Moveable micro-electromechanical device
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United States of America Patent
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Mar 31, 2009
Grant Date -
Jun 21, 2007
app pub date -
Nov 2, 2006
filing date -
Apr 8, 1998
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate.
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