Probe station with low inductance path
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 3, 2009
Grant Date -
Oct 25, 2007
app pub date -
Jun 20, 2007
filing date -
Nov 25, 2002
priority date (Note) -
In Force
status (Latency Note)
![]() |
A preliminary load of PAIR data current through [] has been loaded. Any more recent PAIR data will be loaded within twenty-four hours. |
PAIR data current through []
A preliminary load of cached data will be loaded soon.
Any more recent PAIR data will be loaded within twenty-four hours.
![]() |
Next PAIR Update Scheduled on [ ] |

Importance

US Family Size
|
Non-US Coverage
|
Patent Longevity
|
Forward Citations
|
Abstract
A probe assembly suitable for high-current measurements of an electrical device.

First Claim
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | Total Patents |
---|---|---|
CASCADE MICROTECH, INC. | BEAVERTON, OR | 142 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Cowan, Clarence E | Newberg, US | 28 | 530 |
Dunklee, John | Tigard, US | 36 | 502 |
Cited Art Landscape
Patent Info | (Count) | # Cites | Year |
---|---|---|---|
|
|||
4284682 Heat sealable, flame and abrasion resistant coated fabric | 128 | 1980 | |
4383217 Collinear four-point probe head and mount for resistivity measurements | 88 | 1981 | |
4480223 Unitary probe assembly | 138 | 1981 | |
4641659 Medical diagnostic microwave scanning apparatus | 114 | 1982 | |
4515133 Fuel economizing device | 77 | 1984 | |
4812754 Circuit board interfacing apparatus | 118 | 1987 | |
4711563 Portable collapsible darkroom | 90 | 1987 | |
4731577 Coaxial probe card | 122 | 1987 | |
4791363 Ceramic microstrip probe blade | 137 | 1987 | |
5363050 Quantitative dielectric imaging system | 121 | 1990 | |
5371457 Method and apparatus to test for current in an integrated circuit | 99 | 1991 | |
5209088 Changeable code lock | 66 | 1991 | |
5414565 Tilting kinematic mount | 85 | 1991 | |
5187443 Microwave test fixtures for determining the dielectric properties of a material | 80 | 1992 | |
5220277 Arrangement for testing semiconductor wafers or the like | 103 | 1992 | |
5584608 Anchored cable sling system | 87 | 1994 | |
5670322 Multi site molecule detection method | 183 | 1995 | |
5670888 Method for transporting and testing wafers | 128 | 1995 | |
5744971 Device and apparatus for measuring dielectric properties of materials | 99 | 1995 | |
5831442 Handling device | 96 | 1996 | |
5675932 Plant growing system | 94 | 1996 | |
5949579 Flexible darkness adapting viewer | 89 | 1997 | |
6147851 Method for guarding electrical regions having potential gradients | 92 | 1999 | |
6327034 Apparatus for aligning two objects | 94 | 1999 | |
6548311 Device and method for detecting analytes | 153 | 2000 | |
2001/0002,794 Split resistor probe and method | 79 | 2001 | |
2002/0066,551 Workpiece chuck | 27 | 2001 | |
6587327 Integrated broadband ceramic capacitor array | 118 | 2002 | |
2003/0139,662 Method and apparatus for detecting, identifying and performing operations on microstructures including, anthrax spores, brain cells, cancer cells, living tissue cells, and macro-objects including stereotactic neurosurgery instruments, weapons and explosives | 85 | 2002 | |
7015707 Micro probe | 121 | 2003 | |
2004/0193,382 Method and apparatus for calibrating a multiport test system for measurement of a DUT | 101 | 2004 | |
2006/0114,012 Method and apparatus for testing semiconductor wafers by means of a probe card | 48 | 2005 | |
|
|||
5659421 Slide positioning and holding device | 111 | 1995 | |
|
|||
4691163 Dual frequency surface probes | 116 | 1985 | |
|
|||
5097207 Temperature stable cryogenic probe station | 107 | 1989 | |
5077523 Cryogenic probe station having movable chuck accomodating variable thickness probe cards | 103 | 1990 | |
5160883 Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support | 96 | 1990 | |
5166606 High efficiency cryogenic test station | 95 | 1990 | |
|
|||
4531474 Rotary board treating apparatus | 89 | 1984 | |
4746857 Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer | 96 | 1986 | |
5233291 Method of and apparatus for measuring electric characteristics of semiconductor wafer | 40 | 1991 | |
|
|||
6549022 Apparatus and method for analyzing functional failures in integrated circuits | 132 | 2000 | |
|
|||
6512482 Method and apparatus using a semiconductor die integrated antenna structure | 94 | 2001 | |
|
|||
5227730 Microwave needle dielectric sensors | 115 | 1992 | |
|
|||
4642417 Concentric three-conductor cable | 115 | 1985 | |
|
|||
6639461 Ultra-wideband power amplifier module apparatus and method for optical and electronic communications | 84 | 2001 | |
|
|||
5198756 Test fixture wiring integrity verification device | 173 | 1991 | |
|
|||
4772846 Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy | 141 | 1986 | |
5583445 Opto-electronic membrane probe | 105 | 1994 | |
|
|||
2004/0066,181 High-frequency probe tip | 82 | 2003 | |
|
|||
2005/0026,276 Remote detection and analysis of chemical and biological aerosols | 80 | 2003 | |
|
|||
7088981 Apparatus for reducing flicker noise in a mixer circuit | 114 | 2001 | |
|
|||
4853613 Calibration method for apparatus evaluating microwave/millimeter wave circuits | 67 | 1987 | |
|
|||
5369370 Method and apparatus for the measurement of the corrosion potential between a coated metal surface and a reference electrode | 70 | 1992 | |
|
|||
2001/0044,152 Dual beam, pulse propagation analyzer, medical profiler interferometer | 73 | 2001 | |
|
|||
5202558 Flexible fiber optic probe for high-pressure shock experiments | 103 | 1992 | |
|
|||
5376790 Scanning probe microscope | 118 | 1992 | |
5672816 Large stage system for scanning probe microscopes and other instruments | 119 | 1995 | |
|
|||
5479109 Testing device for integrated circuits on wafer | 118 | 1994 | |
|
|||
4856904 Wafer inspecting apparatus | 115 | 1988 | |
6628503 Gas cooled electrostatic pin chuck for vacuum applications | 111 | 2001 | |
|
|||
6812718 Massively parallel interface for electronic circuits | 113 | 2001 | |
|
|||
4795962 Floating driver circuit and a device for measuring impedances of electrical components | 95 | 1987 | |
|
|||
4839587 Test fixture for tab circuits and devices | 156 | 1988 | |
5198753 Integrated circuit test fixture and method | 131 | 1990 | |
5198758 Method and apparatus for complete functional testing of a complex signal path of a semiconductor chip | 72 | 1991 | |
|
|||
6476442 Pseudo-Schottky diode | 103 | 1998 | |
|
|||
6794950 Waveguide to microstrip transition | 89 | 2001 | |
|
|||
5512835 Electrical probe and method for measuring gaps and other discontinuities in enclosures using electrical inductance for RF shielding assessment | 75 | 1992 | |
5412866 Method of making a cast elastomer/membrane test probe assembly | 123 | 1993 | |
|
|||
5105148 Replaceable tip test probe | 58 | 1991 | |
|
|||
7030599 Hand held voltage detection probe | 102 | 2004 | |
|
|||
5861743 Hybrid scanner for use in an improved MDA tester | 49 | 1995 | |
|
|||
2001/0043,073 PROBER INTERFACE PLATE | 74 | 1999 | |
|
|||
4528504 Pulsed linear integrated circuit tester | 98 | 1982 | |
|
|||
6236223 Method and apparatus for wireless radio frequency testing of RFID integrated circuits | 222 | 1999 | |
|
|||
4888550 Intelligent multiprobe tip | 92 | 1983 | |
5103169 Relayless interconnections in high performance signal paths | 55 | 1989 | |
5070297 Full wafer integrated circuit testing device | 297 | 1990 | |
5159752 Scanning electron microscope based parametric testing method and apparatus | 119 | 1990 | |
5225037 Method for fabrication of probe card for testing of semiconductor devices | 216 | 1991 | |
5511010 Method and apparatus of eliminating interference in an undersettled electrical signal | 93 | 1994 | |
6292760 Method and apparatus to measure non-coherent signals | 93 | 1998 | |
7026833 Multiple-chip probe and universal tester contact assemblage | 102 | 2005 | |
|
|||
4479690 Underwater splice for submarine coaxial cable | 61 | 1982 | |
