Hidden micromirror support structure

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7529015
APP PUB NO 20080002248A1
SERIAL NO

11477998

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods and apparatus for use with a micromirror element includes a micromirror a micromirror having a substantially flat outer surface disposed outwardly from a support structure that is operable to at least partially support the micromirror. The support structure includes at least one layer overlying at least two discrete planes that are both substantially parallel to the outer surface of the micromirror. In one particular embodiment, the support structure includes annular-shaped sidewalls that encapsulate a photoresist plug.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX17131

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rothenbury, David A Garland, US 8 15

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (2)
5650881 Support post architecture for micromechanical devices 276 1994
* 5631782 Support post architecture for micromechanical devices 81 1995
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (1)
7924489 Hidden micromirror support structure 0 2009
* Cited By Examiner

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