US Patent No: 7,529,015

Number of patents in Portfolio can not be more than 2000

Hidden micromirror support structure

ALSO PUBLISHED AS: 20080002248

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Abstract

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Methods and apparatus for use with a micromirror element includes a micromirror a micromirror having a substantially flat outer surface disposed outwardly from a support structure that is operable to at least partially support the micromirror. The support structure includes at least one layer overlying at least two discrete planes that are both substantially parallel to the outer surface of the micromirror. In one particular embodiment, the support structure includes annular-shaped sidewalls that encapsulate a photoresist plug.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX17982

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rothenbury, David A Garland, TX 14 7

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (2)
5,650,881 Support post architecture for micromechanical devices 257 1994
5,631,782 Support post architecture for micromechanical devices 78 1995

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (1)
7,924,489 Hidden micromirror support structure 0 2009

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