Support structure for MEMS device and methods therefor
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United States of America Patent
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May 19, 2009
Grant Date -
Jan 25, 2007
app pub date -
Jul 21, 2006
filing date -
Jul 22, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical systems device having support structures formed of sacrificial material that is selectively diffused with a dopant material or formed of a selectively oxidized metal sacrificial material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a diffused or oxidized sacrificial material.
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