Monolithic RF filter
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United States of America Patent
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May 19, 2009
Grant Date -
Nov 2, 2006
app pub date -
Nov 9, 2005
filing date -
Nov 10, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A filter formed of film bulk acoustic resonators has a topology that enables a trimming inductor to be fabricated on the same substrate as the resonator arrays. The entire filter can be fabricated on a single chip, utilizing only integrated circuit processes. In an exemplary embodiment, a pair of shunt resonators each have one electrode connected to series-connected resonators. The other electrodes of the two shunt resonators are connected in common to one another. The trimming inductor is connected between the common electrode and ground potential. A third shunt resonator is connected between the series-connected resonators and ground potential.
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