Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping
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United States of America Patent
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Mar 3, 2009
Grant Date -
Sep 14, 2006
app pub date -
Oct 19, 2005
filing date -
Mar 14, 2005
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The tilt and position of individually controllable element are simultaneously adjusted to allow a greater range of contrasts to be achieved. This can also be used to compensate for cupping of individually controllable elements. Simultaneous adjustment of both the position and tilt of the individually controllable elements can be achieved by two electrodes operable over a range of values.
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Cited Art Landscape
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