Method of manufacturing a light-emitting device
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United States of America Patent
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Apr 14, 2009
Grant Date -
Jan 24, 2002
app pub date -
May 3, 2001
filing date -
May 12, 2000
priority date (Note) -
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Abstract
A technique for manufacturing a light-emitting device by using a method of forming a thin film having a highly uniform thickness with high throughput is provided. The technique includes the steps of filling a small molecular organic electroluminescence material into an evaporation cell that has an orifice-like evaporation material ejecting port, and heating the small molecular organic electroluminescence material in an inert gas atmosphere to form a light emitting layer on a substrate from the small molecular organic electroluminescence material.
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