HBAR oscillator and method of manufacture

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United States of America Patent

PATENT NO 7508286
APP PUB NO 20080079516A1
SERIAL NO

11540413

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An oscillator comprises a substrate and a high tone bulk acoustic resonator (HBAR), which includes a portion of the substrate. The oscillator also comprises a film bulk acoustic resonator (FBAR) filter disposed over the substrate. The filter comprises a plurality of FBAR devices. The oscillator also comprises a plurality of acoustic isolators disposed in the substrate, wherein one of the isolators is disposed beneath each of the FBAR devices. A method of fabricating an oscillator is also disclosed.

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Patent Owner(s)

Patent OwnerAddress
AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LIMITEDSINGAPORE

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pang, Wei Fort Collins, US 57 537
Ruby, Richard C Menlo Park, US 126 7330

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