Anti-reflective coating composition and production method for pattern using the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7537882
APP PUB NO 20070238048A1
SERIAL NO

11630411

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

—X—Y (2) (wherein, k represents an integer from 1 to 20, x represents a single bond or a divalent linking group, y represents an anionic group or a nonionic group, and this compound has a structure different from that of the component (A)); and (E) water.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • DAINIPPON INK AND CHEMICALS, INC.;AZ ELECTRONIC MATERIALS IP (JAPAN) KK

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akiyama, Yasushi Kakegawa, JP 13 26
Matsuo, Jirou Chiba, JP 1 1
Takano, Kiyofumi Chiba, JP 11 88
Takano, Yusuke Kakegawa, JP 70 473

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation