Probe head having a membrane suspended probe
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United States of America Patent
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Apr 7, 2009
Issued Date -
N/A
app pub date -
Mar 10, 2008
filing date -
Jul 7, 2004
priority date (Note) -
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Abstract
A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test. A beam contact proximate the second end of the beam. The beam being movable to deform at least one surface of the elastic membrane.
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