Self referencing heterodyne reflectometer and method for implementing

United States of America Patent

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Jun 9, 2009
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Mar 29, 2007
app pub date
Sep 27, 2005
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Sep 27, 2005

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Abstract

which is independent of phase drift due to temperature. Film thickness is calculated from the film phase shift information.

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VERITY INSTRUMENTS INC	2901 EISENHOWER STREET CARROLLTON TX 75007

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G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

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Inventor Name	Address	# of filed Patents	Total Citations
Aiyer, Arun Ananth	Lewisville , US	13	157

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Self referencing heterodyne reflectometer and method for implementing

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United States of America Patent

11237225

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PATENT NO	7545503
APP PUB NO	20070070357A1
SERIAL NO	11237225
DOCKET NO

US Family Size	Non-US Coverage
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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 09, 2009	US,7545503,B2 US7545503B2	GRANTED PATENT AS SECOND PUBLICATION
March 29, 2007	US,20070070357,A1 US20070070357A1	FIRST PUBLISHED PATENT APPLICATION

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