Ultra-high Q micro-resonator and method of fabrication
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United States of America Patent
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Jun 9, 2009
Grant Date -
Sep 16, 2004
app pub date -
Oct 2, 2003
filing date -
Oct 2, 2002
priority date (Note) -
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Abstract
A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surface of the micro-cavity.
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