US Patent No: 7,566,940

Number of patents in Portfolio can not be more than 2000

Electromechanical devices having overlying support structures

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ALSO PUBLISHED AS: 20070019280
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 269 4460
Ganti, Suryaprakash Clifton Park, NY 37 191
Kothari, Manish Cupertino, CA 262 2930
Miles, Mark W San Francisco, CA 191 10142
Sasagawa, Teruo Los Gatos, CA 74 643
Tung, Ming-Hau San Francisco, CA 112 1558

Cited Art

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (62)
6,040,937 Interferometric modulation 573 1996
5,986,796 Visible spectrum modulator arrays 446 1996
6,674,562 Interferometric modulation of radiation 596 1998
7,123,216 Photonic MEMS and structures 482 1999
6,867,896 Interferometric modulation of radiation 364 2001
6,680,792 Interferometric modulation of radiation 457 2001
6,650,455 Photonic mems and structures 455 2001
2002/0075,555 Interferometric modulation of radiation 387 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 349 2002
6,710,908 Controlling micro-electro-mechanical cavities 307 2002
7,042,643 Interferometric modulation of radiation 155 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 399 2002
7,110,158 Photonic MEMS and structures 158 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 272 2002
6,982,820 Color changeable pixel 144 2003
7,198,973 Method for fabricating an interference display unit 89 2003
6,995,890 Interference display unit 122 2003
2004/0209,195 Method for fabricating an interference display unit 209 2003
6,882,458 Structure of an optical interference display cell 228 2003
2004/0240,032 Interferometric modulation of radiation 290 2004
7,119,945 Altering temporal response of microelectromechanical elements 120 2004
7,078,293 Method for fabricating optical interference display cell 58 2004
6,958,847 Structure of an optical interference display unit 198 2004
6,999,225 Optical interference display panel 112 2004
7,193,768 Interference display cell 22 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 218 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 215 2004
2005/0249,966 Method of manufacture for microelectromechanical devices 125 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 132 2004
7,006,272 Color changeable pixel 108 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 45 2004
7,184,202 Method and system for packaging a MEMS device 73 2005
7,142,346 System and method for addressing a MEMS display 26 2005
7,289,259 Conductive bus structure for interferometric modulator array 55 2005
7,016,095 Method for fabricating an interference display unit 48 2005
2006/0066,932 Method of selective etching using etch stop layer 68 2005
2006/0079,048 Method of making prestructure for MEMS systems 65 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 78 2005
2006/0077,529 Method of fabricating a free-standing microstructure 20 2005
2006/0066,511 Systems and methods using interferometric optical modulators and diffusers 41 2005
2006/0066,936 Interferometric optical modulator using filler material and method 49 2005
2006/0006,138 Interference display cell and fabrication method thereof 25 2005
2007/0096,300 Diffusion barrier layer for MEMS devices 18 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
2006/0256,420 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 29 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 42 2006
2007/0247,401 Microelectromechanical device and method utilizing nanoparticles 16 2006
2007/0249,079 Non-planar surface structures and process for microelectromechanical systems 17 2006
2007/0019,923 Support structure for MEMS device and methods therefor 9 2006
2007/0041,076 MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same 14 2006
2007/0041,703 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 17 2006
2007/0042,524 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 15 2006
2007/0103,028 MEMS device and interconnects for same 17 2006
2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
2007/0269,748 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATORS 31 2007
2008/0030,825 MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING A POROUS SURFACE 15 2007
2008/0041,817 STRUCTURE OF A MICRO ELECTRO MECHANICAL SYSTEM AND THE MANUFACTURING METHOD THEREOF 15 2007
2008/0068,699 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATROS 26 2007
2008/0144,163 DEVICE AND METHOD FOR MODIFYING ACTUATION VOLTAGE THRESHOLDS OF A DEFORMABLE MEMBRANE IN AN INTERFEROMETRIC MODULATOR 21 2008
2008/0192,328 MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE 7 2008
2008/0192,329 MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE 6 2008
2008/0268,620 METHOD AND DEVICE FOR PROTECTING INTERFEROMETRIC MODULATORS FROM ELECTROSTATIC DISCHARGE 8 2008
 
