Method for adjoining adjacent coatings on a processing element
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United States of America Patent
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Jul 14, 2009
Grant Date -
Jun 21, 2007
app pub date -
Mar 17, 2004
filing date -
Mar 31, 2003
priority date (Note) -
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Abstract
Two or more coatings applied to processing elements of a plasma processing system are treated with protective barriers or coatings. A method is described for adjoining two or more coatings on the processing element. Having applied a first protective barrier, a portion of the first protective barrier is treated. A second protective barrier is then applied over at least a portion of a region to which the first protective barrier was applied.
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