MEMS display
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United States of America Patent
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Jun 9, 2009
Grant Date -
Oct 16, 2008
app pub date -
Apr 14, 2008
filing date -
Dec 9, 2003
priority date (Note) -
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Abstract
A display comprising: a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows and wherein the subrows of each row are electrically connected; and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. The physical property can be a spring constant associated with a movable mirror, a film thickness, an electrode width, a damping force caused by air between a movable mirror and a fixed mirror, a mass of a movable mirror, a material or geometry of the respective MEMS element.
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