.A. WOOLLAM CO., INC. (1)
6937341 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation		86	2002
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
6902941 Probing of device elements		100	2003
TRANSPACIFIC IP LTD. (1)
5942907 Method and apparatus for testing dies		51	1997
APEX MICROTECHNOLOGY, INC. (1)
4871965 Environmental testing facility for electronic components		66	1988
HITACHI, LTD. (2)
4383178 System for driving rotary member in vacuum		87	1981
2005/0186,696 Gas flowmeter and manufacturing method thereof		0	2005
DCG SYSTEMS, INC. (2)
5530372 Method of probing a net of an IC at an optimal probe-point		119	1994
5675499 Optimal probe point placement		111	1996
Sirotech Ltd. (1)
5824494 Method for enumerating bacterial populations		98	1995
GATAN, INC. (1)
6914244 Ion beam milling system and method for electron microscopy specimen preparation		90	2004
TRUSTEES OF THE THOMAS A.O. GROSS 1988 REVOCABLE TRUST, C/O JUDITH C.F. GROSS (1)
5218185 Elimination of potentially harmful electrical and magnetic fields from electric blankets and other electrical appliances		81	1989
SKYWORKS SOLUTIONS, INC. (2)
6582979 Structure and method for fabrication of a leadless chip carrier with embedded antenna		93	2001
6770955 Shielded antenna in a semiconductor package		104	2001
APPLE INC. (1)
5617035 Method for testing integrated devices		110	1995
GOOGLE TECHNOLOGY HOLDINGS LLC (1)
5751252 Method and antenna for providing an omnidirectional pattern		97	1997
The United States of America as represented by the United States Department of Energy (4)
4896109 Photoconductive circuit element reflectometer		65	1987
5523694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration		122	1994
6307672 Microscope collision protection apparatus		82	1996
6407560 Thermally-induced voltage alteration for analysis of microelectromechanical devices		89	2000
BOARD OF REGENTS OF THE UNIVERSITY OF WISCONSIN SYSTEM, THE, AN INSTITUTE OF WI (1)
5233306 Method and apparatus for measuring the permittivity of materials		130	1991
KABUSHIKI KAISHA TOSHIBA (1)
7032307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus		93	2004
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4684883 Method of manufacturing high-quality semiconductor light-emitting devices		97	1985
AT&T Information Systems Inc. (1)
4978907 Apparatus and method for expanding the frequency range over which electrical signal amplitudes can be accurately measured		53	1989
TENCOR INSTRUMENTS (2)
4755746 Apparatus and methods for semiconductor wafer testing		156	1985
5852232 Acoustic sensor as proximity detector		144	1997
RAYTHEON COMPANY (4)
4346355 Radio frequency energy launcher		95	1980
5600256 Cast elastomer/membrane test probe assembly		78	1995
5731708 Unpackaged semiconductor testing using an improved probe and precision X-Y table		58	1995
6211837 Dual-window high-power conical horn antenna		105	1999
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* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info	(Count)	# Cites	Year
Other [Check patent profile for assignment information] (1)
* 2009/0302,234 Method and Apparatus for Observing Inside Structures, and Specimen Holder		4	2008
FormFactor, Inc. (2)
* 8130005 Electrical guard structures for protecting a signal trace from electrical interference		0	2006
* 2008/0143,358 ELECTRICAL GUARD STRUCTURES FOR PROTECTING A SIGNAL TRACE FROM ELECTRICAL INTERFERENCE		43	2006
MAUI IMAGING, INC. (1)
* 2010/0262,013 Universal Multiple Aperture Medical Ultrasound Probe		22	2010
SIGNATURE CONTROL SYSTEMS, INC. (1)
* 8104190 Wood kiln moisture measurement calibration and metering methods		2	2010
HITACHI, LTD. (1)
* 8134131 Method and apparatus for observing inside structures, and specimen holder		7	2008
CASCADE MICROTECH, INC. (2)
7969173 Chuck for holding a device under test		2	2007
8319503 Test apparatus for measuring a characteristic of a device under test		2	2009

* Cited By Examiner

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Sep 3, 2020

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 03, 2009	US,7498828,B2   US7498828B2	GRANTED PATENT AS SECOND PUBLICATION
October 25, 2007	US,20070247178,A1   US20070247178A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7498828

Probe station with low inductance path

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