Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
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United States of America Patent
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Jun 30, 2009
Grant Date -
Jun 28, 2007
app pub date -
Dec 23, 2005
filing date -
Dec 23, 2005
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Abstract
A plasma system is disclosed. The plasma system includes a microwave waveguide assembly having a longitudinal axis parallel with a first axis. The plasma system also includes a plasma tube assembly intersecting the microwave waveguide assembly. The plasma tube assembly has a longitudinal axis parallel with a second axis that is substantially orthogonal with the first axis. The plasma tube assembly also has a plasma-sustaining region defined by an upstream plurality of plasma traps and a downstream plurality of plasma traps.
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