Voltage contrast monitor for integrated circuit defects
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United States of America Patent
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Jul 14, 2009
Grant Date -
Mar 13, 2008
app pub date -
Nov 8, 2007
filing date -
Aug 29, 2003
priority date (Note) -
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Abstract
A semiconductor chip is provided which includes active and inactive IP cores. The spaces on the metal layer associated with the inactive IP cores includes voltage contrast inspection structures. The voltage contrast inspection structures serve to provide improved planarization of the metal layer and provided improved inspection capabilities.
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