Capacitance sensing circuit for a pressure sensor
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United States of America Patent
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Apr 14, 2009
Grant Date -
May 15, 2008
app pub date -
Jan 16, 2008
filing date -
Oct 18, 2004
priority date (Note) -
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Abstract
The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller arranged in signal communication with a charge amplifier, a charge injector and two switches. The charge amplifier is connected to the switches via a sensor capacitor in parallel with a reference capacitor in parallel with a parasitic capacitance to ground. The charge injector and charge amplifier are arranged in parallel connection between the capacitors and the controller. The controller operates the circuit to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.
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