Electrode assembly for the removal of surface oxides by electron attachment
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United States of America Patent
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Jul 21, 2009
Grant Date -
Nov 18, 2004
app pub date -
Apr 7, 2004
filing date -
Apr 28, 2003
priority date (Note) -
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Abstract
An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.
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