Polishing slurries and methods for chemical mechanical polishing

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United States of America Patent

PATENT NO 7553430
APP PUB NO 20070023731A1
SERIAL NO

11540297

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Abstract

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dissolved in an oxidizing agent.

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Patent Owner(s)

Patent OwnerAddress
CYPRUS AMAX MINERALS COMPANY333 NORTH CENTRAL AVENUE PHOENIX AS 85004

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Babu, Suryadevara Vijayakumar Potsdam, US 2 7
Chandra, Sunil Oro Valley, US 16 286
Hedge, Sharath Potsdam, US 2 7
Hong, Youngki Potsdam, US 43 152
Nimmala, Sreehari Oro Valley, US 4 20
Patri, Udaya B Potsdam, US 6 40

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