Laser machining apparatus
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United States of America Patent
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Apr 21, 2009
Grant Date -
Jun 16, 2005
app pub date -
Mar 10, 2004
filing date -
Mar 14, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
A laser machining apparatus in which three or more beam splits are made incident on one machining lens so that high speed machining can be achieved, and the machining quality (shapes, dimensions, accuracy and straightness of machined holes) is excellent. The optical paths of beams A and B having the same polarization direction are aligned almost in one and the same direction by a total reflection/transmission type beam combining means 31c using a difference in incident angle. After that, the optical paths of the beams A and B and the optical path of a beam C different in polarization direction therefrom are aligned almost in one and the same direction by a polarizing type beam combining means 32. Then, the beams A, B and C are made incident on a machining lens 45.
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