Method and structure for high fill factor spatial light modulator with integrated spacer layer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 10, 2009
Grant Date -
Apr 26, 2007
app pub date -
Oct 13, 2005
filing date -
Oct 13, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A high fill factor spatial light modulator. The spatial light modulator includes a device layer coupled to a support base. The device layer includes a mirror plate and a coplanar flexible member. The spatial light modulator also includes a patterned spacer layer coupled to the mirror plate. In some embodiments, the spacer layer is fabricated from an aluminum layer. The method further includes a reflective layer coupled to the spacer layer.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully