Reversible photobleachable materials based on nano-sized semiconductor particles and their optical applications
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United States of America Patent
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Mar 31, 2009
Grant Date -
Aug 5, 2004
app pub date -
Dec 9, 2003
filing date -
Dec 9, 2002
priority date (Note) -
Expired
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Abstract
Semiconductor nano-particles, due to their specific physical properties, can be used as reversible photo-bleachable materials for a wide spectrum, from far infrared to deep UV. Applications include, reversible contrast enhancement layer (R-CEL) in optical lithography, lithography mask inspection and writing and optical storage technologies.
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