5091732 Lightweight deployable antenna system | 89 | 1990 | |
|
|||
4713347 Measurement of ligand/anti-ligand interactions using bulk conductance | 221 | 1985 | |
|
|||
6420722 Method for sample separation and lift-out with one cut | 127 | 2001 | |
|
|||
4739259 Telescoping pin probe | 100 | 1986 | |
4758785 Pressure control apparatus for use in an integrated circuit testing station | 119 | 1986 | |
4673839 Piezoelectric pressure sensing apparatus for integrated circuit testing stations | 125 | 1986 | |
4783625 Wideband high impedance card mountable probe | 95 | 1988 | |
4838802 Low inductance ground lead | 49 | 1988 | |
4923407 Adjustable low inductance probe | 76 | 1989 | |
5136237 Double insulated floating high voltage test probe | 108 | 1991 | |
5225796 Coplanar transmission structure having spurious mode suppression | 61 | 1992 | |
5412330 Optical module for an optically based measurement system | 95 | 1993 | |
6447339 Adapter for a multi-channel signal probe | 87 | 2001 | |
6701265 Calibration for vector network analyzer | 94 | 2002 | |
|
|||
4978914 Laminated board for testing electronic components | 64 | 1990 | |
|
|||
5461328 Fixture for burn-in testing of semiconductor wafers | 94 | 1993 | |
5838161 Semiconductor interconnect having test structures for evaluating electrical characteristics of the interconnect | 94 | 1996 | |
6060891 Probe card for semiconductor wafers and method and system for testing wafers | 153 | 1997 | |
6181144 Semiconductor probe card having resistance measuring circuitry and method fabrication | 182 | 1998 | |
6194720 Preparation of transmission electron microscope samples | 111 | 1998 | |
6229322 Electronic device workpiece processing apparatus and method of communicating signals within an electronic device workpiece processing apparatus | 34 | 1998 | |
6774651 Method for aligning and connecting semiconductor components to substrates | 73 | 2000 | |
6359456 Probe card and test system for semiconductor wafers | 115 | 2001 | |
7026835 Engagement probe having a grouping of projecting apexes for engaging a conductive pad | 93 | 2002 | |
7009188 Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same | 97 | 2004 | |
|
|||
4780670 Active probe card for high resolution/low noise wafer level testing | 135 | 1985 | |
|
|||
7015455 Near-field optical probe | 93 | 2005 | |
|
|||
4922186 Voltage detector | 82 | 1988 | |
5552716 Method of positioning an electrooptic probe of an apparatus for the measurement of voltage | 51 | 1994 | |
|
|||
2001/0054,906 Probe card and a method of manufacturing the same | 78 | 2001 | |
|
|||
4893914 Test station | 113 | 1988 | |
5892539 Portable emission microscope workstation for failure analysis | 127 | 1995 | |
6198299 High Resolution analytical probe station | 86 | 1998 | |
6424141 Wafer probe station | 64 | 2000 | |
6744268 High resolution analytical probe station | 126 | 2002 | |
|
|||
7019701 Antenna device mounted on vehicle | 88 | 2004 | |
6900647 Contact probe and probe device | 105 | 2004 | |
6903563 Contact probe and probe device | 100 | 2004 | |
7015710 Contact probe and probe device | 97 | 2004 | |
|
|||
5408189 Test fixture alignment system for printed circuit boards | 149 | 1992 | |
6181149 Grid array package test contactor | 107 | 1996 | |
6064218 Peripherally leaded package test contactor | 106 | 1997 | |
|
|||
5478748 Protein assay using microwave energy | 89 | 1994 | |
|
|||
4468629 NPN Operational amplifier | 80 | 1982 | |
|
|||
4856426 Sheet-fed rotary printing machine with printing units arranged in tandem | 55 | 1985 | |
|
|||
4777434 Microelectronic burn-in system | 92 | 1987 | |
|
|||
6376258 Resonant bio-assay device and test system for detecting molecular binding events | 140 | 2000 | |
6340568 Method for detecting and classifying nucleic acid hybridization | 87 | 2001 | |
6566079 Methods for analyzing protein binding events | 107 | 2001 | |
2003/0032,000 Method for analyzing cellular events | 95 | 2001 | |
2002/0168,659 System and method for characterizing the permittivity of molecular events | 75 | 2002 | |
|
|||
5793213 Method and apparatus for calibrating a network analyzer | 94 | 1996 | |
5751252 Method and antenna for providing an omnidirectional pattern | 97 | 1997 | |
|
|||
5883523 Coherent switching power for an analog circuit tester | 105 | 1997 | |
|
|||
6222031 Process for preparing water-soluble tricarboxypolysaccharide | 83 | 1998 | |
|
|||
5089774 Apparatus and a method for checking a semiconductor | 129 | 1990 | |
5374938 Waveguide to microstrip conversion means in a satellite broadcasting adaptor | 95 | 1993 | |
|
|||
6002236 Lockable storage cradle for battery-operated electronic device | 55 | 1998 | |
|
|||
2004/0021,475 Wafer prober | 82 | 2003 | |
2004/0134,899 Ceramic substrate for a semiconductor-production/inspection device | 80 | 2003 | |
2004/0207,072 Ceramic substrate for a semiconductor producing/examining device | 85 | 2004 | |
|
|||
2004/0186,382 Spectral volume microprobe arrays | 84 | 2003 | |
|
|||
5996102 Assembly and method for testing integrated circuit devices | 92 | 1997 | |
|
|||
4982153 Method and apparatus for cooling an integrated circuit chip during testing | 63 | 1989 | |
|
|||
4695794 Voltage calibration in E-beam probe using optical flooding | 62 | 1985 | |
4730158 Electron-beam probing of photodiodes | 86 | 1986 | |
|
|||
6002426 Inverted alignment station and method for calibrating needles of probe card for probe testing of integrated circuits | 114 | 1997 | |
|
|||
6727716 Probe card and probe needle for high frequency testing | 97 | 2002 | |
|
|||
4414638 Sampling network analyzer with stored correction of gain errors | 74 | 1981 | |
|
|||
7003184 Fiber optic probes | 110 | 2001 | |
|
|||
6636182 Structural antenna for flight aggregates or aircraft | 74 | 2001 | |
|
|||
6194907 Prober and electric evaluation method of semiconductor device | 61 | 1999 | |
|
|||
5233197 High speed digital imaging microscope | 114 | 1991 | |
|
|||
6753679 Test point monitor using embedded passive resistance | 84 | 2002 | |
|
|||
6809533 Quantitative imaging of dielectric permittivity and tunability | 79 | 2002 | |
|
|||
4727637 Computer aided connector assembly method and apparatus | 114 | 1987 | |
|
|||
4425395 Base fabrics for polyurethane-coated fabrics, polyurethane-coated fabrics and processes for their production | 105 | 1982 | |
|
|||
4626618 DC electric power cable | 99 | 1985 | |
|
|||
2002/0070,745 Cooling system for burn-in unit | 85 | 2000 | |
|
|||
5397855 Low noise cable | 95 | 1993 | |
|
|||
5066357 Method for making flexible circuit card with laser-contoured vias and machined capacitors | 108 | 1990 | |
|
|||
4588970 Three section termination for an R.F. triaxial directional bridge | 52 | 1984 | |
4703433 Vector network analyzer with integral processor | 113 | 1984 | |
4816767 Vector network analyzer with integral processor | 106 | 1986 | |
4771234 Vacuum actuated test fixture | 105 | 1986 | |
4918383 Membrane probe with automatic contact scrub action | 159 | 1988 | |
4906920 Self-leveling membrane probe | 207 | 1988 | |
5172051 Wide bandwidth passive probe | 111 | 1991 | |
5298972 Method and apparatus for measuring polarization sensitivity of optical devices | 111 | 1991 | |
5274336 Capacitively-coupled test probe | 141 | 1992 | |
5680039 Probe apparatus for use in both high and low frequency measurements | 48 | 1995 | |
5578932 Method and apparatus for providing and calibrating a multiport network analyzer | 148 | 1995 | |
5945836 Loaded-board, guided-probe test fixture | 133 | 1996 | |
5923177 Portable wedge probe for perusing signals on the pins of an IC | 49 | 1997 | |
5903143 Probe apparatus with RC circuit connected between ground and a guard | 95 | 1997 | |
6060888 Error correction method for reflection measurements of reciprocal devices in vector network analyzers | 113 | 1998 | |
6251595 Methods and devices for carrying out chemical reactions | 129 | 1998 | |
6175228 Electronic probe for measuring high impedance tri-state logic circuits | 84 | 1998 | |
