Electronic apparatus having a core conductive structure within an insulating layer
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United States of America Patent
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Mar 17, 2009
Grant Date -
Jan 12, 2006
app pub date -
Aug 29, 2005
filing date -
Aug 5, 2003
priority date (Note) -
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Abstract
plasma treatment removes unwanted oxide from the surface region of the core conducting layer such that the interface between the core conducting layer and the capping adhesion/barrier is substantially free of oxides.
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