Method of selecting and analyzing scrap silicon
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United States of America Patent
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Apr 28, 2009
Grant Date -
Feb 1, 2007
app pub date -
May 16, 2006
filing date -
May 18, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Non-destructive testing is performed on individual pieces of scrap silicon using an energy dispersive x-ray fluorescent analyzer to determine from the obtained spectral data whether a prescribed impurity element is contained therein. The electrical resistivity of each piece of scrap silicon can be measured, and the concentration of the impurity element contained in the scrap on can be calculated from the resistivity.
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