Driving a MEMS scanner with a combined actuator drive signal
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United States of America Patent
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Apr 7, 2009
Grant Date -
Feb 21, 2008
app pub date -
Oct 19, 2007
filing date -
May 14, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
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