Electrolytic processing apparatus and electrolytic processing method
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United States of America Patent
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May 5, 2009
Grant Date -
Jul 21, 2005
app pub date -
Jan 14, 2005
filing date -
Jan 16, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An electrolytic processing apparatus can increase the efficiency of the dissociation reaction of water and efficiently perform electrolytic processing, and can eliminate the need for an operation of a change of ion exchanger. The electrolytic processing apparatus includes: a processing electrode and a feeding electrode; a liquid supply section for supplying a liquid containing an ion-exchange material between the workpiece and at least one of the processing electrode and the feeding electrode; a power source for applying a voltage between the processing electrode and the feeding electrode; and a drive section for moving the workpiece and at least one of the processing electrode and the feeding electrode relative to each other; wherein electrolytic processing of the workpiece is carried out while keeping the workpiece not in contact with but close to the processing electrode at a distance of not more than 10 μm.
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