Substrate meniscus interface and methods for operation
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United States of America Patent
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-
Apr 7, 2009
Grant Date -
Jul 7, 2005
app pub date -
Apr 1, 2004
filing date -
Sep 30, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate is provided which includes a docking surface configured to be placed adjacent to an edge of the substrate where the docking surface is in the same plane as the substrate. The docking surface provides a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate.
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