Scanning simultaneous phase-shifting interferometer
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United States of America Patent
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Jul 14, 2009
Grant Date -
Feb 21, 2008
app pub date -
Jun 28, 2007
filing date -
Jun 29, 2006
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Abstract
An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.
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