6271673 Probe for measuring signals | 105 | 1999 | |
6407562 Probe tip terminating device providing an easily changeable feed-through termination | 95 | 1999 | |
2001/0024,116 Electronic probe for measuring high impedance tri-state logic circuits | 80 | 2001 | |
6643597 Calibrating a test system using unknown standards | 119 | 2001 | |
6717426 Blade-like connecting needle | 79 | 2002 | |
6768328 Single point probe structure and method | 77 | 2002 | |
6873167 Connection box, system, and method for evaluating a DUT board | 52 | 2002 | |
6864694 Voltage probe | 91 | 2002 | |
2005/0030,047 Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration | 87 | 2003 | |
7025628 Electronic probe extender | 117 | 2003 | |
2004/0162,689 Multiport network analyzer calibration employing reciprocity of a device | 95 | 2004 | |
7005868 Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe | 94 | 2004 | |
7026834 Multiple two axis floating probe block assembly using split probe block | 93 | 2005 | |
|
|||
6278411 Horn antenna | 80 | 1999 | |
|
|||
6211663 Baseband time-domain waveform measurement method | 119 | 1999 | |
6396298 Active feedback pulsed measurement method | 96 | 2000 | |
|
|||
4621169 Electric cable construction and uses therefor | 100 | 1985 | |
|
|||
5041782 Microstrip probe | 96 | 1989 | |
|
|||
4552033 Drive system for a microscope stage or the like | 110 | 1984 | |
|
|||
5505150 Method and apparatus for facilitating loop take time adjustment in multi-needle quilting machine | 87 | 1994 | |
|
|||
6653903 Supply voltage decoupling device for HF amplifier circuits | 73 | 2001 | |
|
|||
4884206 Process and processing circuit for the analog output signal of a sensor | 55 | 1988 | |
|
|||
4694245 Vacuum-actuated top access test probe fixture | 75 | 1984 | |
|
|||
5646538 Method and apparatus for fastener hole inspection with a capacitive probe | 53 | 1995 | |
|
|||
6127831 Method of testing a semiconductor device by automatically measuring probe tip parameters | 107 | 1997 | |
|
|||
6633174 Stepper type test structures and methods for inspection of semiconductor integrated circuits | 155 | 2000 | |
6771806 Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices | 199 | 2000 | |
|
|||
4691831 IC test equipment | 53 | 1985 | |
|
|||
4933634 Device and method to measure a short radiation pulse or an electric pulse | 66 | 1989 | |
|
|||
5422574 Large scale protrusion membrane for semiconductor devices under test with very high pin counts | 183 | 1993 | |
6037785 Probe card apparatus | 109 | 1996 | |
|
|||
6172337 System and method for thermal processing of a semiconductor substrate | 105 | 1999 | |
|
|||
5164661 Thermal control system for a semi-conductor burn-in | 95 | 1991 | |
|
|||
6100815 Compound switching matrix for probing and interconnecting devices under test to measurement equipment | 122 | 1997 | |
|
|||
6515494 Silicon wafer probe station using back-side imaging | 44 | 2000 | |
|
|||
5006796 Temperature control instrument for electronic components under test | 88 | 1988 | |
|
|||
7002364 Semiconductor device for reducing the number of probing pad used during wafer test and method for testing the same | 97 | 2003 | |
|
|||
5451884 Electronic component temperature test system with flat ring revolving carriage | 103 | 1993 | |
|
|||
4503335 Semiconductor printing apparatus with multiple independent temperature control | 116 | 1982 | |
4755747 Wafer prober and a probe card to be used therewith | 109 | 1985 | |
4786867 Wafer prober | 108 | 1987 | |
4864227 Wafer prober | 132 | 1988 | |
4929893 Wafer prober | 161 | 1988 | |
5304924 Edge detector | 99 | 1992 | |
5731920 Converting adapter for interchangeable lens assembly | 95 | 1995 | |
5685232 Positioning stage device exposure apparatus and device manufacturing method utilizing the same | 116 | 1996 | |
|
|||
4926118 Test station | 120 | 1988 | |
|
|||
5479108 Method and apparatus for handling wafers | 158 | 1992 | |
|
|||
5214243 High-temperature, low-noise coaxial cable assembly with high strength reinforcement braid | 130 | 1991 | |
|
|||
5065089 Circuit handler with sectioned rail | 56 | 1990 | |
|
|||
5970429 Method and apparatus for measuring electrical noise in devices | 134 | 1997 | |
6245692 Method to selectively heat semiconductor wafers | 91 | 1999 | |
|
|||
7001785 Capacitance probe for thin dielectric film characterization | 100 | 2004 | |
|
|||
4725793 Waveguide-microstrip line converter | 89 | 1986 | |
|
|||
5481196 Process and apparatus for microwave diagnostics and therapy | 85 | 1994 | |
|
|||
4680538 Millimeter wave vector network analyzer | 74 | 1985 | |
|
|||
5481936 Rotary drive positioning system for an indexing table | 115 | 1994 | |
|
|||
6822463 Active differential test probe with a transmission line input structure | 77 | 2002 | |
7019544 Transmission line input structure test probe | 97 | 2004 | |
|
|||
6265950 Transition from a waveguide to a strip transmission line | 95 | 1999 | |
|
|||
6054869 Bi-level test fixture for testing printed circuit boards | 97 | 1998 | |
|
|||
6838885 Method of correcting measurement error and electronic component characteristic measurement apparatus | 101 | 2003 | |
|
|||
4453142 Microstrip to waveguide transition | 113 | 1981 | |
4646005 Signal probe | 100 | 1984 | |
5748506 Calibration technique for a network analyzer | 96 | 1996 | |
|
|||
4675600 Testing apparatus for plated through-holes on printed circuit boards, and probe therefor | 65 | 1984 | |
|
|||
5142224 Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals | 106 | 1991 | |
|
|||
4376920 Shielded radio frequency transmission cable | 143 | 1981 | |
|
|||
5944093 Pickup chuck with an integral heat pipe | 104 | 1997 | |
7020363 Optical probe for wafer testing | 101 | 2001 | |
6856129 Current probe device having an integrated amplifier | 92 | 2002 | |
2006/0052,075 Testing integrated circuits using high bandwidth wireless technology | 78 | 2004 | |
|
|||
5715819 Microwave tomographic spectroscopy system and method | 175 | 1994 | |
|
|||
4431967 Method of mounting a semiconductor element for analyzing failures thereon | 29 | 1980 | |
5010296 Wafer prober | 62 | 1990 | |
5408188 High frequency wafer probe including open end waveguide | 77 | 1992 | |
5493236 Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis | 193 | 1994 | |
6144212 Vertical needle type probe card, method of manufacturing thereof, method of replacing defective probe needle and test method of wafer using the probe card | 112 | 1998 | |
6242929 Probe needle for vertical needle type probe card and fabrication thereof | 90 | 1998 | |
6404213 Probe stylus | 85 | 1999 | |
|
|||
6480013 Method for the calibration of an RF integrated circuit probe | 101 | 2000 | |
|
|||
6395480 Computer program and database structure for detecting molecular binding events | 114 | 1999 | |
|
|||
4904933 Integrated circuit probe station | 114 | 1986 | |
|
|||
5373231 Integrated circuit probing apparatus including a capacitor bypass structure | 129 | 1993 | |
6603322 Probe card for high speed testing | 106 | 1996 | |
6118287 Probe tip structure | 104 | 1997 | |
|
|||
6657601 Metrology antenna system utilizing two-port, sleeve dipole and non-radiating balancing network | 78 | 2001 | |
|
|||
5565881 Balun apparatus including impedance transformer having transformation length | 84 | 1994 | |
5628057 Multi-port radio frequency signal transformation network | 100 | 1996 | |
|
|||
6707548 Systems and methods for filter based spectrographic analysis | 113 | 2001 | |
|
|||
6233613 High impedance probe for monitoring fast ethernet LAN links | 98 | 1997 | |
7002133 Detecting one or more photons from their interactions with probe photons in a matter system | 93 | 2003 | |
|
|||
5528158 Probe card changer system and method | 105 | 1994 | |
5506498 Probe card system and method | 98 | 1995 | |
6166553 Prober-tester electrical interface for semiconductor test | 100 | 1998 | |
|
|||
6418009 Broadband multi-layer capacitor | 88 | 2000 | |
|
|||
5510792 Anechoic chamber and wave absorber | 95 | 1994 | |
