MEMS fiber optic microphone
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United States of America Patent
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Jul 14, 2009
Grant Date -
Feb 28, 2008
app pub date -
May 18, 2007
filing date -
May 19, 2006
priority date (Note) -
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Abstract
diaphragm with a 350 μ square embossed center of silicon is mechanically clamped to the ferrule of a single mode fiber to keep its closeness (5 μ) and perpendicular orientation with respect to the diaphragm. Static measurement of optical output power versus the pressure on membrane reveals more than one period of Fabry-Perot interference, thereby generating a Fabry-Perot diaphragm-fiber interferometer device accurately reproducing audible acoustic wave.
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