In-situ interferometer arrangement
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United States of America Patent
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Apr 7, 2009
Grant Date -
Jan 10, 2008
app pub date -
Sep 17, 2007
filing date -
Jul 19, 2002
priority date (Note) -
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Abstract
An in-situ interferometer includes an image modifying optic that produces light ray bundles. The light ray bundles are projected onto a reticle with a plurality of measurement fiducials encoded onto a face of the reticle. The measurement fiducials are exposed onto a sensing plane and their locations measured. Aberrations in the projection system are determined from the measurements of the exposed reticles.
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