Pressure sensor with dual chambers
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United States of America Patent
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-
Aug 4, 2009
Grant Date -
Nov 22, 2007
app pub date -
Jul 29, 2007
filing date -
Oct 18, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines sealed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer to form a sealed reference chamber. A cap defines apertures. The cap extends from the substrate assembly to cover the membrane and thereby form an apertured chamber.
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