7012425 Eddy-current probe | 95 | 2005 | |
|
|||
4742571 Coupling device between a metal wave guide, a dielectric wave guide and a semiconductor component and a mixer using this coupling device | 88 | 1986 | |
|
|||
5034688 Temperature conditioning support for small objects such as semi-conductor components and thermal regulation process using said support | 147 | 1989 | |
|
|||
6049216 Contact type prober automatic alignment | 94 | 1997 | |
7012441 High conducting thin-film nanoprobe card and its fabrication method | 106 | 2003 | |
|
|||
4557599 Calibration and alignment target plate | 85 | 1984 | |
|
|||
6121783 Method and apparatus for establishing electrical contact between a wafer and a chuck | 95 | 1997 | |
6104206 Product wafer junction leakage measurement using corona and a kelvin probe | 129 | 1997 | |
|
|||
5653939 Optical and electrical methods and apparatus for molecule detection | 488 | 1995 | |
5998768 Active thermal control of surfaces by steering heating beam in response to sensed thermal radiation | 110 | 1998 | |
|
|||
6310483 Longitudinal type high frequency probe for narrow pitched electrodes | 103 | 1998 | |
6281691 Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable | 103 | 1999 | |
6400168 Method for fabricating probe tip portion composed by coaxial cable | 104 | 2001 | |
|
|||
6091236 System and method for measuring and analyzing electrical signals on the shaft of a machine | 97 | 1997 | |
|
|||
4575676 Method and apparatus for radiation testing of electron devices | 76 | 1983 | |
|
|||
6064217 Fine pitch contact device employing a compliant conductive polymer bump | 134 | 1996 | |
2002/0011,859 METHOD FOR FORMING CONDUCTIVE BUMPS FOR THE PURPOSE OF CONTRRUCTING A FINE PITCH TEST DEVICE | 114 | 1998 | |
|
|||
2003/0072,549 Method and apparatus for dielectric spectroscopy of biological solutions | 121 | 2002 | |
|
|||
5571324 Rotary-cup coating apparatus | 104 | 1994 | |
|
|||
6753699 Integrated circuit and method of controlling output impedance | 81 | 2002 | |
|
|||
5232789 Structural component with a protective coating having a nickel or cobalt basis and method for making such a coating | 92 | 1992 | |
|
|||
5475316 Transportable image emission microscope | 141 | 1993 | |
|
|||
5172049 IC test equipment | 135 | 1991 | |
5644248 Test head cooling system | 85 | 1995 | |
5767690 Test head cooling system | 93 | 1997 | |
5952842 Test head cooling system | 59 | 1997 | |
6191596 Method for detecting a contact position between an object to be measured and measuring pins | 81 | 1998 | |
6257319 IC testing apparatus | 68 | 1999 | |
2002/0011,863 IC chip tester with heating element for preventing condensation | 89 | 2001 | |
7020360 Wavelength dispersion probing system | 94 | 2002 | |
|
|||
5517111 Automatic testing system for magnetoresistive heads | 65 | 1995 | |
5668470 Automatic testing system for magnetoresistive heads | 58 | 1996 | |
|
|||
6320396 Parasitic MIM structural spot analysis method for semiconductor device and parasitic MIM structure spot analysis method for silicon semiconductor device | 100 | 1997 | |
|
|||
5572398 Tri-polar electrostatic chuck | 81 | 1994 | |
|
|||
5807107 Dental infection control system | 94 | 1996 | |
|
|||
2002/0070,743 Testing head having vertical probes | 96 | 2001 | |
|
|||
4532423 IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested | 106 | 1983 | |
|
|||
5905421 Apparatus for measuring and/or injecting high frequency signals in integrated systems | 80 | 1997 | |
6169410 Wafer probe with built in RF frequency conversion module | 85 | 1998 | |
6529844 Vector network measurement system | 118 | 1999 | |
|
|||
5676360 Machine tool rotary table locking apparatus | 118 | 1995 | |
|
|||
4588950 Test system for VLSI digital circuit and method of testing | 98 | 1983 | |
|
|||
5164319 Multiple chemically modulated capacitance determination | 332 | 1989 | |
|
|||
5508631 Semiconductor test chip with on wafer switching matrix | 56 | 1994 | |
|
|||
6232790 Method and apparatus for amplifying electrical test signals from a micromechanical device | 67 | 1999 | |
|
|||
5303938 Kelvin chuck apparatus and method of manufacture | 61 | 1993 | |
|
|||
4342958 Automatic test equipment test probe contact isolation detection method | 72 | 1980 | |
|
|||
7188037 Method and apparatus for testing circuit boards | 92 | 2004 | |
|
|||
6147502 Method and apparatus for measuring butterfat and protein content using microwave absorption techniques | 81 | 1998 | |
|
|||
6275738 Microwave devices for medical hyperthermia, thermotherapy and diagnosis | 153 | 1999 | |
|
|||
4918279 EDM cutting machine including device for preventing transmission of sealing plate movement to guide head arm | 60 | 1988 | |
|
|||
5835997 Wafer shielding chamber for probe station | 60 | 1995 | |
|
|||
6384614 Single tip Kelvin probe | 103 | 2000 | |
|
|||
4567321 Flexible flat cable | 104 | 1984 | |
|
|||
5594358 Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line | 98 | 1994 | |
5794133 Microwave mixing circuit | 84 | 1996 | |
6806836 Helical antenna apparatus provided with two helical antenna elements, and radio communication apparatus provided with same helical antenna apparatus | 76 | 2003 | |
|
|||
5657394 Integrated circuit probe card inspection system | 94 | 1993 | |
6118894 Integrated circuit probe card inspection system | 120 | 1997 | |
|
|||
5569591 Analytical or monitoring apparatus and method | 161 | 1994 | |
|
|||
6900652 Flexible membrane probe and method of use thereof | 106 | 2003 | |
7023231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof | 94 | 2004 | |
|
|||
5792668 Radio frequency spectral analysis for in-vitro or in-vivo environments | 221 | 1996 | |
|
|||
5611946 Multi-wavelength laser system, probe station and laser cutter system using the same | 94 | 1994 | |
5811751 Multi-wavelength laser system, probe station and laser cutter system using the same | 141 | 1997 | |
6573702 Method and apparatus for cleaning electronic test contacts | 104 | 1997 | |
5963364 Multi-wavelength variable attenuator and half wave plate | 120 | 1997 | |
|
|||
5669316 Turntable for rotating a wafer carrier | 101 | 1993 | |
6362792 Antenna apparatus and portable radio set | 81 | 2000 | |
6366247 Antenna device and portable radio set | 85 | 2000 | |
|
|||
4916398 Efficient remote transmission line probe tuning for NMR apparatus | 95 | 1988 | |
|
|||
5959461 Probe station adapter for backside emission inspection | 123 | 1997 | |
* 6031383 Probe station for low current, low voltage parametric measurements using multiple probes | 110 | 1998 | |
6124723 Probe holder for low voltage, low current measurements in a water probe station | 86 | 1998 | |
|
|||
5974662 Method of planarizing tips of probe elements of a probe card assembly | 379 | 1995 | |
6064213 Wafer-level burn-in and test | 267 | 1997 | |
7002363 Method and system for compensating thermally induced motion of probe cards | 123 | 2001 | |
|
|||
6970001 Variable impedance test probe | 74 | 2003 | |
6900653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof | 106 | 2003 | |
|
|||
6043668 Planarity verification system for integrated circuit test probes | 54 | 1997 | |
6137303 Integrated testing method and apparatus for semiconductor test operations processing | 131 | 1998 | |
6259261 Method and apparatus for electrically testing semiconductor devices fabricated on a wafer | 68 | 1999 | |
2007/0024,506 Systems and methods for high frequency parallel transmissions | 79 | 2006 | |
|
|||
2003/0088,180 Space-time microwave imaging for cancer detection | 120 | 2002 | |
|
|||
4891584 Apparatus for making surface photovoltage measurements of a semiconductor | 138 | 1988 | |
5091691 Apparatus for making surface photovoltage measurements of a semiconductor | 81 | 1988 | |
|
|||
2003/0119,057 Forming and modifying dielectrically-engineered microparticles | 137 | 2001 | |
|
|||
5448172 Triboelectric instrument with DC drift compensation | 41 | 1993 | |
|
|||
