Method and system for packaging a MEMS device
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United States of America Patent
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Apr 14, 2009
Grant Date -
Oct 25, 2007
app pub date -
Feb 26, 2007
filing date -
Sep 27, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.
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