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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SILECS OY	ESPOO FINLAND ESPOO SOUTHERN FINLAND

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kylma, Janne	Helsinki , FI	6	59
Paulasaari, Jyri	Turku , FI	15	47
Rantala, Juha T	Espoo , FI	39	281

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 07, 2009	US,7514709,B2   US7514709B2	GRANTED PATENT AS SECOND PUBLICATION
August 17, 2006	US,20060180900,A1   US20060180900A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7514709

Organo-silsesquioxane polymers for forming low-k dielectrics

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