5491426 Adaptable wafer probe assembly for testing ICs with different power/ground bond pad configurations | 79 | 1994 | |
|
|||
4567908 Discharge system and method of operating same | 50 | 1984 | |
|
|||
6028435 Semiconductor device evaluation system using optical fiber | 108 | 1997 | |
6160407 Inspection method and wiring current observation method for semiconductor device and apparatus of the same | 98 | 1998 | |
6686753 Prober and apparatus for semiconductor chip analysis | 55 | 2000 | |
6900646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof | 97 | 2002 | |
|
|||
6490471 Electromagnetical imaging and therapeutic (EMIT) systems | 98 | 2001 | |
|
|||
5888075 Auxiliary apparatus for testing device | 78 | 1997 | |
6019612 Electrical connecting apparatus for electrically connecting a device to be tested | 87 | 1998 | |
|
|||
5857667 Vacuum chuck | 70 | 1996 | |
|
|||
4357575 Apparatus for use in testing printed circuit process boards having means for positioning such boards in proper juxtaposition with electrical contacting assemblies | 116 | 1980 | |
|
|||
2005/0168,722 Device and method for measuring constituents in blood | 47 | 2003 | |
|
|||
6181416 Schlieren method for imaging semiconductor device properties | 84 | 1999 | |
|
|||
6052653 Spreading resistance profiling system | 100 | 1997 | |
|
|||
6784679 Differential coaxial contact array for high-density, high-speed signals | 93 | 2002 | |
|
|||
6091255 System and method for tasking processing modules based upon temperature | 143 | 1998 | |
6608494 Single point high resolution time resolved photoemission microscopy system and method | 111 | 1998 | |
6483327 Quadrant avalanche photodiode time-resolved detection | 110 | 1999 | |
6724928 Real-time photoemission detection system | 97 | 2000 | |
6488405 Flip chip defect analysis using liquid crystal | 103 | 2000 | |
6617862 Laser intrusive technique for locating specific integrated circuit current paths | 98 | 2002 | |
6788093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies | 110 | 2002 | |
7022976 Dynamically adjustable probe tips | 98 | 2003 | |
7011531 Membrane probe with anchored elements | 93 | 2005 | |
7005879 Device for probe card power bus noise reduction | 94 | 2005 | |
|
|||
6023209 Coplanar microwave circuit having suppression of undesired modes | 80 | 1996 | |
|
|||
5841288 Two-dimensional microwave imaging apparatus and methods | 127 | 1997 | |
6448788 Fixed array microwave imaging apparatus and method | 115 | 2000 | |
|
|||
6627461 Method and apparatus for detection of molecular events using temperature control of detection environment | 101 | 2001 | |
|
|||
6927079 Method for probing a semiconductor wafer | 105 | 2000 | |
6605951 Interconnector and method of connecting probes to a die for functional analysis | 109 | 2000 | |
7023225 Wafer-mounted micro-probing platform | 95 | 2003 | |
|
|||
5982166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control | 108 | 1997 | |
6313567 Lithography chuck having piezoelectric elements, and method | 38 | 2000 | |
|
|||
4697143 Wafer probe | 204 | 1984 | |
4827211 Wafer probe | 127 | 1987 | |
4858160 System for setting reference reactance for vector corrected measurements | 99 | 1988 | |
4849689 Microwave wafer probe having replaceable probe tip | 128 | 1988 | |
4994737 System for facilitating planar probe measurements of high-speed interconnect structures | 57 | 1990 | |
5045781 High-frequency active probe having replaceable contact needles | 110 | 1991 | |
5101453 Fiber optic wafer probe | 103 | 1991 | |
5237267 Wafer probe station having auxiliary chucks | 52 | 1992 | |
5266889 Wafer probe station with integrated environment control enclosure | 136 | 1992 | |
5345170 Wafer probe station having integrated guarding, Kelvin connection and shielding systems | 118 | 1992 | |
5457398 Wafer probe station having full guarding | 123 | 1993 | |
5434512 Wafer probe station having integrated guarding, Kelvin connection and shielding systems | 59 | 1994 | |
5506515 High-frequency probe tip assembly | 160 | 1994 | |
5532609 Wafer probe station having environment control enclosure | 70 | 1995 | |
5561377 System for evaluating probing networks | 67 | 1995 | |
5610529 Probe station having conductive coating added to thermal chuck insulator | 139 | 1995 | |
5565788 Coaxial wafer probe with tip shielding | 149 | 1995 | |
5663653 Wafer probe station for low-current measurements | 74 | 1995 | |
5729150 Low-current probe card with reduced triboelectric current generating cables | 139 | 1995 | |
5604444 Wafer probe station having environment control enclosure | 62 | 1996 | |
5659255 Method of evaluating signal conditions in a probe measurement network having a plurality of separate measurement channels | 58 | 1996 | |
6313649 Wafer probe station having environment control enclosure | 57 | 1997 | |
6232788 Wafer probe station for low-current measurements | 88 | 1997 | |
6232789 Probe holder for low current measurements | 87 | 1997 | |
5869975 System for evaluating probing networks that have multiple probing ends | 56 | 1997 | |
5963027 Probe station having environment control chambers with orthogonally flexible lateral wall assembly | 71 | 1997 | |
6002263 Probe station having inner and outer shielding | 60 | 1997 | |
6034533 Low-current pogo probe card | 113 | 1997 | |
6137302 Low-current probe card with reduced triboelectric current generating cables | 114 | 1997 | |
5973505 System for evaluating probing networks | 54 | 1998 | |
6445202 Probe station thermal chuck with shielding for capacitive current | 50 | 1999 | |
6252392 Probe station having environment control chamber with bendably extensible and retractable lateral wall assembly | 51 | 1999 | |
6130544 System for evaluating probing networks | 51 | 1999 | |
6288557 Probe station having inner and outer shielding | 51 | 1999 | |
6578264 Method for constructing a membrane probe using a depression | 80 | 2000 | |
6483336 Indexing rotatable chuck for a probe station | 53 | 2000 | |
6608496 Reference transmission line junction for probing device | 56 | 2000 | |
6335628 Wafer probe station for low-current measurements | 54 | 2001 | |
6380751 Wafer probe station having environment control enclosure | 50 | 2001 | |
6362636 Probe station having multiple enclosures | 53 | 2001 | |
6549106 Waveguide with adjustable backshort | 217 | 2001 | |
6492822 Wafer probe station for low-current measurements | 51 | 2001 | |
6489789 Probe station having multiple enclosures | 50 | 2001 | |
6486687 Wafer probe station having environment control enclosure | 51 | 2002 | |
6771090 Indexing rotatable chuck for a probe station | 57 | 2002 | |
6836135 Optical testing device | 52 | 2002 | |
6636059 Wafer probe station having environment control enclosure | 50 | 2002 | |
6639415 Probe station having multiple enclosures | 49 | 2002 | |
6720782 Wafer probe station for low-current measurements | 47 | 2002 | |
6777964 Probe station | 52 | 2002 | |
6724205 Probe for combined signals | 98 | 2002 | |
6642732 Probe station thermal chuck with shielding for capacitive current | 48 | 2002 | |
6861856 Guarded tub enclosure | 51 | 2002 | |
6801047 Wafer probe station having environment control enclosure | 48 | 2003 | |
6842024 Probe station having multiple enclosures | 47 | 2003 | |
6847219 Probe station with low noise characteristics | 64 | 2003 | |
* 7250779 Probe station with low inductance path | 26 | 2003 | |
6806724 Probe for combined signals | 95 | 2003 | |
* 7221172 Switched suspended conductor and connection | 23 | 2004 | |
6885197 Indexing rotatable chuck for a probe station | 47 | 2004 | |
7009383 Wafer probe station having environment control enclosure | 94 | 2004 | |
7187188 Chuck with integrated wafer support | 80 | 2004 | |
|
|||
4894612 Soft probe for providing high speed on-wafer connections to a circuit | 159 | 1988 | |
|
|||
4757255 Environmental box for automated wafer probing | 194 | 1986 | |
5101149 Modifiable IC board | 72 | 1989 | |
5883522 Apparatus and method for retaining a semiconductor wafer during testing | 107 | 1996 | |