TEXAS INSTRUMENTS INCORPORATED (52)
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5,079,544 Standard independent digitized video system 334 1989
5,037,173 Optical interconnection network 302 1989
5,192,395 Method of making a digital flexure beam accelerometer 194 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 305 1991
5,226,099 Digital micromirror shutter device 350 1991
5,214,419 Planarized true three dimensional display 248 1991
5,214,420 Spatial light modulator projection system with random polarity light 285 1991
5,168,406 Color deformable mirror device and method for manufacture 269 1991
5,563,398 Spatial light modulator scanning system 190 1991
5,233,456 Resonant mirror and method of manufacture 291 1991
5,231,532 Switchable resonant filter for optical radiation 233 1992
5,212,582 Electrostatically controlled beam steering device and method 336 1992
5,312,513 Methods of forming multiple phase light modulators 261 1992
5,172,262 Spatial light modulator and method 374 1992
5,272,473 Reduced-speckle display system 265 1992
5,327,286 Real time optical correlation system 262 1992
5,506,597 Apparatus and method for image projection 274 1992
5,489,952 Method and device for multi-format television 308 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 381 1993
5,606,441 Multiple phase light modulation using binary addressing 210 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 265 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 272 1994
5,485,304 Support posts for micro-mechanical devices 118 1994
5,526,951 Fabrication method for digital micro-mirror devices using low temperature CVD 53 1994
5,650,881 Support post architecture for micromechanical devices 250 1994
5,552,924 Micromechanical device having an improved beam 237 1994
5,515,076 Multi-dimensional array video processor system 239 1995
5,535,047 Active yoke hidden hinge digital micromirror device 438 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 224 1995
5,619,366 Controllable surface filter 218 1995
5,497,262 Support posts for micro-mechanical devices 90 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 380 1995
5,608,468 Method and device for multi-format television 231 1995
5,646,768 Support posts for micro-mechanical devices 288 1995
6,447,126 Support post architecture for micromechanical devices 317 1995
5,784,212 Method of making a support post for a micromechanical device 225 1996
6,624,944 Fluorinated coating for an optical element 85 1997
6,100,477 Recessed etch RF micro-electro-mechanical switch 120 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 276 1998
6,282,010 Anti-reflective coatings for spatial light modulators 270 1999
6,295,154 Optical switching apparatus 284 1999
6,038,056 Spatial light modulator having improved contrast ratio 252 1999
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 202 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 204 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 173 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 209 2001
6,625,047 Micromechanical memory element 238 2001
6,959,990 Prism for high contrast projection 46 2002
 
LUCENT TECHNOLOGIES INC. (12)
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 306 1995
5,751,469 Method and apparatus for an improved micromechanical modulator 103 1996
5,710,656 Micromechanical optical modulator having a reduced-mass composite membrane 262 1996
5,838,484 Micromechanical optical modulator with linear operating characteristic 180 1996
5,808,781 Method and apparatus for an improved micromechanical modulator 137 1997
5,943,158 Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method 209 1998
5,943,155 Mars optical modulators 124 1998
6,351,329 Optical attenuator 102 1999
6,522,801 Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor 70 2000
6,704,475 Mirror for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor 21 2001
2002/0141,690 Mirror for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor 20 2001
2003/0138,213 Optical systems comprising curved MEMs mirrors and methods for making same 55 2002
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (5)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 333 1989
5,784,189 Spatial light modulator 241 1995
5,771,321 Micromechanical optical switch and flat panel display 247 1996
5,959,763 Spatial light modulator 219 1998
6,243,149 Method of imaging using a liquid crystal display device 172 1999
 
SANDIA CORPORATION (5)
5,345,328 Tandem resonator reflectance modulator 142 1992
5,867,302 Bistable microelectromechanical actuator 332 1997
6,335,224 Protection of microelectronic devices during packaging 109 2000
6,577,785 Compound semiconductor optical waveguide switch 58 2001
6,967,757 Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation 38 2003
 
EASTMAN KODAK COMPANY (4)
5,075,796 Optical article for multicolor imaging 195 1990
5,347,377 Planar waveguide liquid crystal variable retarder 81 1992
6,284,560 Method for producing co-planar surface structures 64 1998
2002/0171,610 Organic electroluminescent display with integrated touch-screen 46 2001
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (4)
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 257 2001
6,811,267 Display system with nonvisible data projection 209 2003
2005/0057,442 Adjacent display of sequential sub-images 194 2003
7,126,741 Light modulator assembly 74 2004
 
POPKIN FAMILY ASSETS, L.L.C. (4)
5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 289 1996
6,324,192 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 74 1998
6,597,490 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 133 2001
2004/0136,076 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 81 2003
 
