Removal of contaminants from a fluid

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7550075
APP PUB NO 20060213820A1
SERIAL NO

11088339

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method and apparatus for removing contaminants from a fluid are disclosed. The fluid is introduced into a decontamination chamber such that the fluid is cooled and contaminants fall out within the decontamination chamber, producing a purified fluid. The purified fluid is then retrieved and can be used in a supercritical processing system.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bertram, Ronald Thomas Gilbert, US 3 15
Scott, Douglas Michael Gilbert, US 3 9

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