7096133 Method of establishing benchmark for figure of merit indicative of amplifier flicker noise | 73 | 2005 | |
|
|||
4487996 Shielded electrical cable | 108 | 1982 | |
|
|||
7015709 Ultra-broadband differential voltage probes | 103 | 2004 | |
|
|||
7013221 Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays | 96 | 2000 | |
|
|||
6184845 Dielectric-loaded antenna | 142 | 1997 | |
6369776 Antenna | 92 | 1999 | |
6914580 Dielectrically-loaded antenna | 83 | 2003 | |
|
|||
7015711 Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method | 107 | 2004 | |
|
|||
5656942 Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane | 111 | 1995 | |
6096567 Method and apparatus for direct probe sensing | 146 | 1997 | |
6320372 Apparatus and method for testing a substrate having a plurality of terminals | 102 | 1999 | |
|
|||
5515167 Transparent optical chuck incorporating optical monitoring | 150 | 1994 | |
|
|||
4853624 Tunable microwave wafer probe | 93 | 1988 | |
|
|||
6756751 Multiple degree of freedom substrate manipulator | 36 | 2002 | |
2003/0156,270 Multiple degree of freedom substrate manipulator | 36 | 2002 | |
|
|||
2005/0165,316 Method for detecting artifacts in data | 78 | 2004 | |
|
|||
6229327 Broadband impedance matching probe | 216 | 1997 | |
|
|||
7030827 Planar antenna and antenna system | 75 | 2004 | |
|
|||
6078183 Thermally-induced voltage alteration for integrated circuit analysis | 132 | 1998 | |
|
|||
2004/0147,034 Method and apparatus for measuring a substance in a biological sample | 144 | 2003 | |
|
|||
5900737 Method and apparatus for automated docking of a test head to a device handler | 116 | 1996 | |
|
|||
4401945 Apparatus for detecting the position of a probe relative to a workpiece | 97 | 1981 | |
|
|||
4705447 Electronic test head positioner for test systems | 139 | 1985 | |
|
|||
6528993 Magneto-optical microscope magnetometer | 81 | 2000 | |
|
|||
6029141 Internet-based customer referral system | 1267 | 1997 | |
|
|||
6481939 Tool tip conductivity contact sensor and method | 92 | 2001 | |
|
|||
4566184 Process for making a probe for high speed integrated circuits | 100 | 1984 | |
|
|||
5960411 Method and system for placing a purchase order via a communications network | 1728 | 1997 | |
|
|||
5867073 Waveguide to transmission line transition | 87 | 1994 | |
|
|||
6624891 Interferometric-based external measurement system and method | 49 | 2001 | |
|
|||
6466046 Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor | 28 | 1999 | |
|
|||
2004/0100,276 Method and apparatus for calibration of a vector network analyzer | 101 | 2002 | |
|
|||
5633780 Electrostatic discharge protection device | 134 | 1996 | |
|
|||
2005/0227,503 Method and device for conditioning semiconductor wafers and/or hybrids | 47 | 2005 | |
|
|||
2004/0267,691 System and method to monitor performance of different domains associated with a computer system or network | 56 | 2003 | |
|
|||
6628980 Apparatus, systems, and methods for in vivo magnetic resonance imaging | 201 | 2001 | |
|
|||
6222970 Methods and apparatus for filtering an optical fiber | 158 | 1999 | |
|
|||
4766384 Well logging apparatus for determining dip, azimuth, and invaded zone conductivity | 101 | 1986 | |
|
|||
6731804 Thermal luminescence liquid monitoring system and method | 82 | 2000 | |
|
|||
5682337 High speed three-state sampling | 54 | 1995 | |
|
|||
4365109 Coaxial cable design | 61 | 1981 | |
4507602 Measurement of permittivity and permeability of microwave materials | 75 | 1982 | |
4712370 Sliding duct seal | 61 | 1986 | |
4754239 Waveguide to stripline transition assembly | 92 | 1986 | |
5631571 Infrared receiver wafer level probe testing | 149 | 1996 | |
6215295 Photonic field probe and calibration means thereof | 115 | 1998 | |
2003/0170,898 Method for intracellular modifications within living cells using pulsed electric fields | 133 | 2002 | |
|
|||
5469324 Integrated decoupling capacitive core for a printed circuit board and method of making same | 122 | 1994 | |
|
|||
5094536 Deformable wafer chuck | 56 | 1990 | |
|
|||
5245292 Method and apparatus for sensing a fluid handling | 75 | 1992 | |
|
|||
6621082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function | 101 | 2002 | |
|
|||
6104203 Test apparatus for electronic components | 55 | 1996 | |
6605955 Temperature controlled wafer chuck system with low thermal resistance | 116 | 2000 | |
|
|||
4845426 Temperature conditioner for tests of unpackaged semiconductors | 109 | 1987 | |
|
|||
5833601 Methodology for determining oxygen in biological systems | 85 | 1997 | |
|
|||
5712571 Apparatus and method for detecting defects arising as a result of integrated circuit processing | 56 | 1995 | |
|
|||
4818169 Automated wafer inspection system | 139 | 1985 | |
|
|||
2002/0050,828 Multi-feed microwave reflective resonant sensors | 81 | 2001 | |
|
|||
6549026 Apparatus and method for temperature control of IC device during test | 72 | 2000 | |
|
|||
6340895 Wafer-level burn-in and test cartridge | 107 | 1999 | |
6580283 Wafer level burn-in and test methods | 89 | 1999 | |
|
|||
6284971 Enhanced safety coaxial cables | 160 | 1999 | |
|
|||
6236975 System and method for profiling customers for targeted marketing | 545 | 1998 | |
|
|||
6798226 Multiple local probe measuring device and method | 94 | 2002 | |
|
|||
5486975 Corrosion resistant electrostatic chuck | 69 | 1994 | |
5916689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect | 134 | 1996 | |
5874361 Method of processing a wafer within a reaction chamber | 108 | 1996 | |
6257564 Vacuum chuck having vacuum-nipples wafer support | 109 | 1998 | |
6232787 Microstructure defect detection | 165 | 1999 | |
6310755 Electrostatic chuck having gas cavity and method | 104 | 1999 | |
6468816 Method for sensing conditions within a substrate processing system | 47 | 2001 | |
|
|||
6924656 Method and apparatus for testing BGA-type semiconductor devices | 23 | 2003 | |
|
|||
5879289 Hand-held portable endoscopic camera | 183 | 1996 | |
|
|||
6013586 Tent material product and method of making tent material product | 91 | 1997 | |
|
|||
6409724 Electrosurgical instrument | 407 | 2000 | |
|
|||
4884026 Electrical characteristic measuring apparatus | 73 | 1988 | |
5084671 Electric probing-test machine having a cooling system | 198 | 1990 | |
5091692 Probing test device | 117 | 1990 | |
5198752 Electric probing-test machine having a cooling system | 156 | 1991 | |
5315237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit | 114 | 1991 | |
5278494 Wafer probing test machine | 112 | 1992 | |
5321352 Probe apparatus and method of alignment for the same | 133 | 1992 | |
5321453 Probe apparatus for probing an object held above the probe card | 103 | 1992 | |
5325052 Probe apparatus | 147 | 1992 | |
5410259 Probing device setting a probe card parallel | 141 | 1993 | |
5404111 Probe apparatus with a swinging holder for an object of examination | 114 | 1993 | |
5521522 Probe apparatus for testing multiple integrated circuit dies | 144 | 1993 | |
5539676 Method of identifying probe position and probing method in prober | 94 | 1994 | |
5550482 Probe device | 105 | 1994 | |
5777485 Probe method and apparatus with improved probe contact | 119 | 1996 | |
5640101 Probe system and probe method | 70 | 1996 | |
5828225 Semiconductor wafer probing apparatus | 73 | 1996 | |
5910727 Electrical inspecting apparatus with ventilation system | 90 | 1996 | |
5804983 Probe apparatus with tilt correction mechanisms | 153 | 1997 | |
5926028 Probe card having separated upper and lower probe needle groups | 38 | 1997 | |
5999268 Apparatus for aligning a semiconductor wafer with an inspection contactor | 123 | 1997 | |
6060892 Probe card attaching mechanism | 100 | 1997 | |
6037793 Inspecting method and apparatus for semiconductor integrated circuit | 73 | 1998 | |
6124725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer | 138 | 1998 | |
6501289 Inspection stage including a plurality of Z shafts, and inspection apparatus | 84 | 2000 | |