CANON KABUSHIKI KAISHA (3)
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1998
6,399,257 Color filter manufacturing method, color filter manufactured by the method, and liquid crystal device employing the color filter 53 2000
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FUJI PHOTO FILM CO., LTD. (3)
6,327,071 Drive methods of array-type light modulation element and flat-panel display 241 1999
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JDS UNIPHASE CORPORATION (3)
2002/0149,850 Tunable optical filter 63 2001
2003/0053,078 Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators 141 2001
6,778,728 Micro-electro-mechanical mirror devices having a high linear mirror fill factor 32 2002
 
MAPLE VISION TECHNOLOGIES INC. (3)
5,914,803 Thin film actuated mirror array in an optical projection system and method for manufacturing the same 69 1997
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6,104,525 Array of thin film actuated mirrors and method for the manufacture thereof 18 1997
 
SILICON LIGHT MACHINES CORPORATION (3)
6,466,354 Method and apparatus for interferometric modulation of light 253 2000
7,049,164 Microelectronic mechanical system and methods 50 2002
7,027,202 Silicon substrate as a light modulator sacrificial layer 52 2003
 
SONY CORPORATION (3)
6,940,631 Optical multilayer structure, optical switching device, and image display 80 2001
6,760,146 Light modulation element, GLV device, and laser display 40 2002
7,016,099 MEMS element, GLV device, and laser display 40 2002
 
CHEETAH OMNI, LLC (2)
6,407,851 Micromechanical optical switch 164 2000
6,859,301 Micromechanical optical switch 50 2004
 
CORNELL RESEARCH FOUNDATION, INC. (2)
6,170,332 Micromechanical accelerometer for automotive applications 84 2000
6,743,570 Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices 53 2002
 
GLOBALFOUNDRIES INC. (2)
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HONEYWELL INC. (2)
4,377,324 Graded index Fabry-Perot optical filter device 225 1980
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IRIDIGM DISPLAY CORPORATION (2)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 275 1999
7,256,922 Interferometric modulators with thin film transistors 27 2004
 
QUALCOMM INCORPORATED (2)
2005/0042,117 Optical interference display panel and manufacturing method thereof 154 2004
2008/0055,699 STRUCTURE OF A MICRO ELECTRO MECHANICAL SYSTEM AND THE MANUFACTURING METHOD THEREOF 11 2007
 
RAYTHEON COMPANY (2)
6,391,675 Method and apparatus for switching high frequency signals 73 1999
6,803,534 Membrane for micro-electro-mechanical switch, and methods of making and using it 39 2001
 
ROBERT BOSCH GMBH (2)
2002/0055,253 Method for producing a micromechanical structure and a micromechanical structure 74 2001
6,987,432 Temperature compensation for silicon MEMS resonator 48 2003
 
SEIKO EPSON CORPORATION (2)
6,097,145 Aerogel-based phase transition flat panel display 85 1998
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THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
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AT&T CORP. (1)
5,500,761 Micromechanical modulator 324 1994
 
AVAGO TECHNOLOGIES GENERAL IP PTE. LTD. (1)
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6,031,653 Low-cost thin-metal-film interference filters 163 1998
 
CHROMISYS (1)
2002/0071,169 Micro-electro-mechanical-system (MEMS) mirror device 101 2000
 
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6,713,235 Method for fabricating thin-film substrate and thin-film substrate fabricated by the method 48 2001
 
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2002/0031,155 MICROELECTROMECHANICALLY TUNABLE, CONFOCAL, VERTICAL CAVITY SURFACE EMITTING LASER AND FABRY-PEROT FILTER 53 1998
 
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THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE (1)
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TURNSTONE SYSTEMS, INC. (1)
6,671,149 Systems and methods for protecting vulnerable micro electro-mechanical system (MEMS) and electronic relay devices 14 2000
 
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UNITED TEST AND ASSEMBLY CENTER LTD. (1)
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XEROX CORPORATION (1)
6,201,633 Micro-electromechanical based bistable color display sheets 250 1999
 
ZYVEX MANAGEMENT CORPORATION (1)
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OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (8)
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5,896,796 Device for punching holes in a bicycle rim 31 1997
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6,449,084 Optical deflector 73 2000
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 229 2003
2007/0064,760 Optical amplification in miniaturized polymer cavity resonators 17 2004
2006/0203,325 Light Modulator Device 21 2006

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (5)
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,875,485 Methods of fabricating MEMS devices having overlying support structures 2 2009
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,098,417 Electromechanical system having a dielectric movable membrane 0 2011
 
NXP B.V. (1)
7,982,558 Integrated single-crystal MEMS device 1 2007
 
UNITED MICROELECTRONICS CORP. (1)
8,368,153 Wafer level package of MEMS microphone and manufacturing method thereof 0 2010

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