High performance miniature RF sensor for use in microelectronics plasma processing tools
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United States of America Patent
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May 26, 2009
Grant Date -
Sep 27, 2007
app pub date -
Mar 19, 2007
filing date -
Mar 20, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A high-performance miniature RF sensor that maintains gain, directivity, and isolation in a miniature package. The miniature RF sensor includes stacked current and voltage pickups disposed in a PCB construction, the sensor further including quarter wave transforming filter, triaxial shielding, and skin-effect filtering.
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