6414478 Transfer mechanism for use in exchange of probe card | 80 | 2000 | |
6739208 Method of delivering target object to be processed, table mechanism of target object and probe apparatus | 27 | 2001 | |
7005842 Probe cartridge assembly and multi-probe assembly | 93 | 2001 | |
7101797 Substrate processing device and processing method | 46 | 2003 | |
6794888 Probe device | 76 | 2003 | |
7026832 Probe mark reading device and probe mark reading method | 96 | 2003 | |
7009415 Probing method and probing apparatus | 95 | 2004 | |
7023226 Probe pins zero-point detecting method, and prober | 93 | 2004 | |
|
|||
5280156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means | 224 | 1991 | |
6001760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck | 118 | 1997 | |
|
|||
2004/0175,294 Apparatus and method for analysing a biological sample in response to microwave radiation | 76 | 2004 | |
|
|||
6937341 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation | 86 | 2002 | |
|
|||
6902941 Probing of device elements | 100 | 2003 | |
|
|||
5942907 Method and apparatus for testing dies | 51 | 1997 | |
|
|||
4871965 Environmental testing facility for electronic components | 66 | 1988 | |
|
|||
4383178 System for driving rotary member in vacuum | 87 | 1981 | |
2005/0186,696 Gas flowmeter and manufacturing method thereof | 0 | 2005 | |
|
|||
5530372 Method of probing a net of an IC at an optimal probe-point | 119 | 1994 | |
5675499 Optimal probe point placement | 111 | 1996 | |
|
|||
5824494 Method for enumerating bacterial populations | 101 | 1995 | |
|
|||
6914244 Ion beam milling system and method for electron microscopy specimen preparation | 90 | 2004 | |
|
|||
5218185 Elimination of potentially harmful electrical and magnetic fields from electric blankets and other electrical appliances | 82 | 1989 | |
|
|||
6582979 Structure and method for fabrication of a leadless chip carrier with embedded antenna | 93 | 2001 | |
6770955 Shielded antenna in a semiconductor package | 107 | 2001 | |
|
|||
5617035 Method for testing integrated devices | 110 | 1995 | |
|
|||
4896109 Photoconductive circuit element reflectometer | 65 | 1987 | |
5523694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration | 122 | 1994 | |
6307672 Microscope collision protection apparatus | 82 | 1996 | |
6407560 Thermally-induced voltage alteration for analysis of microelectromechanical devices | 89 | 2000 | |
|
|||
5233306 Method and apparatus for measuring the permittivity of materials | 133 | 1991 | |
|
|||
7032307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus | 93 | 2004 | |
|
|||
4684883 Method of manufacturing high-quality semiconductor light-emitting devices | 97 | 1985 | |
|
|||
4978907 Apparatus and method for expanding the frequency range over which electrical signal amplitudes can be accurately measured | 54 | 1989 | |
|
|||
4755746 Apparatus and methods for semiconductor wafer testing | 156 | 1985 | |
5852232 Acoustic sensor as proximity detector | 145 | 1997 | |
|
|||
4346355 Radio frequency energy launcher | 96 | 1980 | |
5600256 Cast elastomer/membrane test probe assembly | 78 | 1995 | |
5731708 Unpackaged semiconductor testing using an improved probe and precision X-Y table | 58 | 1995 | |
6211837 Dual-window high-power conical horn antenna | 182 | 1999 | |
|
|||
4899998 Rotational positioning device | 107 | 1988 | |
|
|||
4665360 Docking apparatus | 68 | 1985 | |
4904935 Electrical circuit board text fixture having movable platens | 115 | 1988 | |
|
|||
4744041 Method for testing DC motors | 119 | 1985 | |
4831494 Multilayer capacitor | 160 | 1988 | |
4922128 Boost clock circuit for driving redundant wordlines and sample wordlines | 80 | 1989 | |
5001423 Dry interface thermal chuck temperature control system for semiconductor wafer testing | 136 | 1990 | |
5144228 Probe interface assembly | 86 | 1991 | |
5210485 Probe for wafer burn-in test system | 101 | 1991 | |
5334931 Molded test probe assembly | 93 | 1991 | |
5221905 Test system with reduced test contact interface resistance | 59 | 1992 | |
5546012 Probe card assembly having a ceramic probe card | 64 | 1994 | |
5530371 Probe card assembly | 69 | 1995 | |
5629631 Interface card for a probe card assembly | 86 | 1995 | |
5804982 Miniature probe positioning actuator | 106 | 1995 | |
5561585 Electrostatic chuck with reference electrode | 64 | 1995 | |
6043667 Substrate tester location clamping, sensing, and contacting method and apparatus | 79 | 1997 | |
6791344 System for and method of testing a microelectronic device using a dual probe technique | 65 | 2000 | |
7007380 TFI probe I/O wrap test method | 93 | 2004 | |
|
|||
6396296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station | 103 | 2000 | |
|
|||
5869326 Electroporation employing user-configured pulsing scheme | 122 | 1996 | |
|
|||
6459739 Method and apparatus for RF common-mode noise rejection in a DSL receiver | 113 | 1999 | |
|
|||
4805627 Method and apparatus for identifying the distribution of the dielectric constants in an object | 111 | 1986 | |
5095891 Connecting cable for use with a pulse generator and a shock wave generator | 98 | 1987 | |
|
|||
5493070 Measuring cable and measuring system | 99 | 1994 | |
6300775 Scattering parameter calibration system and method | 130 | 1999 | |
2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement | 97 | 2002 | |
2004/0199,350 System and method for determining measurement errors of a testing device | 94 | 2003 | |
|
|||
7023229 Dynamic burn-in equipment | 53 | 2004 | |
|
|||
6987483 Effectively balanced dipole microstrip antenna | 81 | 2003 | |
|
|||
6278051 Differential thermopile heat flux transducer | 100 | 2000 | |
|
|||
5336989 AC mains test apparatus and method | 48 | 1991 | |
5995914 Method and apparatus for asynchronously measuring frequency shifted signals | 103 | 1996 | |
|
|||
6066911 Ultrasonic driving element | 125 | 1998 | |
|
|||
5065092 System for locating probe tips on an integrated circuit probe card and method therefor | 97 | 1990 | |
|
|||
5993611 Capacitive denaturation of nucleic acid | 150 | 1997 | |
|
|||
5214374 Dual level test fixture | 106 | 1991 | |
|
|||
5854608 Helical antenna having a solid dielectric core | 251 | 1994 | |
6181297 Antenna | 109 | 1998 | |
6424316 Helical antenna | 91 | 2000 | |
|
|||
5267088 Code plate mounting device | 84 | 1990 | |
|
|||
7006046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials | 95 | 2004 | |
|
|||
4871883 Electro-magnetic shielding | 121 | 1987 | |
4859989 Security system and signal carrying member thereof | 131 | 1987 | |
5061823 Crush-resistant coaxial transmission line | 136 | 1990 | |
5107076 Easy strip composite dielectric coaxial signal cable | 126 | 1991 | |
5210377 Coaxial electric signal cable having a composite porous insulation | 68 | 1992 | |
5477011 Low noise signal transmission cable | 114 | 1994 | |
5554236 Method for making low noise signal transmission cable | 41 | 1995 | |
6032714 Repeatably positionable nozzle assembly | 79 | 1999 | |
7015708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts | 95 | 2003 | |
|
|||
5642298 Wafer testing and self-calibration system | 117 | 1996 | |
|
|||
5798652 Method of batch testing surface mount devices using a substrate edge connector | 77 | 1996 | |
|
|||
5082627 Three dimensional binding site array for interfering with an electrical field | 87 | 1987 | |
|
|||
7019541 Electric conductivity water probe | 97 | 2004 | |
|
|||
6114865 Device for electrically contacting a floating semiconductor wafer having an insulating film | 112 | 1999 | |
|
|||
5846708 Optical and electrical methods and apparatus for molecule detection | 438 | 1992 | |
|
|||
7015703 Radio frequency Langmuir probe | 103 | 2004 | |
|
|||
4968931 Apparatus and method for burning in integrated circuit wafers | 168 | 1989 | |
5467024 Integrated circuit test with programmable source for both AC and DC modes of operation | 87 | 1993 | |
5550480 Method and means for controlling movement of a chuck in a test apparatus | 79 | 1994 | |
5666063 Method and apparatus for testing an integrated circuit | 108 | 1996 | |
6111419 Method of processing a substrate including measuring for planarity and probing the substrate | 57 | 1998 | |
6650135 Measurement chuck having piezoelectric elements and method | 28 | 2000 | |
|
|||
5369368 Device for determining material parameters by means of microwave measurements | 81 | 1993 | |
|
|||
4755874 Emission microscopy system | 167 | 1987 | |
|
|||
4853627 Wafer probes | 105 | 1988 | |
|
|||
5357211 Pin driver amplifier | 84 | 1993 | |
|
|||
5382898 High density probe card for testing electrical circuits | 103 | 1992 | |
|
|||
5773951 Wafer prober having sub-micron alignment accuracy | 62 | 1996 | |
|
|||
7022985 Apparatus and method for a scanning probe microscope | 99 | 2002 | |
|
|||
6843024 Weather strip including core-removal slot | 49 | 2002 | |
|
|||
5488954 Ultrasonic transducer and method for using same | 146 | 1994 | |
|
|||
6778140 Atch horn antenna of dual frequency | 73 | 2003 | |
|
|||
5030907 CAD driven microprobe integrated circuit tester | 113 | 1989 | |
|
|||
6611417 Wafer chuck system | 83 | 2001 | |
|
|||
4651115 Waveguide-to-microstrip transition | 82 | 1985 | |
|
|||
7035738 Probe designing apparatus and probe designing method | 94 | 2002 | |
|
|||
4787752 Live component temperature conditioning device providing fast temperature variations | 82 | 1986 | |
|
|||
7015690 Omnidirectional eddy current probe and inspection system | 100 | 2004 | |
|
|||
6737920 Variable gain amplifier | 78 | 2002 | |
|
|||
5159264 Pneumatic energy fluxmeter | 80 | 1991 | |
5159267 Pneumatic energy fluxmeter | 82 | 1992 | |
|
|||
5500606 Completely wireless dual-access test fixture | 116 | 1993 | |
|
|||
6734687 Apparatus for detecting defect in device and method of detecting defect | 112 | 2001 | |
|
|||
5829437 Microwave method and system to detect and locate cancers in heterogenous tissues | 147 | 1996 | |
6061589 Microwave antenna for cancer detection system | 141 | 1997 | |
|
|||
4918374 Method and apparatus for inspecting integrated circuit probe cards | 105 | 1988 | |
6710798 Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card | 118 | 1999 | |
|
|||
5847569 Electrical contact probe for sampling high frequency electrical signals | 99 | 1996 | |
5981268 Hybrid biosensors | 160 | 1997 | |
5802856 Multizone bake/chill thermal cycling module | 286 | 1997 | |
6051422 Hybrid biosensors | 135 | 1998 | |
|
|||
7015689 Connection method for probe pins for measurement of characteristics of thin-film magnetic head and characteristic measurement method for thin-film magnetic head | 95 | 2003 | |
|
|||
5949383 Compact antenna structures including baluns | 119 | 1997 | |
|
|||
5539323 Sensor for articles such as wafers on end effector | 126 | 1993 | |
|
|||
7014499 Probe card for testing semiconductor device | 97 | 2005 | |
|
|||
5105181 Method and electrical measuring apparatus for analyzing the impedance of the source of an actual alternating voltage | 56 | 1990 | |
|
|||
6335625 Programmable active microwave ultrafine resonance spectrometer (PAMURS) method and systems | 88 | 2000 | |
|
|||
5270664 Probe for measuring surface roughness by sensing fringe field capacitance effects | 128 | 1992 | |
|
|||
6236977 Computer implemented marketing system | 566 | 1999 | |
|
|||
5019692 Thermostatic device for fuser | 47 | 1990 | |
5848500 Light-tight enclosure and joint connectors for enclosure framework | 116 | 1997 | |
|
|||
4810981 Assembly of microwave components | 91 | 1987 | |
|
|||
7034553 Direct resistance measurement corrosion probe | 96 | 2003 | |
|
|||
4426619 Electrical testing system including plastic window test chamber and method of using same | 69 | 1981 | |
4491173 Rotatable inspection table | 71 | 1982 | |
4734872 Temperature control for device under test | 102 | 1985 | |
4784213 Mixing valve air source | 81 | 1986 | |
4759712 Device for applying controlled temperature stimuli to nerve sensitive tissue | 52 | 1986 | |
6415858 Temperature control system for a workpiece chuck | 99 | 1997 | |
|
|||
4419626 Broad band contactor assembly for testing integrated circuit devices | 78 | 1981 | |
4473798 Interface assembly for testing integrated circuit devices | 72 | 1981 | |
|
|||
2006/0155,270 Tissue ablation apparatus and method of ablating tissue | 173 | 2003 | |
|
|||
4515439 Attachment of microscope objectives | 82 | 1982 |
Patent Citation Ranking
Forward Cite Landscape
Patent Info | (Count) | # Cites | Year |
---|---|---|---|
|
|||
* 2009/0302,234 Method and Apparatus for Observing Inside Structures, and Specimen Holder | 4 | 2008 | |
|
|||
* 8130005 Electrical guard structures for protecting a signal trace from electrical interference | 0 | 2006 | |
* 2008/0143,358 ELECTRICAL GUARD STRUCTURES FOR PROTECTING A SIGNAL TRACE FROM ELECTRICAL INTERFERENCE | 51 | 2006 | |
|
|||
* 2010/0262,013 Universal Multiple Aperture Medical Ultrasound Probe | 28 | 2010 | |
|
|||
* 8104190 Wood kiln moisture measurement calibration and metering methods | 2 | 2010 | |
|
|||
* 8134131 Method and apparatus for observing inside structures, and specimen holder | 7 | 2008 | |
|
|||
7969173 Chuck for holding a device under test | 4 | 2007 | |
8319503 Test apparatus for measuring a characteristic of a device under test | 2 | 2009 |
Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 3, 2020 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Legal Events

Matter Detail

Renewals Detail

Note
The template below is formatted to ensure compatibility with our system.
Provide tags with | separated like (tags1|tags2).
Maximum length is 128 characters for Customer Application No
Mandatory Fields * - 'MatterType','AppType','Country','Title','SerialNo'.
Acceptable Date Format - 'MM/DD/YYYY'.
Acceptable Filing/App Types -
- Continuation/Divisional
- Original
- Paris Convention
- PCT National
- With Priority
- EP Validation
- Provisional Conversion
- Reissue
- Provisional
- Foreign Extension
Acceptable Status -
- Pending
- Abandoned
- Unfiled
- Expired
- Granted
Acceptable Matter Types -
- Patent
- Utility Model
- Supplemental Protection Certificate
- Design
- Inventor Certificate
- Plant
- Statutory Invention Reg
Advertisement
Advertisement
Advertisement

Advertisement

Advertisement

Recipient Email Address

Recipient Email Address

Comment
Recipient Email Address

Success
E-mail has been sent successfully.
Failure
Some error occured while sending email. Please check e-mail and try again!
PAIR load has been initiated
A preliminary load of cached data will be loaded soon. Current PAIR data will be loaded within twenty four hours.
File History PDF
Thank you for your purchase! The File Wrapper for Patent Number 7498828 will be available within the next 24 hours.
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:

Last Refreshed On:
Changes done successfully
Important Notes on Latency of Status data
Please note there is up to 60 days of latency in this Status indicator for certain status conditions. You can obtain up-to-date Status indicator readings by ordering PAIR for the file.
An application with the status "Published" (which means it is pending) may be recently abandoned, but not yet updated to reflect its abandoned status. However, an application filed less than one year ago is unlikely to be abandoned.
A patent with the status "Granted" may be recently expired, but not yet updated to reflect its expired status. However, it is highly unlikely a patent less than 3.5 years old would be expired.
An application with the status "Abandoned" is almost always current, but there is a small chance it was recently revived and the status not yet updated.
Important Note on Priority Date data
This priority date is an estimated earliest priority date and is purely an estimation. This date should not be taken as legal conclusion. No representations are made as to the accuracy of the date listed. Please consult a legal professional before relying on this date.
We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.