Method for producing multilayer optical device

United States of America Patent

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Jun 9, 2009
Grant Date
Aug 23, 2007
app pub date
Nov 30, 2006
filing date
Jun 26, 2003

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Abstract

, and when the aluminum thickness is less than 10 nm, the separation of the glass substrate and multilayer optical thin film cannot be performed cleanly. Accordingly, the aluminum thickness is set in a range of 10 to 90 nm.

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Patent Owner	Address
NIKON CORPORATION	TOKYO

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B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....

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Inventor Name	Address	# of filed Patents	Total Citations
Yoshino, Kunihiko	Yokohama, JP	6	55

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Method for producing multilayer optical device

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United States of America Patent

11606517

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PATENT NO	7544392
APP PUB NO	20070196586A1
SERIAL NO	11606517
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 09, 2009	US,7544392,B2 US7544392B2	GRANTED PATENT AS SECOND PUBLICATION
August 23, 2007	US,20070196586,A1 US20070196586A1	FIRST PUBLISHED PATENT APPLICATION

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11606517

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