Plasma-assisted processing in a manufacturing line
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United States of America Patent
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Jul 14, 2009
Grant Date -
Apr 20, 2006
app pub date -
May 7, 2003
filing date -
May 8, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Methods and apparatus are provided for plasma-assisted processing multiple work pieces in a manufacturing line. In one embodiment, the method can include placing the work pieces in movable carriers, moving the carriers on a conveyor into an irradiation zone, flowing a gas into the irradiation zone, igniting the gas in the irradiation zone to form a plasma (e.g., by subjecting the gas to electromagnetic radiation in the presence of a plasma catalyst), sustaining the plasma for a period of time sufficient to at least partially plasma process at least one of the work pieces in the irradiation zone, and advancing the conveyor to move the at least one plasma-processed work piece out of the irradiation zone. Various types of plasma catalysts are also provided.
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